940 research outputs found

    A Robust Continuous-Time MPC of a DCโ€“DC Boost Converter Interfaced With a Grid-Connected Photovoltaic System

    Get PDF
    The main function of the dcโ€“dc converter in a grid-connected photovoltaic (PV) system is to regulate the terminal voltage of the PV arrays to ensure delivering the maximum power to the grid. The purpose of this paper is to design and practically implement a robust continuous-time model predictive control (CTMPC) for a dcโ€“dc boost converter, feeding a three-phase inverter of a grid-connected PV system to regulate the PV output voltage. In CTMPC, the system behavior is predicted based on Taylor series expansion, raising concerns about the prediction accuracy in the presence of parametric uncertainty and unknown external disturbances. To overcome this drawback, a disturbance observer is designed and combined with CTMPC to enhance the steady-state performance in the presence of model uncertainty and unknown disturbance such as the PV current, which varies nonlinearly with the operating point. An interesting feature is that the composite controller reduces to a conventional PI controller plus a predictive term that allows further improvement of the dynamic performance over the whole operating range. The effectiveness of the proposed controller was tested numerically and validated experimentally with the consideration of the grid-connected PV inverter system and its controller

    Composite Disturbance Filtering: A Novel State Estimation Scheme for Systems With Multi-Source, Heterogeneous, and Isomeric Disturbances

    Full text link
    State estimation has long been a fundamental problem in signal processing and control areas. The main challenge is to design filters with ability to reject or attenuate various disturbances. With the arrival of big data era, the disturbances of complicated systems are physically multi-source, mathematically heterogenous, affecting the system dynamics via isomeric (additive, multiplicative and recessive) channels, and deeply coupled with each other. In traditional filtering schemes, the multi-source heterogenous disturbances are usually simplified as a lumped one so that the "single" disturbance can be either rejected or attenuated. Since the pioneering work in 2012, a novel state estimation methodology called {\it composite disturbance filtering} (CDF) has been proposed, which deals with the multi-source, heterogenous, and isomeric disturbances based on their specific characteristics. With the CDF, enhanced anti-disturbance capability can be achieved via refined quantification, effective separation, and simultaneous rejection and attenuation of the disturbances. In this paper, an overview of the CDF scheme is provided, which includes the basic principle, general design procedure, application scenarios (e.g. alignment, localization and navigation), and future research directions. In summary, it is expected that the CDF offers an effective tool for state estimation, especially in the presence of multi-source heterogeneous disturbances

    Prรคdiktive Regelung und Finite-Set-Beobachter fรผr Windgeneratoren mit variabler Drehgeschwindigkeit

    Get PDF
    This dissertation presents several model predictive control (MPC) techniques and finite-position-set observers (FPSOs) for permanent-magnet synchronous generators and doubly-fed induction generators in variable-speed wind turbines. The proposed FPSOs are novel ones and based on the concept of finite-control-set MPC. Then, the problems of the MPC techniques like sensitivity to variations of the model parameters and others are investigated and solved in this work.Die vorliegende Dissertation stellt mehrere unterschiedliche Verfahren der modellprรคdiktiven Regelung (MPC) und so genannte Finite-Position-Set-Beobachter (FPSO) sowohl fรผr Synchrongeneratoren mit Permanentmagneterregung als auch fรผr doppelt gespeiste Asynchrongeneratoren in Windkraftanlagen mit variabler Drehzahl vor und untersucht diese. Fรผr die Beobachter (FPSO) wird ein neuartiger Ansatz vorgestellt, der auf dem Konzept der Finite-Control-Set-MPC basiert. AuรŸerdem werden typische Eigenschaften der MPC wie beispielsweise die Anfรคlligkeit gegenรผber Parameterschwankungen untersucht und kompensiert

    An Offset-Free Composite Model Predictive Control Strategy for DC/DC Buck Converter Feeding Constant Power Loads

    Get PDF

    Advances and Trends in Mathematical Modelling, Control and Identification of Vibrating Systems

    Get PDF
    This book introduces novel results on mathematical modelling, parameter identification, and automatic control for a wide range of applications of mechanical, electric, and mechatronic systems, where undesirable oscillations or vibrations are manifested. The six chapters of the book written by experts from international scientific community cover a wide range of interesting research topics related to: algebraic identification of rotordynamic parameters in rotor-bearing system using finite element models; model predictive control for active automotive suspension systems by means of hydraulic actuators; model-free data-driven-based control for a Voltage Source Converter-based Static Synchronous Compensator to improve the dynamic power grid performance under transient scenarios; an exact elasto-dynamics theory for bending vibrations for a class of flexible structures; motion profile tracking control and vibrating disturbance suppression for quadrotor aerial vehicles using artificial neural networks and particle swarm optimization; and multiple adaptive controllers based on B-Spline artificial neural networks for regulation and attenuation of low frequency oscillations for large-scale power systems. The book is addressed for both academic and industrial researchers and practitioners, as well as for postgraduate and undergraduate engineering students and other experts in a wide variety of disciplines seeking to know more about the advances and trends in mathematical modelling, control and identification of engineering systems in which undesirable oscillations or vibrations could be presented during their operation

