Fpga-based control of piezoelectric actuators

In many industrial applications like semiconductor production and optical inspection systems, the availability of positioning systems capable to follow trajectory paths in the range of several centimetres, featuring at the same time a nanometre-range precision, is demanding. Pure piezoelectric stages and standard positioning systems with motor and spindle are not able to meet such requirements, because of the small operation range and inadequacies like backlash and friction. One concept for overcoming these problems consists of a hybrid positioning system built through the integration of a DC-drive in series with a piezoelectric actuator. The wide range of potential applications enables a considerable market potential for such an actuator, but due to the high variety of possible positioned objects and dynamic requirements, the required control complexity may be significant. In this paper, a real-time capable state-space control concept for the piezoelectric actuators, embedded in such a hybrid micropositioning system, is presented. The implementation of the controller together with a real-time capable hysteresis compensation measure is performed using a low-budget FPGA-board, whereas the superimposed integrated controller is realized with a dSPACE RCP-system. The advantages of the designed control over a traditional proportional-integral control structure are proven through experimental results using a commercially available hybrid micropositioning system. Positioning results by different dynamic requirements featuring positioning velocities from 1 μm/s up to 5 cm/s are given

Real-time performance of mechatronic PZT module using active vibration feedback control

This paper proposes an innovative mechatronic piezo-actuated module to control vibrations in modern machine tools. Vibrations represent one of the main issues that seriously compromise the quality of the workpiece. The active vibration control (AVC) device is composed of a host part integrated with sensors and actuators synchronized by a regulator; it is able to make a self-assessment and adjust to alterations in the environment. In particular, an innovative smart actuator has been designed and developed to satisfy machining requirements during active vibration control. This study presents the mechatronic model based on the kinematic and dynamic analysis of the AVC device. To ensure a real time performance, a H2-LQG controller has been developed and validated by simulations involving a machine tool, PZT actuator and controller models. The Hardware in the Loop (HIL) architecture is adopted to control and attenuate the vibrations. A set of experimental tests has been performed to validate the AVC module on a commercial machine tool. The feasibility of the real time vibration damping is demonstrated and the simulation accuracy is evaluate

Non-linear control of a hydraulic piezo-valve using a generalized Prandtl-Ishlinskii hysteresis model

The potential to actuate proportional flow control valves using piezoelectric ceramics or other smart materials has been investigated for a number of years. Although performance advantages compared to electromagnetic actuation have been demonstrated, a major obstacle has proven to be ferroelectric hysteresis, which is typically 20% for a piezoelectric actuator. In this paper, a detailed study of valve control methods incorporating hysteresis compensation is made for the first time. Experimental results are obtained from a novel spool valve actuated by a multi-layer piezoelectric ring bender. A generalized Prandtl-Ishlinskii model, fitted to experimental training data from the prototype valve, is used to model hysteresis empirically. This form of model is analytically invertible and is used to compensate for hysteresis in the prototype valve both open loop, and in several configurations of closed loop real time control system. The closed loop control configurations use PID (Proportional Integral Derivative) control with either the inverse hysteresis model in the forward path or in a command feedforward path. Performance is compared to both open and closed loop control without hysteresis compensation via step and frequency response results. Results show a significant improvement in accuracy and dynamic performance using hysteresis compensation in open loop, but where valve position feedback is available for closed loop control the improvements are smaller, and so conventional PID control may well be sufficient. It is concluded that the ability to combine state-of-the-art multi-layer piezoelectric bending actuators with either sophisticated hysteresis compensation or closed loop control provides a route for the creation of a new generation of high performance piezoelectric valves.<br/

Design and control of a 6-degree-of-freedom precision positioning system

This paper presents the design and test of a6-degree-of-freedom (DOF) precision positioning system, which is assembledby two different 3-DOF precision positioning stages each driven by three piezoelectric actuators (PEAs). Based on the precision PEAs and flexure hinge mechanisms, high precision motion is obtained.The design methodology and kinematic characteristics of the6-DOF positioning system areinvestigated. According to an effective kinematic model, the transformation matrices are obtained, which is used to predict the relationship between the output displacement from the system arrangement and the amountof PEAsexpansion. In addition, the static and dynamic characteristics of the 6-DOF system have been evaluated by finite element method (FEM) simulation andexperiments. The design structure provides a high dynamic bandwidth withthe first naturalfrequency of 586.3 Hz.Decoupling control is proposed to solve the existing coupling motion of the 6-DOF system. Meanwhile, in order to compensate for the hysteresis of PEAs, the inverse Bouc-Wen model was applied as a feedforward hysteresis compensator in the feedforward/feedback hybrid control method. Finally, extensive experiments were performed to verify the tracking performance of the developed mechanism

