Electrostatic Discharge Implantation to Improve Machine-Model ESD Robustness of Stacked NMOS in Mixed-Voltage I/O Interface Circuits

A novel electrostatic discharge (ESD) implantation method is proposed to significantly improve machinemodel (MM) ESD robustness of NMOS device in stacked configuration (stacked NMOS). By using this ESD implantation method, the ESD current is discharged far away from the surface channel of NMOS, therefore the stacked NMOS in the mixed-voltage I/O interface can sustain a much higher ESD level, especially under the MM ESD stress. The MM ESD robustness of the stacked NMOS with a device dimension of W/L=300µm/0.5µm for each NMOS has been successfully improved from the original 358V to become 491V in a 0.25-µm CMOS process. This ESD implantation method with the n-type impurity is fully process-compatible to general sub-quarter-micron CMOS processes. 1

Electrostatic discharge protection circuit for high-speed mixed-signal circuits

ESD, the discharge of electrostatically generated charges into an IC, is one of the most important reliability problems for ultra-scaled devices. This electrostatic charge can generate voltages of up to tens of kilovolts. These very high voltages can generate very high electric fields and currents across semiconductor devices, which may result in dielectric damage or melting of semiconductors and contacts. It has been reported that up to 70% of IC failures are caused by ESD. Therefore, it’s necessary to design a protection circuit for each pin that discharges the ESD energy to the ground. As the devices are continuously scaling down, while ESD energy remains the same, they become more vulnerable to ESD stress. This higher susceptibility to ESD damage is due to thinner gate oxides and shallower junctions. Furthermore, higher operating frequency of the scaled technologies enforces lower parasitic capacitance of the ESD protection circuits. As a result, increasing the robustness of the ESD protection circuits with minimum additional parasitic capacitance is the main challenge in state of the art CMOS processes. Providing a complete ESD immunity for any circuit involves the design of proper protection circuits for I/O pins in addition to an ESD clamp between power supply pins. In this research both of these aspects are investigated and optimized solutions for them are reported. As Silicon Controlled Rectifier (SCR) has the highest ESD protection level per unit area, ESD protection for I/O pins is provided by optimizing the first breakdown voltage and latch-up immunity of SCR family devices. The triggering voltage of SCR is reduced by a new implementation of gate-substrate triggering technique. Furthermore, a new device based on SCR with internal darlington pair is introduced that can provide ESD protection with very small parasitic capacitance. Besides reducing triggering voltage, latch-up immunity of SCR devices is improved using two novel techniques to increase the holding voltage and the holding current. ESD protection between power rails is provided with transient clamps in which the triggering circuit keeps the clamp “on” during the ESD event. In this research, two new clamps are reported that enhance the triggering circuit of the clamp. The first method uses a CMOS thyristor element to provide enough delay time while the second method uses a flip flop to latch the clamp into “on” state at the ESD event. Moreover, the stability of transient clamps is analyzed and it’s been shown that the two proposed clamps have the highest stability compared to other state of the art ESD clamps. Finally, in order to investigate the impact of ESD protection circuits on high speed applications a current mode logic (CML) driver is designed in 0.13μm CMOS technology. The protection for this driver is provided using both MOS-based and SCR-based protection methods. Measurement results show that, compared to MOS-based protection, SCR-based protection has less impact on the driver performance due to its lower parasitic capacitance

Analysis of design strategies for RF ESD problems in CMOS circuits

This thesis analyses the design strategies used to protect RF circuits that are implemented in CMOS technologies. It investigates, in detail, the physical mechanisms involved when a ggNMOS structure is exposed to an ESD event and undergoes snapback. The understanding gained is used to understand why the performance of the current RF ESD clamp is poor and suggestions are made as to how the performance of ggNMOS clamps can be improved beyond the current body of knowledge. The ultimate aim is to be able to design effective ESD protection clamps whilst minimising the effect the circuit has on RF I/O signals. A current ggNMOS based RF ESD I/O protection circuit is analysed in detail using a Transmission Line Pulse (TLP) tester. This is shown to be a very effective diagnostic tool by showing many characteristics of the ggNMOS during the triggering and conducting phase of the ESD event and demonstrate deficiencies in the clamp design. The use of a FIB enhances the analysis by allowing the isolation of individual components in the circuit and therefore their analysis using the TLP tester. SPICE simulations are used to provide further commentary on the debate surrounding the specification required of a TLP tester for there to be a good correlation between a TLP test and the industry standard Human Body Model (HBM) ESD test. Finite element simulations are used to probe deeper in to the mechanisms involved when a ggNMOS undergoes snapback especially with regard to the contribution parasitic components within the ggNMOS make to the snapback process. New ggNMOS clamps are proposed which after some modification are shown to work. Some of the finite element experiments are repeated in a 0.18μπ7. process CMOS test chip and a comparison is made between the two sets of results. In the concluding chapter understanding that has been gained from previous chapters is combined with the published body of knowledge to suggest and explain improvements in the design of a ggNMOS for RF and standard applications. These improvements will improve homogeneity of ggNMOS operation thus allowing the device size to be reduced and parasitic loading for a given ESD performance. These techniques can also be used to ensure that the ESD current does not take an unintended path through the chip

