Micro-Resonators: The Quest for Superior Performance

Microelectromechanical resonators are no longer solely a subject of research in university and government labs; they have found a variety of applications at industrial scale, where their market is predicted to grow steadily. Nevertheless, many barriers to enhance their performance and further spread their application remain to be overcome. In this Special Issue, we will focus our attention to some of the persistent challenges of micro-/nano-resonators such as nonlinearity, temperature stability, acceleration sensitivity, limits of quality factor, and failure modes that require a more in-depth understanding of the physics of vibration at small scale. The goal is to seek innovative solutions that take advantage of unique material properties and original designs to push the performance of micro-resonators beyond what is conventionally achievable. Contributions from academia discussing less-known characteristics of micro-resonators and from industry depicting the challenges of large-scale implementation of resonators are encouraged with the hopes of further stimulating the growth of this field, which is rich with fascinating physics and challenging problems

Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning

Ph.DDOCTOR OF PHILOSOPH

MEMS based heavy metal detector

Water pollution by toxic heavy metals is one of the most serious environmental hazards to humans’ health. As they are emitted into the water resources and adsorbed by soil, plants, fish and animals and eventually accumulate in human bodies causing a variety of serious diseases. Therefore, there is an urgent need to develop a continuous, rapid, automatic, and on-site heavy metals environmental monitoring system for the online detection of heavy metals pollution at various water resources and industrial waste networks. In this thesis the main objective is to develop a microfluidic platform for heavy metal analyte sensing in which a variety of sensing schemes can be applied. The proposed platform contains microfluidic microchannels for the handling and separation of heavy metal analytes to improve the selectivity, integrated with a sensing device for the optical detection and monitoring of various heavy metal analytes and concentrations. In this context, the design and micro-fabrication of polymer based microchannels were conducted as the microfluidic platform on which the integration of the various optical sensing materials can take place. Afterward a novel design of MEMS based Fourier transform spectrometer is proposed, in which a new scheme for input Gaussian beam splitting into symmetrically two semi Gaussian beam is introduced using V shape mirror. The design is fully integrated and can operate in the Infrared and visible region. The analysis shows that, a minimum resolution of 9nm at a wavelength of 1.45μm and a mechanical displacement of 160μm is achievable. Unlike the traditional Michelson interferometer which returns half of the optical power to the source, this design uses the full optical power to get the interference pattern using movable reflecting mirrors thus enhancing the signal to noise ratio, and allowing the use of differential moving scheme for the mirrors which increase the optical path difference by a factor of four. An analytical model that describes the beams propagation and interference is derived using Fourier optics techniques and verified using Finite Difference Time Domain (FDTD) method. Then, a mechanical model that describes the mirror displacement to produce optical pass difference is derived and verified using finite element method (FEM). Finally, the effect of different design parameters on the interference pattern, interferograme and resolution are also shown

Design, Fabrication, and Characterization of a 2-D SOI MEMS Micromirror with Sidewall Electrodes for Confocal MACROscope Imaging

Micro-Electro-Mechanical Systems (MEMS) micromirrors have been developed for more than two decades along with the development of MEMS technology. They have been used into many application fields: optical switches, digital light projector (DLP), adoptive optics (AO), high definition (HD) display, barcode reader, endoscopic optical coherence tomography (OCT) and confocal microscope, and so on. Especially, MEMS mirrors applied into endoscopic OCT and confocal microscope are the intensive research field. Various actuation mechanisms, such as electrostatic, electromagnetic, electro bimorph thermal, electrowetting, piezoelectric (PZT) and hybrid actuators, are adopted by different types of micromirrors. Among these actuators, the electrostatic is easily understood and simple to realize, therefore, it is broadly adopted by a large number of micromirrors. This thesis reports the design, fabrication, and characterization of a 2-D Silicon-on-insulation (SOI) MEMS micromirror with sidewall (SW) electrodes for endoscopic OCT or confocal microscope imaging. The biaxial MEMS mirror with SW electrodes is actuated by electrostatic actuators. The dimension of mirror plate is 1000micron×1000micron, with a thickness of a 35micron. The analytical modeling of SW electrodes, fabrication process, and performance characteristics are described. In comparison to traditional electrostatic actuators, parallel-plate and comb-drive, SW electrodes combined with bottom electrodes achieve a large tilt angle under a low drive voltage that the comb-drive does and possess fairly simple fabrication process same as that of the parallel-plate. A new fabrication process based on SOI wafer, hybrid bulk/surface micromachined technology, and a high-aspect-ratio shadow mask is presented. Moreover, the fabrication process is successfully extended to fabricate 2×2 and 4×4 micromirror arrays. Finally, a biaxial MEMS mirror with SW electrodes was used into Confocal MACROscope for imaging. Studied optical requirements in terms of two optical configurations and frequency optimization of the micromirror, the biaxial MEMS mirror replaces the galvo-scanner and improves the MACROscope. Meanwhile, a new Micromirror-based Laser Scanning Microscope system is presented and allows 2D images to be acquired and displayed

Design and Fabrication of a Microelectromechanical Double-Ended Tuning Fork Strain Gauge