A lifting and actuating unit for a planar nanoprecision drive system

Ein wesentlicher Treiber in vielen heutigen Technologiebereichen ist die Miniaturisierung von elektrischen, optischen und mechanischen Systemen. Mehrachsige Geräte mit großen Verfahrbereichen und extremer Präzision spielen dabei nicht nur in der Messung und Qualitätssicherung, sondern auch in der Fabrikation und Manipulation von Nanometerstrukturen eine entscheidende Rolle. Die vertikale Bewegungsaufgabe stellt eine besondere Herausforderung dar, da die Schwerkraft des bewegten Objektes permanent kompensiert werden muss. Diese Arbeit schlägt dafür eine Vertikalhub- und -aktuiereinheit vor und trägt damit zur Weiterentwicklung von Nanometer-Präzisionsantriebssystemen bei. Grundlegende mögliche kinematische Integrationsvarianten werden betrachtet und entsprechend anwendungsrelevanter Kriterien gegenübergestellt. Der gezeigte parallelkinematische Ansatz zeichnet sich durch seine gute Integrierbarkeit, geringe negative Einflüsse auf die umliegenden Systeme, sowie die Verteilung der Last auf mehrere Stellglieder aus. Folgend wird ein konstruktiver Entwicklungsprozess zusammengestellt, um diese favorisierte Variante weiter auszuarbeiten. Im Laufe dieses Prozesses wird die zu entwickelnde Einheit in das Gesamtsystem eingeordnet und ihre Anforderungen, Randbedingungen und enthaltenen Teilsysteme definiert. Die vertikale Aktuierung besteht dabei aus zwei Systemen: Einer pneumatische Gewichtskraftkompensation und einem elektromagnetischen Präzisionsantrieb. Das technische Prinzip der Hubeinheit wird erstellt und die Teilsysteme im verfügbaren Bauraum angeordnet. Daraus wird ein detailliertes Modell des pneumatischen Aktors abgeleitet, dieser dimensioniert und dessen Eigenschaften bestimmt. Die Ausdehnung dieses Teilsystems definiert die räumlichen Grenzen für den umliegenden Präzisionsantrieb. Zur Auslegung dieses Antriebs wird das Kraft-/Leistungsverhältnis als Zielgröße definiert. Mit Hilfe von numerischer Simulation und Optimierung werden Geometrien für verschiedenste Topologien entworfen und bewertet. Die geeignetste Variante wird mit allen Teilsystemen in eine Einheit integriert und auskonstruiert. Abschließend werden zukünftige Schritte für die Integration der Einheit in ein Präzisionsantriebssystem dargestellt und mögliche Anwendungsszenarien in der Nanofabrikation präsentiert.A central driver in many of today's fields of technology is the miniaturization of electrical, optical and mechanical systems. Multi-axis devices with large travel ranges and extreme precision play a decisive role, not only in measurement and quality assurance, but also in the fabrication and manipulation of nanometer structures. The vertical movement task poses a special challenge, since the gravitational load of the moving object must be compensated permanently. This thesis proposes a vertically lifting and actuating unit and thus contributes to the further development of nanometer precision drive systems. Basic possible kinematic integration variants are considered and compared according to application relevant criteria. The presented parallel kinematic approach is characterized by its good integrability, its minimal negative influences on the surrounding systems, as well as the distribution of the load to several actuators. Subsequently, a constructive development process is compiled to further develop this favoured variant. During this process the unit to be developed is integrated into the overall system. Further, its requirements, boundary conditions and subsystems are defined. The vertical actuation consists of two systems: A pneumatic weight force compensation and an electromagnetic precision drive. The technical principle of the lifting unit is developed and the subsystems are arranged in the available design space. Based on this, a detailed model of the pneumatic actuator is created, its dimensions derived and properties obtained. These dimensions define the spatial limits for the surrounding precision actuator. For the design of this actuator, the force-power ratio is chosen as the objective quantity. Using numerical simulations and optimization, geometries for various topologies are created and evaluated. The most suitable variant is designed and integrated with all other subsystems into one unit. Finally, upcoming steps for integrating the unit into a precision drive system are outlined and possible future applications in the field of nanofabrication are presented