CDM Robust & Low Noise ESD protection circuits

In spite of significant progress during last couple of decades, ESD still affects production yields, manufacturing costs, product quality, product reliability and profitability. The objective of an ESD protection circuit is to create a harmless shunting path for the static electricity before it damages the sensitive electronic circuits. As the devices are scaling down, while ESD energy remains the same, VLSIs are becoming more vulnerable to ESD stress. This higher susceptibility to ESD damage is due to thinner gate oxides and shallower junctions. Furthermore, higher operating frequency of the scaled technologies enforces lower parasitic capacitance of the ESD protection circuits. Hence, increasing the robustness of the ESD protection circuits with minimum additional parasitic capacitance is the main challenge in state of the art CMOS processes. Furthermore with scaling, the integration of analog blocks such as ADC, PLL’s, DLL’s, oscillator etc. on digital chips has provided cheap system on chip (SOC) solutions. However, when analog and digital chip are combined into single mixed-signal chip, on-chip noise coupling from the digital to the analog circuitry through ESD protection circuits becomes a big concern. Thus, increasing supply noise isolation while ensuring the ESD protection robustness is also a big challenge. In this thesis, several ESD protection circuits and devices have been proposed to address the critical issues like increased leakage current, slower turn-on time of devices, increased susceptibility to power supply isolation etc. The proposed ESD protection circuits/devices have been classified into two categories: Pad based ESD protection in which the ESD protection circuits are placed in the I/O pads, and Rail based ESD in which ESD protection circuit is placed between power supplies. In our research, both these aspects have been investigated. The Silicon Controlled Rectifier (SCR) based devices have been used for Pad ESD protection as they have highest ESD protection level per unit area. Two novel devices Darlington based SCR (DSCR) and NMOS Darlington based SCR (NMOS-DSCR) having faster turn-on time, lower first breakdown voltage and low capacitance have been proposed. The transient clamps have been investigated and optimized for Rail based ESD protection. In this research, we have addressed the issue of leakage current in transient clamps. A methodology has been purposed to reduce the leakage current by more than 200,000 times without having major impact on the ESD performance. Also, the issue of noise coupling from digital supply to analog supply through the ESD protection circuits has been addressed. A new transient clamp has been proposed to increase the power supply noise isolation. Finally, a new methodology of placement of analog circuit with respect to transient clamp has been proposed to further increase the power supply noise isolation

Electrostatic Discharge Protection Devices for CMOS I/O Ports

In modern integrated circuits, electrostatic discharge (ESD) is a major problem that influences the reliability of operation, yield and cost of fabrication. ESD discharge events can generate static voltages beyond a few kilo volts. If these voltages are dissipated in the chip, high electric field and high current are generated and will destroy the gate oxide material or melt the metal interconnects. In order to protect the chip from these unexpected ESD events, special protection devices are designed and connect to each pin of the IC for this purpose. With the scaling of nano-metric processing technologies, the ESD design window has become more critical. That leaves little room for designers to maneuver. A good ESD protection device must have superior current sinking ability and also does not affect the normal operation of the IC. The two main categories of ESD devices are snapback and non-snapback ones. Non-snapback designs usually consist of forward biased diode strings with properties, such as low heat and power, high current carrying ability. Snapback devices use MOSFET and silicon controlled rectifier (SCR). They exploit avalanche breakdown to conduct current. In order to investigate the properties of various devices, they need to be modeled in device simulators. That process begins with realizing a technology specific NMOS and PMOS in the device simulators. The MOSFET process parameters are exported to build ESD structures. Then, by inserting ESD devices into different simulation test-benches, such as human-body model or charged-device model, their performance is evaluated through a series of figures of merit, which include peak current, voltage overshoot, capacitance, latch-up immunity and current dissipation time. A successful design can sink a large amount of current within an extremely short duration, while it should demonstrate a low voltage overshoot and capacitance. In this research work, an inter-weaving diode and SCR hybrid device demonstrated its effectiveness against tight ESD test standards is shown