    Offset-free feedback linearisation control of a three-phase grid-connected photovoltaic system

    Get PDF
    In this study, a state feedback control law is combined with a disturbance observer to enhance disturbance rejection capability of a grid-connected photovoltaic (PV) inverter. The control law is based on input-output feedback linearisation technique, while the existing disturbance observer is simplified and adopted for the system under investigation. The resulting control law has a proportional-integral (PI)/almost PI-derivative-like structure, which is convenient for real-time implementation. The objective of the proposed approach is to improve the DC-bus voltage regulation, while at the same time control the power exchange between the PV system and the grid. The stability of the closed-loop system under the composite controller is guaranteed by simple design parameters. Both simulation and experimental results show that the proposed method has significant abilities to initiate fast current control and accurate adjustment of the DC-bus voltage under model uncertainty and external disturbance

    Fault-tolerant load reduction control for large offshore wind turbines

    Get PDF
    Offshore wind turbines suffer from asymmetrical loading (blades, tower etc.), leading to enhanced structural fatigue. As well as asymmetrical loading different types of faults (pitch system faults etc.) can occur simultaneously, causing degradation of load mitigation performance and enhanced fatigue. Individual pitch control (IPC) provides an important method to achieve mitigation of rotor asymmetric loads, but this may be accompanied by a resulting enhancement of pitch movement leading to increased possibility of pitch system faults, which negative effects on IPC performance.This thesis focuses on combining the fault tolerant control (FTC) techniques with load reduction strategies by a more intelligent pitch control system (i.e. collective pitch control and IPC) for offshore wind turbines in a system level to reduce the operation & maintenance costs and improve the system reliability. The scenario of load mitigation is analogous to the FTC problem because the action of rotor/tower bending can be considered as a fault effect. The essential concept is to attempt to account for all the "fault effects" in the rotor and tower systems which can weaken the effect of bending moment reduction through the use of IPC.Motivated by the above, this thesis focuses on four aspects to fill the gap of the combination between FTC and IPC schemes. Firstly, a preview control system using model predictive control with future wind speed is proposed, which could be a possible alternative to using LiDAR technology when using preview control for load reduction. Secondly, a multivariable IPC controller for both blade and tower load mitigation considering the inherent couplings is investigated. Thirdly, appropriate control-based fault monitoring strategies including fault detection and fault estimation FE-based FTC scheme are proposed for several different pitch actuator/sensor faults. Furthermore, the combined analysis of an FE-based FTC strategy with the IPC system at a system level is provided and the robustness of the proposed strategy is verified

    ํ”Œ๋ผ์ฆˆ๋งˆ ์‹๊ฐ ์žฅ์น˜๋ฅผ ์œ„ํ•œ ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์˜ ์„ค๊ณ„