Study and Development of Mechatronic Devices and Machine Learning Schemes for Industrial Applications

Obiettivo del presente progetto di dottorato è lo studio e sviluppo di sistemi meccatronici e di modelli machine learning per macchine operatrici e celle robotizzate al fine di incrementarne le prestazioni operative e gestionali. Le pressanti esigenze del mercato hanno imposto lavorazioni con livelli di accuratezza sempre più elevati, tempi di risposta e di produzione ridotti e a costi contenuti. In questo contesto nasce il progetto di dottorato, focalizzato su applicazioni di lavorazioni meccaniche (e.g. fresatura), che includono sistemi complessi quali, ad esempio, macchine a 5 assi e, tipicamente, robot industriali, il cui utilizzo varia a seconda dell’impiego. Oltre alle specifiche problematiche delle lavorazioni, si deve anche considerare l’interazione macchina-robot per permettere un’efficiente capacità e gestione dell’intero impianto. La complessità di questo scenario può evidenziare sia specifiche problematiche inerenti alle lavorazioni (e.g. vibrazioni) sia inefficienze più generali che riguardano l’impianto produttivo (e.g. asservimento delle macchine con robot, consumo energetico). Vista la vastità della tematica, il progetto si è suddiviso in due parti, lo studio e sviluppo di due specifici dispositivi meccatronici, basati sull’impiego di attuatori piezoelettrici, che puntano principalmente alla compensazione di vibrazioni indotte dal processo di lavorazione, e l’integrazione di robot per l’asservimento di macchine utensili in celle robotizzate, impiegando modelli di machine learning per definire le traiettorie ed i punti di raggiungibilità del robot, al fine di migliorarne l’accuratezza del posizionamento del pezzo in diverse condizioni. In conclusione, la presente tesi vuole proporre soluzioni meccatroniche e di machine learning per incrementare le prestazioni di macchine e sistemi robotizzati convenzionali. I sistemi studiati possono essere integrati in celle robotizzate, focalizzandosi sia su problematiche specifiche delle lavorazioni in macchine operatrici sia su problematiche a livello di impianto robot-macchina. Le ricerche hanno riguardato un’approfondita valutazione dello stato dell’arte, la definizione dei modelli teorici, la progettazione funzionale e l’identificazione delle criticità del design dei prototipi, la realizzazione delle simulazioni e delle prove sperimentali e l’analisi dei risultati.The aim of this Ph.D. project is the study and development of mechatronic systems and machine learning models for machine tools and robotic applications to improve their performances. The industrial demands have imposed an ever-increasing accuracy and efficiency requirement whilst constraining the cost. In this context, this project focuses on machining processes (e.g. milling) that include complex systems such as 5-axes machine tool and industrial robots, employed for various applications. Beside the issues related to the machining process itself, the interaction between the machining centre and the robot must be considered for the complete industrial plant’s improvement. This scenario´s complexity depicts both specific machining problematics (e.g. vibrations) and more general issues related to the complete plant, such as machine tending with an industrial robot and energy consumption. Regarding the immensity of this area, this project is divided in two parts, the study and development of two mechatronic devices, based on piezoelectric stack actuators, for the active vibration control during the machining process, and the robot machine tending within the robotic cell, employing machine learning schemes for the trajectory definition and robot reachability to improve the corresponding positioning accuracy. In conclusion, this thesis aims to provide a set of solutions, based on mechatronic devices and machine learning schemes, to improve the conventional machining centre and the robotic systems performances. The studied systems can be integrated within a robotic cell, focusing on issues related to the specific machining process and to the interaction between robot-machining centre. This research required a thorough study of the state-of-the-art, the formulation of theoretical models, the functional design development, the identification of the critical aspects in the prototype designs, the simulation and experimental campaigns, and the analysis of the obtained results