Design And Characterization Of Noveldevices For New Generation Of Electrostaticdischarge (esd) Protection Structures

The technology evolution and complexity of new circuit applications involve emerging reliability problems and even more sensitivity of integrated circuits (ICs) to electrostatic discharge (ESD)-induced damage. Regardless of the aggressive evolution in downscaling and subsequent improvement in applications\u27 performance, ICs still should comply with minimum standards of ESD robustness in order to be commercially viable. Although the topic of ESD has received attention industry-wide, the design of robust protection structures and circuits remains challenging because ESD failure mechanisms continue to become more acute and design windows less flexible. The sensitivity of smaller devices, along with a limited understanding of the ESD phenomena and the resulting empirical approach to solving the problem have yielded time consuming, costly and unpredictable design procedures. As turnaround design cycles in new technologies continue to decrease, the traditional trial-and-error design strategy is no longer acceptable, and better analysis capabilities and a systematic design approach are essential to accomplish the increasingly difficult task of adequate ESD protection-circuit design. This dissertation presents a comprehensive design methodology for implementing custom on-chip ESD protection structures in different commercial technologies. First, the ESD topic in the semiconductor industry is revised, as well as ESD standards and commonly used schemes to provide ESD protection in ICs. The general ESD protection approaches are illustrated and discussed using different types of protection components and the concept of the ESD design window. The problem of implementing and assessing ESD protection structures is addressed next, starting from the general discussion of two design methods. The first ESD design method follows an experimental approach, in which design requirements are obtained via fabrication, testing and failure analysis. The second method consists of the technology computer aided design (TCAD)-assisted ESD protection design. This method incorporates numerical simulations in different stages of the ESD design process, and thus results in a more predictable and systematic ESD development strategy. Physical models considered in the device simulation are discussed and subsequently utilized in different ESD designs along this study. The implementation of new custom ESD protection devices and a further integration strategy based on the concept of the high-holding, low-voltage-trigger, silicon controlled rectifier (SCR) (HH-LVTSCR) is demonstrated for implementing ESD solutions in commercial low-voltage digital and mixed-signal applications developed using complementary metal oxide semiconductor (CMOS) and bipolar CMOS (BiCMOS) technologies. This ESD protection concept proposed in this study is also successfully incorporated for implementing a tailored ESD protection solution for an emerging CMOS-based embedded MicroElectroMechanical (MEMS) sensor system-on-a-chip (SoC) technology. Circuit applications that are required to operate at relatively large input/output (I/O) voltage, above/below the VDD/VSS core circuit power supply, introduce further complications in the development and integration of ESD protection solutions. In these applications, the I/O operating voltage can extend over one order of magnitude larger than the safe operating voltage established in advanced technologies, while the IC is also required to comply with stringent ESD robustness requirements. A practical TCAD methodology based on a process- and device- simulation is demonstrated for assessment of the device physics, and subsequent design and implementation of custom P1N1-P2N2 and coupled P1N1-P2N2//N2P3-N3P1 silicon controlled rectifier (SCR)-type devices for ESD protection in different circuit applications, including those applications operating at I/O voltage considerably above/below the VDD/VSS. Results from the TCAD simulations are compared with measurements and used for developing technology- and circuit-adapted protection structures, capable of blocking large voltages and providing versatile dual-polarity symmetric/asymmetric S-type current-voltage characteristics for high ESD protection. The design guidelines introduced in this dissertation are used to optimize and extend the ESD protection capability in existing CMOS/BiCMOS technologies, by implementing smaller and more robust single- or dual-polarity ESD protection structures within the flexibility provided in the specific fabrication process. The ESD design methodologies and characteristics of the developed protection devices are demonstrated via ESD measurements obtained from fabricated stand-alone devices and on-chip ESD protections. The superior ESD protection performance of the devices developed in this study is also successfully verified in IC applications where the standard ESD protection approaches are not suitable to meet the stringent area constraint and performance requirement

Development of the readout electronics for the high luminosity upgrade of the CMS outer strip tracker

