Power-Scavenging MEMS Robots

This thesis includes the design, modeling, and testing of novel, power-scavenging, biologically inspired MEMS microrobots. Over one hundred 500-μm and 990-μm microrobots with two, four, and eight wings were designed, fabricated, characterized. These microrobots constitute the smallest documented attempt at powered flight. Each microrobot wing is comprised of downward-deflecting, laser-powered thermal actuators made of gold and polysilicon; the microrobots were fabricated in PolyMUMPs® (Polysilicon Multi-User MEMS Processes). Characterization results of the microrobots illustrate how wing-tip deflection can be maximized by optimizing the gold-topolysilicon ratio as well as the dimensions of the actuator-wings. From these results, an optimum actuator-wing configuration was identified. It also was determined that the actuator-wing configuration with maximum deflection and surface area yet minimum mass had the greatest lift-to-weight ratio. Powered testing results showed that the microrobots successfully scavenged power from a remote 660-nm laser. These microrobots also demonstrated rapid downward flapping, but none achieved flight. The results show that the microrobots were too heavy and lacked sufficient wing surface area. It was determined that a successfully flying microrobot can be achieved by adding a robust, light-weight material to the optimum actuator-wing configuration—similar to insect wings. The ultimate objective of the flying microrobot project is an autonomous, fully maneuverable flying microrobot that is capable of sensing and acting upon a target. Such a microrobot would be capable of precise lethality, accurate battle-damage assessment, and successful penetration of otherwise inaccessible targets

Demonstrating Optothermal Actuators for an Autonomous MEMS Microrobot

There are numerous applications for microrobots which are beneficial to the Air Force. However, the microrobotics field is still in its infancy, and will require extensive basic research before these applications can be fielded. The biggest hurdle to be solved, in order to create autonomous microrobots, is generating power for their actuator engines. Most present actuators require orders of magnitude more power than is presently available from micropower sources. To enable smaller microrobots, this research proposed a simplified power concept that eliminates the need for on-board power supplies and control circuitry by using actuators powered wirelessly from the environment. This research extended the basic knowledge of methods required to power Micro-Electro-Mechanical Systems (MEMS) devices and reduce MEMS microrobot size. This research demonstrated optothermal actuators designed for use in a wirelessly propelled autonomous MEMS microrobot, without the need of an onboard power supply, through the use of lasers to directly power micrometer scale silicon thermal actuators. Optothermal actuators, intended for use on a small MEMS microrobot, were modeled, designed, fabricated and tested, using the PolyMUMPs silicon-metal chip fabrication process. Prototype design of a MEMS polysilicon-based microrobot, using optothermal actuators, was designed, fabricated and tested. Each of its parts was demonstrated to provide actuation using energy from an external laser. The optothermal actuators provided 2 m of deflection to the microrobot drive shaft, with 60 mW of pulsed laser power. The results of these experiments demonstrated the validity of a new class of wireless silicon actuators for MEMS devices, which are not directly dependant on electrical power for actuation

Conceptual Study of Rotary-Wing Microrobotics

This thesis presents a novel rotary-wing micro-electro-mechanical systems (MEMS) robot design. Two MEMS wing designs were designed, fabricated and tested including one that possesses features conducive to insect level aerodynamics. Two methods for fabricating an angled wing were also attempted with photoresist and CrystalBond™ to create an angle of attack. One particular design consisted of the wing designs mounted on a gear which are driven by MEMS actuators. MEMS comb drive actuators were analyzed, simulated and tested as a feasible drive system. The comb drive resonators were also designed orthogonally which successfully rotated a gear without wings. With wings attached to the gear, orthogonal MEMS thermal actuators demonstrated wing rotation with limited success. Multi-disciplinary theoretical expressions were formulated to account for necessary mechanical force, allowable mass for lift, and electrical power requirements. The robot design did not achieve flight, but the small pieces presented in this research with minor modifications are promising for a potential complete robot design under 1 cm2 wingspan. The complete robot design would work best in a symmetrical quad-rotor configuration for simpler maneuverability and control. The military’s method to gather surveillance, reconnaissance and intelligence could be transformed given a MEMS rotary-wing robot’s diminutive size and multi-role capabilities

Microrobots for wafer scale microfactory: design fabrication integration and control.