    Get PDF
    ํ•™์œ„๋…ผ๋ฌธ (๋ฐ•์‚ฌ)-- ์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› : ๊ณต๊ณผ๋Œ€ํ•™ ํ™”ํ•™์ƒ๋ฌผ๊ณตํ•™๋ถ€(์—๋„ˆ์ง€ํ™˜๊ฒฝ ํ™”ํ•™์œตํ•ฉ๊ธฐ์ˆ ์ „๊ณต), 2019. 2. ์ด์œค์šฐ.The semiconductor etching process, which is one of the most critical processes in the manufacturing of semiconductors and one that comprises numerous steps, requires higher sophistication as 10 nm semiconductors are mass produced. Currently, the semiconductor etching process is mostly done by physical and/or chemical etching with plasma. In addition, the plasma etching is getting increasingly popular with the miniaturization of the process to a scale of less than 10 nm. The result of a plasma etching process is represented in the form of an etch profile which is determined by the plasma variables. Therefore, the performance of the process depends on these variables, and it is essential to measure and control them in real time. Although research on the control of plasma etching processes has been actively carried out, the plasma etching process strongly relies on the experience and skill level of seasoned engineers at the industry level. This is because a plasma-based system is very complicated and sensitive, and has a time-varying characteristics. However, even though previous studies show excellent results, they employed invasive diagnostic tools, and have single variable control schemes where a counter change of another plasma variable during control actions for other variables might occur due to the highly interactive plasma characteristics. Moreover, they did not consider the time-varying characteristics of plasma-based systems. Therefore, this thesis proposes a multivariable control strategy which can cope with interaction effects and a design of an adaptive model predictive controller which maintains its performance wherein systems vary with time. At first, the plasma variables which are considered as controlled variables were selected as the electron density and the electron temperature. This is because one of the etch profile, especially etch rate, can be expressed as functions of those plasma variables and the variables can be measured by the optical emission spectroscopy which is a non-invasive diagnostic tool. The plasma variables were paired with instrumental variables through singular value decomposition and relative gain array for constructing the optimal multivariable system model. Two parallel proportional