The High-luminosity upgrade of the LHC will deliver the dramatic increase in luminosity required for precision measurements and to probe Beyond the Standard Model theories. At the same time, it will present unprecedented challenges in terms of pileup and radiation degradation. The CMS experiment is set for an extensive upgrade campaign, which includes the replacement of the current Tracker with another all-silicon detector with improved performance and reduced mass. One of the most ambitious aspects of the future Tracker will be the ability to identify high transverse momentum track candidates at every bunch crossing and with very low latency, in order to include tracking information at the L1 hardware trigger stage, a critical and effective step to achieve triggers with high purity and low threshold. This thesis presents the development and the testing of the CMS Binary Chip 2 (CBC2), a prototype Application Specific Integrated Circuit (ASIC) for the binary front-end readout of silicon strip detectors modules in the Outer Tracker, which also integrates the logic necessary to identify high transverse momentum candidates by correlating hits from two silicon strip detectors, separated by a few millimetres. The design exploits the relation between the transverse momentum and the curvature in the trajectory of charged particles subject to the large magnetic field of CMS. The logic which follows the analogue amplification and binary conversion rejects clusters wider than a programmable maximum number of adjacent strips, compensates for the geometrical offset in the alignment of the module, and correlates the hits between the two sensor layers. Data are stored in a memory buffer before being transferred to an additional buffer stage and being serially read-out upon receipt of a Level 1 trigger. The CBC2 has been subject to extensive testing since its production in January 2013: this work reports the results of electrical characterization, of the total ionizing dose irradiation tests, and the performance of a prototype module instrumented with CBC2 in realistic conditions in a beam test. The latter is the first experimental demonstration of the Pt-selection principle central to the future of CMS. Several total-ionizing-dose tests highlighted no functional issue, but observed significant excess static current for doses <1 Mrad. The source of the excess was traced to static leakage current in the memory pipeline, and is believed to be a consequence of the high instantaneous dose delivered by the x-ray setup. Nevertheless, a new SRAM layout aimed at removing the leakage path was proposed for the CBC3. The results of single event upset testing of the chip are also reported, two of the three distinct memory circuits used in the chip were proven to meet the expected robustness, while the third will be replaced in the next iteration of the chip. Finally, the next version of the ASIC is presented, highlighting the additional features of the final prototype, such as half-strip resolution, additional trigger logic functionality, longer trigger latency and higher rate, and fully synchronous stub readout.Open Acces

On-Chip Power Supply Noise: Scaling, Suppression and Detection

Design metrics such as area, timing and power are generally considered as the primary criteria in the design of modern day circuits, however, the minimization of power supply noise, among other noise sources, is appreciably more important since not only can it cause a degradation in these parameters but can cause entire chips to fail. Ensuring the integrity of the power supply voltage in the power distribution network of a chip is therefore crucial to both building reliable circuits as well as preventing circuit performance degradation. Power supply noise concerns, predicted over two decades ago, continue to draw significant attention, and with present CMOS technology projected to keep on scaling, it is shown in this work that these issues are not expected to diminish. This research also considers the management and on-chip detection of power supply noise. There are various methods of managing power supply noise, with the use of decoupling capacitors being the most common technique for suppressing the noise. An in-depth analysis of decap structures including scaling effects is presented in this work with corroborating silicon results. The applicability of various decaps for given design constraints is provided. It is shown that MOS-metal hybrid structures can provide a significant increase in capacitance per unit area compared to traditional structures and will continue to be an important structure as technology continues to scale. Noise suppression by means of current shifting within the clock period of an ALU block is further shown to be an additional method of reducing the minimum voltage observed on its associated supply. A simple, and area and power efficient technique for on-chip supply noise detection is also proposed

Electronic systems for intelligent particle tracking in the High Energy Physics field

This Ph.D thesis describes the development of a novel readout ASIC for hybrid pixel detector with intelligent particle tracking capabilities in High Energy Physics (HEP) application, called Macro Pixel ASIC (MPA). The concept of intelligent tracking is introduced for the upgrade of the particle tracking system of the Compact Muon Solenoid (CMS) experiment of the Large Hadron Collider (LHC) at CERN: this detector must be capable of selecting at front--end level the interesting particle and of providing them continuously to the back-end. This new functionality is required to cope with the improved performances of the LHC when, in about ten years' time, a major upgrade will lead to the High Luminosity scenario (HL-LHC). The high complexity of the digital logic for particle selection and the very low power requirement of 95% in particle selection and a data reduction from 200 Tb/s/cm2 to 1 Tb/s/cm2. A prototype, called MPA-Light, has been designed, produced and tested. According to the measurements, the prototype respects all the specications. The same device has been used for multi-chip assembly with a pixelated sensor. The assembly characterization with radioactive sources conrms the result obtained on the bare chip