A double-ended tuning fork (DETF) strain gauge that can be used for strain and force measurements is designed and fabricated in this work. The design of the sensor was augmented by an analytical model using the linear beam theory, by numerical simulations performed in COMSOL Multiphysics 5.2 and by an electromechanical state-space model simulated in Matlab. The predicted sensitivity of the gauge was 57.7 Hz/με for the analytical formulation and 49.8 Hz/με for the FEM model. The fabrication of the device was performed at the Birck Nanotechnology Center cleanroom using UV photolithography for metal pad and device layer definition, followed by an electron beam evaporation of chromium and gold for the contacts and a DRIE process for etching the silicon layer of the SOI wafer. The devices where released using a vapor HF system which was a high-yield process. The device was tested, however due to the under etching of silicon parts of the comb drive were connecting together which allowed no possible motion of the structure

MEMS Devices for Circumferential-scanned Optical Coherence Tomography Bio-imaging

Ph.DDOCTOR OF PHILOSOPH

Applications of programmable MEMS micromirrors in laser systems

The use of optical microelectromechanical systems (MEMS) as enabling devices has been shown widely over the last decades, creating miniaturisation possibilities and added functionality for photonic systems. In the work presented in this thesis angular vertical offset comb-drive (AVC) actuated scanning micromirrors, and their use as intracavity active Q-switch elements in solid-state laser systems, are investigated. The AVC scanning micromirrors are created through a multi-user fabrication process, with theoretical and experimental investigations undertaken on the influence of the AVC initial conditions on the scanning micromirror dynamic resonant tilt movement behaviour. A novel actuator geometry is presented to experimentally investigate this influence, allowing a continuous variation of the initial AVC comb-offset angle through an integrated electrothermal actuator. The experimentally observed changes of the resonant movement with varying initial AVC offset are compared with an analytical model, simulating this varying resonant movement behaviour. In the second part of this work AVC scanning micromirrors are implemented as active intra-cavity Q-switch elements of a Nd:YAG solid-state laser system. The feasibility of achieving pulsed laser outputs with pulse durations limited by the laser cavity and not the MEMS Q-switch is shown, combined with a novel theoretical model for the Q-switch behaviour of the laser when using a bi-directional intra-cavity scanning micromirror. A detailed experimental investigation of the pulsed laser output behaviour for varying laser cavity geometries is presented, also discussing the influence of thin film coatings deposited on the mirror surfaces for further laser output power scaling. The MEMS Q-switch system is furthermore expanded using a micromirror array to create a novel Q-switched laser system with multiple individual controllable output beams using a common solid-state gain medium. Experimental results showing the simultaneous generation of two laser outputs are presented, with cavity limited pulse durations and excellent laser beam quality.The use of optical microelectromechanical systems (MEMS) as enabling devices has been shown widely over the last decades, creating miniaturisation possibilities and added functionality for photonic systems. In the work presented in this thesis angular vertical offset comb-drive (AVC) actuated scanning micromirrors, and their use as intracavity active Q-switch elements in solid-state laser systems, are investigated. The AVC scanning micromirrors are created through a multi-user fabrication process, with theoretical and experimental investigations undertaken on the influence of the AVC initial conditions on the scanning micromirror dynamic resonant tilt movement behaviour. A novel actuator geometry is presented to experimentally investigate this influence, allowing a continuous variation of the initial AVC comb-offset angle through an integrated electrothermal actuator. The experimentally observed changes of the resonant movement with varying initial AVC offset are compared with an analytical model, simulating this varying resonant movement behaviour. In the second part of this work AVC scanning micromirrors are implemented as active intra-cavity Q-switch elements of a Nd:YAG solid-state laser system. The feasibility of achieving pulsed laser outputs with pulse durations limited by the laser cavity and not the MEMS Q-switch is shown, combined with a novel theoretical model for the Q-switch behaviour of the laser when using a bi-directional intra-cavity scanning micromirror. A detailed experimental investigation of the pulsed laser output behaviour for varying laser cavity geometries is presented, also discussing the influence of thin film coatings deposited on the mirror surfaces for further laser output power scaling. The MEMS Q-switch system is furthermore expanded using a micromirror array to create a novel Q-switched laser system with multiple individual controllable output beams using a common solid-state gain medium. Experimental results showing the simultaneous generation of two laser outputs are presented, with cavity limited pulse durations and excellent laser beam quality

MICROELECTROMECHANICAL SYSTEMS ENABLED TUNABLE TERAHERTZ METAMATERIALS

Ph.DDOCTOR OF PHILOSOPH

Optimization of a micromechanical single element oscillator using nonlinear electrostatic cotnrol

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 1998.Includes bibliographical references (p. 269-271).by Jonathan Andrew Kossuth.Ph.D

MEMS Technology for Biomedical Imaging Applications

Biomedical imaging is the key technique and process to create informative images of the human body or other organic structures for clinical purposes or medical science. Micro-electro-mechanical systems (MEMS) technology has demonstrated enormous potential in biomedical imaging applications due to its outstanding advantages of, for instance, miniaturization, high speed, higher resolution, and convenience of batch fabrication. There are many advancements and breakthroughs developing in the academic community, and there are a few challenges raised accordingly upon the designs, structures, fabrication, integration, and applications of MEMS for all kinds of biomedical imaging. This Special Issue aims to collate and showcase research papers, short commutations, perspectives, and insightful review articles from esteemed colleagues that demonstrate: (1) original works on the topic of MEMS components or devices based on various kinds of mechanisms for biomedical imaging; and (2) new developments and potentials of applying MEMS technology of any kind in biomedical imaging. The objective of this special session is to provide insightful information regarding the technological advancements for the researchers in the community