integral derivative (PID) controllers were designed based on the output errors then conducted plasma variable control simulations. Through the simulations, the exist of interaction between the variables was obviously verified. For resolving the interaction effectively, decoupler controllers were applied to the PID controllers. As it performed the control experiment of the Ar plasma electron density and electron temperature excellently, the possibility of multivariable control of plasma-based system is demonstrated. In spite of the meaningful control results using the PID controllers, there are obvious limitations in relation to the exquisiteness and to the characteristics of decoupler controllers as it highly dependent to the accuracy of the system model. In order to maintain performance even in the case of a system change, an advanced control strategy is required and model predictive control can be an alternative. Therefore, a model predictive controller was designed where the Bayesian optimization is used as tuning method for the maximization of the exquisiteness. The controller verified its capability as it conducted Ar plasma electron density control in a drift-free system. However, the performance of it deteriorated in control simulations of time-varying systems and in a control experiment performed in a system where O2 plasma was injected into an Ar plasma system inducing the high nonlinearity. Therefore, a more advanced control strategy which can overcome the difficulty was required. In an adaptive control method, once the information from the system is entered into the adjustment mechanism part, the part makes a decision to deliver it to the controller. Then the controller is modified in accordance with the decision and releases the optimal control action. The typical adaptive control algorithm, which is the recursive least squares algorithm, was used in this thesis. Using the algorithm with Kalman filter interpretation, the time-delay effect which comes from the plasma etching reactor can be considered. The recursive model parameter estimator utilizing this algorithm was tuned by Bayesian optimization. When the recursive model parameter estimator detects changes of the system model parameters in real time and transmits it to the model predictive controller, the controller calculates the optimal manipulated variable based on the modified model. The adaptive model predictive controller performed the same