Future assembly technologies will involve higher automation levels, in order to satisfy increased micro scale or nano scale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to micro-electronics and MEMS industries, but less so in nanotechnology. With the bloom of nanotechnology ever since the 1990s, newly designed products with new materials, coatings and nanoparticles are gradually entering everyone’s life, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than with top-down robotic assembly. This is due to considerations of volume handling of large quantities of components, and the high cost associated to top-down manipulation with the required precision. However, the bottom-up manufacturing methods have certain limitations, such as components need to have pre-define shapes and surface coatings, and the number of assembly components is limited to very few. For example, in the case of self-assembly of nano-cubes with origami design, post-assembly manipulation of cubes in large quantities and cost-efficiency is still challenging. In this thesis, we envision a new paradigm for nano scale assembly, realized with the help of a wafer-scale microfactory containing large numbers of MEMS microrobots. These robots will work together to enhance the throughput of the factory, while their cost will be reduced when compared to conventional nano positioners. To fulfill the microfactory vision, numerous challenges related to design, power, control and nanoscale task completion by these microrobots must be overcome. In this work, we study three types of microrobots for the microfactory: a world’s first laser-driven micrometer-size locomotor called ChevBot，a stationary millimeter-size robotic arm, called Solid Articulated Four Axes Microrobot (sAFAM), and a light-powered centimeter-size crawler microrobot called SolarPede. The ChevBot can perform autonomous navigation and positioning on a dry surface with the guidance of a laser beam. The sAFAM has been designed to perform nano positioning in four degrees of freedom, and nanoscale tasks such as indentation, and manipulation. And the SolarPede serves as a mobile workspace or transporter in the microfactory environment

Micro-Scale Flapping Wings for the Advancement of Flying MEMS

This research effort presents conceptual micro scale air vehicles whose total dimensions are less than one millimeter. The initial effort was to advance the understanding of micro aerial vehicles at sub-millimeter dimensions by fabricating and testing micro scale flapping wings. Fabrication was accomplished using a surface micromachining process called PolyMUMPs™. Both rigid mechanical structures and biomimetic devices were designed and fabricated as part of this effort. The rigid mechanical structures focused on out of plane deflections with solid connections and assembling a multiple hinge wing structure through the aid of residual stress. These devices were actuated by double hot arm thermal actuators. The biomimetic structures derived from three different insect wings to include; the dragonfly, house fly, and butterfly were selected based off of an attribute that each insect possesses in nature. The dragonfly was chosen for its high maneuverability and hovering capabilities. The house fly wing was chosen because of its durability and the butterfly wing was chosen because of its flexibility. The fabricated wings utilize a thermal bimorph structure consisting of polysilicon and gold which allows device actuation through joule heating. The released micro wings had an initial upward deflection due to residual stress between the gold and polysilicon material layers. Joule heating, from an applied bias, forces the wing to deflect downward due to the coefficient of thermal expansion mismatch between the material layers. Each fabricated bio-wing structure was tested for deflection range as well as operating frequency. From the experimental testing of the micro scale flapping bio-wings, aerodynamic values were calculated to include; aspect ratio, reduced frequency in a hover, Reynolds number of a hovering device, drag force, and gravitational force. The research verified insect based wings on the micro scale are capable of producing the desired flapping motion

Air Force Institute of Technology Research Report 2004

This report summarizes the research activities of the Air Force Institute of Technology’s Graduate School of Engineering and Management. It describes research interests and faculty expertise; lists student theses/dissertations; identifies research sponsors and contributions; and outlines the procedures for contacting the school. Included in the report are: faculty publications, conference presentations, consultations, and funded research projects. Research was conducted in the areas of Aeronautical and Astronautical Engineering, Electrical Engineering and Electro-Optics, Computer Engineering and Computer Science, Systems and Engineering Management, Operational Sciences, and Engineering Physics

Stimuli-Responsive Microtools for Biomedical and Defense Applications

We live in a 3D world which has embraced ever shrinking technologies, yet the techniques used to create these micro- and nanoscale technologies are inherently 2D. Self-assembly of 2D templates into 3D devices enables the creation of complex tools cheaply, efficiently, and in mass quantity. I utilize this technique to create stimuli-responsive microgrippers, which are shaped like hands with flexible joints and rigid phalanges and range in size from 10 µm to 4 mm. Intrinsic stress within the hinges provides all the energy necessary for gripping, and thus they require no wires or batteries for operation. Here, I demonstrate their use for both biomedical and defense applications. These microgrippers can be used as microsurgical tools, gripping onto tissue in response to body temperature and excising tissue from the gastrointestinal tract in both in vivo and ex vivo porcine models. A Monte Carlo model confirmed that these tiny tools has a higher probability of sampling tissue from a lesion as compared to the traditional biopsy foreceps. These grippers were scaled down to 10 µm and used to capture single cells for in vitro isolation, imaging, and assays. All-polymeric, porous, stimuli-responsive therapeutic grippers or “theragrippers” which swell and de-swell around body temperature were created for drug delivery applications. These theragrippers can be loaded with commercial drugs for biphasic, site-specific controlled release and were successfully demonstrated in an in vitro and an in vivo model. For defense applications, integrating microelectronics like RFID’s onto the microgrippers creates tagging, tracking, and locating (TTL) devices capable of latching onto clothing, hair, and moving animal targets. This integrated design is enabled using high throughput solder-based self-assembly. This defense application, particularly reliant on covert, wireless technology, benefits from our novel photothermal actuation mechanism using low power, handheld lasers. In addition to triggering microgripper closing, this actuation scheme also enables complex sequential folding pathways, a step towards programmable matter