simulations and experiment as those performed by the model predictive controller. Unlike the model predictive controller, the proposed controller performed control excellently even when the system changes over time. Numerically, it showed the improved control ability by 24.7% and 30.4% in terms of the mean absolute percentage error and the number of deviated sample, respectively compared to the conventional model predictive controller. These results demonstrate that the adaptive model predictive controller designed in this theses is invaluable for plasma-based system control and is the effective controller for the plasma etching reactor. It is expected to make a significant contribution to plasma-based processes that require high sophistication and flexibility.์ˆ˜ ๋งŽ์€ ๊ณต์ •์œผ๋กœ ์ด๋ฃจ์–ด์ง„ ๋ฐ˜๋„์ฒด ์ œ์กฐ ๊ณต์ • ๋‚ด์—์„œ ๊ฐ€์žฅ ํฐ ๋น„์ค‘์„ ์ฐจ์ง€ํ•˜๊ณ  ์žˆ๋Š” ๋ฐ˜๋„์ฒด ์‹๊ฐ ๊ณต์ •์€ ์ตœ๊ทผ 10 nm๊ธ‰ ๋ฐ˜๋„์ฒด์˜ ์–‘์‚ฐ์ด ์ด๋ค„์ง์— ๋”ฐ๋ผ ์‹๊ฐ์˜ ๋†’์€ ์ •๊ต์„ฑ์ด ์š”๊ตฌ๋˜๊ณ  ์žˆ๋‹ค. ๋ฐ˜๋„์ฒด ์‹๊ฐ ๊ณต์ •์€ ํ˜„์žฌ ์‚ฐ์—…๊ณ„์—์„  ํ”Œ๋ผ์ฆˆ๋งˆ๋ฅผ ์ด์šฉํ•˜์—ฌ ๋ฌผ๋ฆฌ์ , ํ™”ํ•™์  ์‹๊ฐ์„ ์ผ์œผํ‚ค๋Š” ๋ฐฉ๋ฒ•์„ ํ†ตํ•ด ์ด๋ฃจ์–ด์ง€๊ณ  ์žˆ์œผ๋ฉฐ, ๊ณต์ •์ด 10 nm ๊ธ‰ ์ดํ•˜ ์Šค์ผ€์ผ๋กœ ๋ฏธ์„ธํ™”๋œ ํ›„๋กœ ์ด ๋ฐฉ๋ฒ•์ด ๋”์šฑ ๊ฐ๊ด‘ ๋ฐ›๊ณ  ์žˆ๋‹ค. ๊ณต์ •์˜ ๊ฒฐ๊ณผ๋Š” ์‹๊ฐ ํ”„๋กœํ•„์„ ๊ธฐ์ค€์œผ๋กœ ๊ฒฐ์ •๋˜๋Š” ๋ฐ ์ด ์‹๊ฐ ํ”„๋กœํ•„์ด ํ”Œ๋ผ์ฆˆ๋งˆ ๋ณ€์ˆ˜๋“ค์— ํฌ๊ฒŒ ์˜์กดํ•จ์ด ์ž…์ฆ๋จ์— ๋”ฐ๋ผ ์ด ๋ณ€์ˆ˜๋“ค์„ ์‹ค์‹œ๊ฐ„์œผ๋กœ ์ธก์ •ํ•˜๊ณ  ์ œ์–ดํ•˜๋Š” ๊ฒƒ์ด ๊ณต์ •์˜ ํ•ต์‹ฌ์ด ๋˜์—ˆ๋‹ค. ๊ทธ๋™์•ˆ ํ”Œ๋ผ์ฆˆ๋งˆ ๋ณ€์ˆ˜ ์ œ์–ด์— ๊ด€ํ•œ ์—ฐ๊ตฌ๋“ค์ด ํ™œ๋ฐœํžˆ ์ง„ํ–‰๋˜์–ด ์™”์œผ๋‚˜ ์•„์ง๊นŒ์ง€ ์‚ฐ์—…๊ณ„์—์„  ๊ทธ ์ด๋ก ๋“ค์„ ๋ฐ”๋กœ ํ™œ์šฉํ•˜์ง€ ๋ชปํ•˜๊ณ  ๊ฒฝํ—˜ ๋งŽ์€ ์—”์ง€๋‹ˆ์–ด์˜ ๊ฐ์— ์˜์กดํ•˜๊ณ  ์žˆ๋‹ค. ๊ทธ ์ด์œ ๋Š” ๊ทผ๋ณธ์ ์œผ๋กœ ์‹œ์Šคํ…œ์ด ๋งค์šฐ ๋ณต์žกํ•˜๊ณ  ์˜ˆ๋ฏผํ•  ๋ฟ ์•„๋‹ˆ๋ผ ์‹œ๊ฐ„์— ๋”ฐ๋ผ ๋ณ€ํ•˜๋Š” ํŠน์„ฑ์„ ๊ฐ–๊ณ  ์žˆ๊ธฐ ๋•Œ๋ฌธ์ด๋‹ค. ๊ทธ๋Ÿฌ๋‚˜ ์ด์ „์˜ ์—ฐ๊ตฌ๋“ค์€ ํ›Œ๋ฅญํ•œ ๊ฒฐ๊ณผ๋ฅผ ๋ณด์˜€์Œ์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ , ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์— ์ง์ ‘์ ์œผ๋กœ ์˜ํ–ฅ์„ ๋ฏธ์น˜๋Š” ์นจํˆฌ์„ฑ ์„ผ์„œ๋ฅผ ์ด์šฉํ–ˆ๊ฑฐ๋‚˜, ํ”Œ๋ผ์ฆˆ๋งˆ ๋ณ€์ˆ˜๋“ค๊ณผ ์žฅ์น˜ ๋ณ€์ˆ˜๋“ค์ด ์„œ๋กœ ๋ณต์žกํ•˜๊ฒŒ ์–ฝํ˜€ ์žˆ์–ด ์•ผ๊ธฐ๋˜๋Š” ์ƒํ˜ธ์ž‘์šฉ์„ ๊ฐ„๊ณผํ•  ์ˆ˜๋ฐ–์— ์—†๋Š” ๋‹จ๋ณ€์ˆ˜ ์ œ์–ด๋ฅผ ์ˆ˜ํ–‰ํ•œ ๋ฐ์— ๊ทธ์น˜๊ณ  ์žˆ๋‹ค. ๊ฒŒ๋‹ค๊ฐ€ ์™ธ๋ž€ ๋•Œ๋ฌธ์— ๋ฐœ์ƒ๋˜๋Š” ์‹œ๊ฐ„์— ๋”ฐ๋ผ ๋ณ€ํ•˜๋Š” ํŠน์„ฑ์„ ๊ณ ๋ คํ•˜์ง€ ๋ชปํ•˜๊ณ  ์žˆ๋‹ค. ๋”ฐ๋ผ์„œ, ๋ณธ ํ•™์œ„๋…ผ๋ฌธ์—์„œ๋Š” ๋ณ€์ˆ˜๊ฐ„ ์ƒํ˜ธ์ž‘์šฉ์„ ์ตœ์†Œํ™”ํ•˜๋Š” ๋‹ค๋ณ€์ˆ˜ ์ œ์–ด ์ „๋žต๊ณผ ์‹œ์Šคํ…œ์ด ์‹œ๊ฐ„์— ๋”ฐ๋ผ ๋ณ€ํ•˜๋Š” ์ƒํ™ฉ์—์„œ๋„ ์„ฑ๋Šฅ์ด ์•…ํ™”๋˜์ง€ ์•Š๋Š” ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์˜ ์„ค๊ณ„๋ฅผ ์ œ์•ˆํ•œ๋‹ค. ๋จผ์ €, ์ „์ž ๋ฐ€๋„์™€ ์ „์ž ์˜จ๋„๊ฐ€ ์ œ์–ด ๋Œ€์ƒ์ด ๋˜๋Š” ํ”Œ๋ผ์ฆˆ๋งˆ ๋ณ€์ˆ˜๋กœ ์„ ์ •๋˜์—ˆ๋‹ค. ์ด๋Š” ์‹๊ฐ ํ”„๋กœํ•„, ํŠนํžˆ ์‹๊ฐ๋ฅ ์ด ์ด ๋ณ€์ˆ˜๋“ค์— ๋Œ€ํ•œ ํ•จ์ˆ˜๋กœ ํ‘œํ˜„๋  ์ˆ˜ ์žˆ์œผ๋ฉฐ, ์ด ๋ณ€์ˆ˜๋“ค์€ ์นจํˆฌ์„ฑ ์„ผ์„œ์ธ ๊ด‘ํ•™์  ๋ฐœ๊ด‘ ๋ถ„๊ด‘๋ฒ•์„ ํ†ตํ•ด ์ธก์ •๋  ์ˆ˜ ์žˆ๊ธฐ ๋•Œ๋ฌธ์ด๋‹ค. ๊ทธ ๋‹ค์Œ์—, ์ตœ์ ์˜ ๋‹ค๋ณ€์ˆ˜ ์‹œ์Šคํ…œ ์ •์˜๋ฅผ ์œ„ํ•ด ํŠน์ด์น˜ ๋ถ„์„๊ณผ ์ƒ๋Œ€์ด๋“๋ฐฐ์—ด์„ ์ด์šฉํ•˜์—ฌ ๊ฐ€์žฅ ํšจ๊ณผ์ ์œผ๋กœ ์ œ์–ด๋ฅผ ์ˆ˜ํ–‰ํ•  ์ˆ˜ ์žˆ๋Š” ์žฅ์น˜ ๋ณ€์ˆ˜ ์„ ์ •์ด ์ด๋ฃจ์–ด์กŒ๋‹ค. ์ด๋ฅผ ๋ฐ”ํƒ•์œผ๋กœ ๋‘ ๊ฐœ์˜ ๋ณ‘๋ ฌ๋กœ ์—ฐ๊ฒฐ๋œ ๋น„๋ก€์ ๋ถ„๋ฏธ๋ถ„์ œ์–ด๊ธฐ๋ฅผ ์„ค๊ณ„, ์•„๋ฅด๊ณค ํ”Œ๋ผ์ฆˆ๋งˆ ์ „์ž ๋ฐ€๋„์™€ ์ „์ž ์˜จ๋„์˜ ์ œ์–ด ์‹œ๋ฎฌ๋ ˆ์ด์…˜์„ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ํ•ด๋‹น ์‹œ๋ฎฌ๋ ˆ์ด์…˜์—์„œ ๋ณ€์ˆ˜๋“ค ๊ฐ„ ์ƒํ˜ธ ์ž‘์šฉ์ด ํ™•์—ฐํ•จ์„ ์ž…์ฆํ•˜์˜€์œผ๋ฉฐ ์ด๋ฅผ ํšจ๊ณผ์ ์œผ๋กœ ํ•ด๊ฒฐํ•˜๊ธฐ ์œ„ํ•ด ๋””์ปคํ”Œ๋Ÿฌ ์ œ์–ด๊ธฐ๊ฐ€ ๋น„๋ก€์ ๋ถ„๋ฏธ๋ถ„์ œ์–ด๊ธฐ์— ๊ฒฐํ•ฉ๋˜์—ˆ๋‹ค. ์ด ์ œ์–ด๊ธฐ๋Š” ์•„๋ฅด๊ณค ํ”Œ๋ผ์ฆˆ๋งˆ์˜ ์ „์ž ๋ฐ€๋„์™€ ์ „์ž ์˜จ๋„ ์ œ์–ด๋ฅผ ํ›Œ๋ฅญํ•˜๊ฒŒ ์ˆ˜ํ–‰ํ•จ์œผ๋กœ์จ ๋‹ค๋ณ€์ˆ˜ ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์˜ ์ œ์–ด ๊ฐ€๋Šฅ์„ฑ์„ ๋ถ„๋ช…ํ•˜๊ฒŒ ์ž…์ฆํ•˜์˜€๋‹ค. ๋‹ค๋ณ€์ˆ˜ ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์˜ ์ œ์–ด ๊ฐ€๋Šฅ์„ฑ์ด ์ž…์ฆ ๋์Œ์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ , ์ด ์ œ์–ด ์ „๋žต์€ ๋น„๋ก€์ ๋ถ„๋ฏธ๋ถ„์ œ์–ด๊ธฐ์˜ ์ •๊ต์„ฑ ์ธก๋ฉด์—์„œ์˜ ํ•œ๊ณ„์™€ ๋””์ปคํ”Œ๋Ÿฌ ์ œ์–ด๊ธฐ์˜ ์‹œ์Šคํ…œ ๋ชจ๋ธ์— ๋Œ€ํ•œ ๋†’์€ ์˜์กด๋„ ํŠน์„ฑ์œผ๋กœ ์ธํ•œ ํ•œ๊ณ„๊ฐ€ ์กด์žฌํ•œ๋‹ค. ์‹œ์Šคํ…œ์ด ๋ณ€ํ•˜๋Š” ์ƒํ™ฉ์—์„œ๋„ ์„ฑ๋Šฅ์„ ์œ ์ง€ํ•˜๊ธฐ ์œ„ํ•ด์„  ๋”์šฑ ์ˆ˜์ค€ ๋†’์€ ์ œ์–ด ์ „๋žต์ด ์š”๊ตฌ๋˜๋ฉฐ, ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ฐ€ ๊ทธ ๋Œ€์•ˆ์ด ๋  ์ˆ˜ ์žˆ๋‹ค. ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์˜ ์„ค๊ณ„๋Š” ์ œ์–ด์˜ ์ •๊ต์„ฑ์„ ๊ทน๋Œ€ํ™” ์‹œํ‚ค๊ธฐ ์œ„ํ•ด ๋ฒ ์ด์‹œ์•ˆ ์ตœ์ ํ™” ๊ธฐ๋ฒ•์„ ํ†ตํ•ด ์ด๋ฃจ์–ด์กŒ๋‹ค. ์ด ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๋Š” ์ธ์œ„์ ์ธ ์™ธ๋ž€์ด ์ ์šฉ๋˜์ง€ ์•Š์€ ์ˆœ์ˆ˜ ์•„๋ฅด๊ณค ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์—์„œ์˜ ์ „์ž ๋ฐ€๋„ ์ œ์–ด๋ฅผ ํ›Œ๋ฅญํ•˜๊ฒŒ ์ˆ˜ํ–‰ํ•จ์œผ๋กœ์จ ๊ทธ ์„ฑ๋Šฅ์„ ์ž…์ฆํ•˜์˜€๋‹ค. ํ•˜์ง€๋งŒ, ์‹œ์Šคํ…œ์ด ์‹œ๊ฐ„์— ๋”ฐ๋ผ ๋ณ€ํ•˜๋Š” ์ƒํ™ฉ์„ ๋ชจ์‚ฌํ•œ ์‹œ๋ฎฌ๋ ˆ์ด์…˜๊ณผ ์‚ฐ์†Œ ํ”Œ๋ผ์ฆˆ๋งˆ๊ฐ€ ์•„๋ฅด๊ณค ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์— ์ฃผ์ž…๋˜์–ด ์‹œ์Šคํ…œ ๋ณ€ํ™”๋ฅผ ์•ผ๊ธฐ์‹œํ‚ค๋Š” ์ƒํ™ฉ์—์„œ ์ˆ˜ํ–‰๋œ ์ œ์–ด ์‹คํ—˜์—์„œ ์ œ์–ด๊ธฐ์˜ ์„ฑ๋Šฅ์ด ํ™•์—ฐํžˆ ์•…ํ™”๋จ์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ์—ˆ๋‹ค. ๋”ฐ๋ผ์„œ ์ด๋ฅผ ๊ทน๋ณตํ•  ์ˆ˜ ์žˆ๋Š” ๋”์šฑ ๋ฐœ์ „๋œ ์ œ์–ด ์ „๋žต์ด ์š”๊ตฌ๋˜์—ˆ๋‹ค. ์ ์‘ ์ œ์–ด ๊ธฐ๋ฒ•์€ ์‹œ์Šคํ…œ์—์„œ ์–ป์–ด์ง„ ์ •๋ณด๋ฅผ ์กฐ์ ˆ ๋ฉ”์ปค๋‹ˆ์ฆ˜ ๋ถ€๋ถ„์œผ๋กœ ๋ณด๋‚ด ์‹ค์‹œ๊ฐ„์œผ๋กœ ์ œ์–ด๊ธฐ์˜ ์ˆ˜์ • ์‚ฌํ•ญ์„ ๊ฒฐ์ •ํ•˜์—ฌ ์ด๋ฅผ ๋ฐ”ํƒ•์œผ๋กœ ์ œ์–ด๋ฅผ ์ˆ˜ํ–‰ํ•˜๋Š” ๊ธฐ๋ฒ•์ด๋‹ค. ๋ณธ ํ•™์œ„๋…ผ๋ฌธ์—์„œ๋Š” ๋Œ€ํ‘œ์ ์ธ ์ ์‘ ์ œ์–ด ์•Œ๊ณ ๋ฆฌ์ฆ˜์ธ ์ˆœํ™˜ํ˜• ์ตœ์†Œ์ž์Šน๋ฒ• ์•Œ๊ณ ๋ฆฌ์ฆ˜์„ ํ™œ์šฉํ•˜์˜€๋‹ค. ์ด ์•Œ๊ณ ๋ฆฌ์ฆ˜์— ์นผ๋งŒ ํ•„ํ„ฐ ํ•ด์„์„ ์ ‘๋ชฉ์‹œํ‚ด์— ๋”ฐ๋ผ, ํ”Œ๋ผ์ฆˆ๋งˆ ์‹๊ฐ ์žฅ์น˜๋กœ๋ถ€ํ„ฐ ๋น„๋กฏ๋˜๋Š” ์‹œ๊ฐ„ ์ง€์—ฐ์˜ ํšจ๊ณผ๋ฅผ ๊ณ ๋ คํ•  ์ˆ˜ ์žˆ๊ฒŒ ํ•˜์˜€๋‹ค. ์ด ์•Œ๊ณ ๋ฆฌ์ฆ˜์ด ํƒ‘์žฌ๋œ ์ˆœํ™˜ํ˜• ๋ชจ๋ธ ํŒŒ๋ผ๋ฏธํ„ฐ ์ถ”์ •๊ธฐ๋Š” ๋ฒ ์ด์‹œ์•ˆ ์ตœ์ ํ™” ๊ธฐ๋ฒ•์„ ํ†ตํ•ด ํŠœ๋‹๋˜์—ˆ๋‹ค. ์ˆœํ™˜ํ˜• ๋ชจ๋ธ ํŒŒ๋ผ๋ฏธํ„ฐ ์ถ”์ •๊ธฐ๊ฐ€ ์‹ค์‹œ๊ฐ„์œผ๋กœ ๊ฐ์ง€ํ•˜๋Š” ๋ชจ๋ธ ํŒŒ๋ผ๋ฏธํ„ฐ์˜ ๋ณ€ํ™”๋ฅผ ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์— ์ „๋‹ฌํ•˜๋ฉด ์ˆ˜์ •๋œ ๋ชจ๋ธ์„ ๊ธฐ๋ฐ˜์œผ๋กœ ์ œ์–ด๊ธฐ๋Š” ์ตœ์ ์˜ ์กฐ์ ˆ ๋ณ€์ˆ˜๋ฅผ ๊ณ„์‚ฐํ•œ๋‹ค. ์ด๋ ‡๊ฒŒ ์„ค๊ณ„๋œ ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๋Š” ์•ž์„œ ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๊ฐ€ ์ˆ˜ํ–‰ํ•œ ๊ฒƒ๊ณผ ๋™์ผํ•œ ์‹œ๋ฎฌ๋ ˆ์ด์…˜๊ณผ ์‹คํ—˜์„ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์™€ ๋‹ฌ๋ฆฌ ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๋Š” ์‹œ๊ฐ„์— ๋”ฐ๋ผ ์‹œ์Šคํ…œ์ด ๋ณ€ํ•˜๋Š” ์ƒํ™ฉ์—์„œ๋„ ํ›Œ๋ฅญํ•œ ์ œ์–ด๋ฅผ ์ˆ˜ํ–‰ํ•˜์˜€์œผ๋ฉฐ, ํ‰๊ท ์ ˆ๋Œ€์˜ค์ฐจ์œจ์„ ๊ธฐ์ค€์œผ๋กœ ํ–ˆ์„ ๋•Œ ๊ธฐ์กด์˜ ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๋ณด๋‹ค 24.7%์˜ ํ–ฅ์ƒ๋œ ์ œ์–ด ์„ฑ๋Šฅ์„ ๋ณด์—ฌ์ฃผ์—ˆ๋‹ค. ์ด ๊ฒฐ๊ณผ๋Š” ๋ณธ ํ•™์œ„๋…ผ๋ฌธ์—์„œ ์ œ์•ˆํ•˜๊ณ  ์žˆ๋Š” ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๊ฐ€ ์‹œ์Šคํ…œ์˜ ๋ณ€ํ™”๊ฐ€ ๋นˆ๋ฒˆํ•œ ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์—์„œ์˜ ์ œ์–ด์— ๋งค์šฐ ๊ฐ€์น˜ ์žˆ์Œ๊ณผ ๋”๋ถˆ์–ด ํ”Œ๋ผ์ฆˆ๋งˆ ์‹๊ฐ ์žฅ์น˜์— ์œ ํšจํ•œ ์ œ์–ด๊ธฐ๋ผ๋Š” ๊ฒƒ์„ ๋ฐ˜์ฆํ•œ๋‹ค. ์ด ๊ฒฐ๊ณผ๊ฐ€ ํ”Œ๋ผ์ฆˆ๋งˆ ๊ธฐ๋ฐ˜ ์‹œ์Šคํ…œ์„ ๋Œ€์ƒ์œผ๋กœ ํ•˜๋Š” ๋ชจ๋“  ์ œ์–ด ๊ณต์ •์˜ ๋ฐœ์ „์— ํฌ๊ฒŒ ์ด๋ฐ”์ง€ํ•  ๊ฒƒ์„ ๊ธฐ๋Œ€ํ•˜๋Š” ๋ฐ”์ด๋‹ค.Abstract i Contents v List of Figures viii List of Tables xii CHAPTER 1. Introduction 1 1.1. Research motivation 1 1.2. Research objectives 4 1.3. Description of the equipment used in this thesis 5 1.4. Outline of the thesis 9 CHAPTER 2. Design of Multi-Input Multi-Output Controller for Plasma-based System 10 2.1. Introduction 10 2.2. Theoretical backgrounds 13 2.2.1. Estimation of plasma variables from optical emission spectroscopy 13 2.2.2. The influence of oxygen in plasma etching reactor 16 2.2.3. Singular value decomposition and condition number 18 2.2.4. Relative gain array method 21 2.2.5. Multi-loop control system 23 2.3. MIMO control results in the Ar plasma system 31 2.3.1. Variable selection and pairing 31 2.3.2. Disturbance rejection control results for SISO systems 37 2.3.3. Simulation of multi-loop control scheme and decoupling control scheme 41 2.3.4. Set-point tracking control experiment of multi-loop controller with decoupler controllers 58 2.4. Concluding remarks 62 CHAPTER 3. Disturbance Rejection Control of Plasma Electron Density by Model Predictive Controller 64 3.1. Introduction 64 3.2. Model predictive control 68 3.2.1. Concept of model predictive control 68 3.2.2. Description of model predictive control algorithm 71 3.2.2.1. State estimation algorithm 71 3.2.2.2. Optimization algorithm 76 3.3. Design of model predictive controller for Ar plasma system 78 3.3.1. System identification of Ar plasma system 78 3.3.2. Optimal MPC weight parameters from integral squared error based Bayesian optimization 80 3.3.3. Experimental results of Ar plasma electron density control 84 3.4. Disturbance rejection control using model predictive controller 86 3.4.1. Development of time-varying system model for control simulation 86 3.4.2. Design of model predictive controller for disturbance rejection control 91 3.4.3. Experimental result of disturbance rejection control in Ar/O2 plasma system 101 3.5. Concluding remarks 104 CHAPTER 4. Design of Adaptive Model Predictive Controller for Plasma Etching Reactor 106 4.1. Introduction 106 4.2. Recursive model parameter estimation 112 4.2.1. Recursive least squares algorithm with forgetting factor 113 4.2.2. Recursive least squares algorithm with Kalman filter interpretation 116 4.3. Adaptive model predictive control algorithm 119 4.4. Time-varying system control using adaptive model predictive controller 123 4.4.1. Initial system identification (Scaling method) 123 4.4.2. Design of adaptive model predictive controller for time-varying system 125 4.4.3. Set-point tracking control results in drifted system 143 4.5. Concluding remarks 152 CHAPTER 5. Conclusion 154 5.1. Summary of contributions 154 5.2. Future work 157 Nomenclature 159 References 167 Abstract in Korean (๊ตญ๋ฌธ์ดˆ๋ก) 174Docto
    • โ€ฆ
    corecore