Gate leakage variability in nano-CMOS transistors

Gate leakage variability in nano-scale CMOS devices is investigated through advanced modelling and simulations of planar, bulk-type MOSFETs. The motivation for the work stems from the two of the most challenging issues in front of the semiconductor industry - excessive leakage power, and device variability - both being brought about with the aggressive downscaling of device dimensions to the nanometer scale. The aim is to deliver a comprehensive tool for the assessment of gate leakage variability in realistic nano-scale CMOS transistors. We adopt a 3D drift-diffusion device simulation approach with density-gradient quantum corrections, as the most established framework for the study of device variability. The simulator is first extended to model the direct tunnelling of electrons through the gate dielectric, by means of an improved WKB approximation. A study of a 25 nm square gate n-type MOSFET demonstrates that combined effect of discrete random dopants and oxide thickness variation lead to starndard deviation of up to 50% (10%) of the mean gate leakage current in OFF(ON)-state of the transistor. There is also a 5 to 6 times increase of the magnitude of the gate current, compared to that simulated of a uniform device. A significant part of the research is dedicated to the analysis of the non-abrupt bandgap and permittivity transition at the Si/SiO2 interface. One dimensional simulation of a MOS inversion layer with a 1nm SiO2 insulator and realistic band-gap transition reveals a strong impact on subband quantisation (over 50mV reduction in the delta-valley splitting and over 20% redistribution of carriers from the delta-2 to the delta-4 valleys), and enhancement of capacitance (over 10%) and leakage (about 10 times), relative to simulations with an abrupt band-edge transition at the interface

Design, Modeling and Analysis of Non-classical Field Effect Transistors

Transistor scaling following per Moore\u27s Law slows down its pace when entering into nanometer regime where short channel effects (SCEs), including threshold voltage fluctuation, increased leakage current and mobility degradation, become pronounced in the traditional planar silicon MOSFET. In addition, as the demand of diversified functionalities rises, conventional silicon technologies cannot satisfy all non-digital applications requirements because of restrictions that stem from the fundamental material properties. Therefore, novel device materials and structures are desirable to fuel further evolution of semiconductor technologies. In this dissertation, I have proposed innovative device structures and addressed design considerations of those non-classical field effect transistors for digital, analog/RF and power applications with projected benefits. Considering device process difficulties and the dramatic fabrication cost, application-oriented device design and optimization are performed through device physics analysis and TCAD modeling methodology to develop design guidelines utilizing transistor\u27s improved characteristics toward application-specific circuit performance enhancement. Results support proposed device design methodologies that will allow development of novel transistors capable of overcoming limitation of planar nanoscale MOSFETs. In this work, both silicon and III-V compound devices are designed, optimized and characterized for digital and non-digital applications through calibrated 2-D and 3-D TCAD simulation. For digital functionalities, silicon and InGaAs MOSFETs have been investigated. Optimized 3-D silicon-on-insulator (SOI) and body-on-insulator (BOI) FinFETs are simulated to demonstrate their impact on the performance of volatile memory SRAM module with consideration of self-heating effects. Comprehensive simulation results suggest that the current drivability degradation due to increased device temperature is modest for both devices and corresponding digital circuits. However, SOI FinFET is recommended for the design of low voltage operation digital modules because of its faster AC response and better SCEs management than the BOI structure. The FinFET concept is also applied to the non-volatile memory cell at 22 nm technology node for low voltage operation with suppressed SCEs. In addition to the silicon technology, our TCAD estimation based on upper projections show that the InGaAs FinFET, with superior mobility and improved interface conditions, achieve tremendous drive current boost and aggressively suppressed SCEs and thereby a strong contender for low-power high-performance applications over the silicon counterpart. For non-digital functionalities, multi-fin FETs and GaN HEMT have been studied. Mixed-mode simulations along with developed optimization guidelines establish the realistic application potential of underlap design of silicon multi-Fin FETs for analog/RF operation. The device with underlap design shows compromised current drivability but improve analog intrinsic gain and high frequency performance. To investigate the potential of the novel N-polar GaN material, for the first time, I have provided calibrated TCAD modeling of E-mode N-polar GaN single-channel HEMT. In this work, I have also proposed a novel E-mode dual-channel hybrid MIS-HEMT showing greatly enhanced current carrying capability. The impact of GaN layer scaling has been investigated through extensive TCAD simulations and demonstrated techniques for device optimization

Characterization and modeling of low-frequency noise in Hf-based high -kappa dielectrics for future cmos applications

The International Technology Roadmap for Semiconductors outlines the need for high-K dielectric based gate-oxide Metal Oxide Semiconductor Field Effect Transistors for sub-45 nm technology nodes. Gate oxides of hafnium seem to be the nearest and best alternative for silicon dioxide, when material, thermal and structural properties are considered. Usage of poly-Si as a gate electrode material degrades the performance of the device and hence gate stacks based on metal gate electrodes are gaining high interest. Though a substantial improvement in the performance has been achieved with these changes, reliability issues are a cause of concern. For analog and mixed-signal applications, low-frequency (I /f~ noise is a major reliability factor. Also in recent years. low frequency noise diagnostics has become a powerful tool for device performance and reliability characterization. This dissertation work demonstrates the necessity of gate stack engineering for achieving a low I/f noise performance. Changes in the material and process parameters of the devices, impact the 1/f noise behavior. The impact of 1/f noise on gate technology and processing parameters xvere identified and investigated. The thickness and the quality of the interfacial oxide, the nitridation effects of the layers, high-K oxide, bulk properties of the high-K layer. percentage of hafnium content in the high-K, post deposition anneal (PDA) treatments, effects of gate electrode material (poly-silicon. fully silicided or metal). Gate electrode processing are investigated in detail. The role of additional interfaces and bulk layers of the gate stack is understood. The dependence of low-frequency noise on high and low temperatures was also investigated. A systematic and a deeper understanding of these parameters on 1/f noise behavior are deduced which also forms the basis for improved physics-based 1/f noise modeling. The model considers the effect of the interfacial layer and also temperature, based on tunneling based thermally activated model. The simulation results of improved drain-current noise model agree well with the experimentally calculated values

Solid State Circuits Technologies

The evolution of solid-state circuit technology has a long history within a relatively short period of time. This technology has lead to the modern information society that connects us and tools, a large market, and many types of products and applications. The solid-state circuit technology continuously evolves via breakthroughs and improvements every year. This book is devoted to review and present novel approaches for some of the main issues involved in this exciting and vigorous technology. The book is composed of 22 chapters, written by authors coming from 30 different institutions located in 12 different countries throughout the Americas, Asia and Europe. Thus, reflecting the wide international contribution to the book. The broad range of subjects presented in the book offers a general overview of the main issues in modern solid-state circuit technology. Furthermore, the book offers an in depth analysis on specific subjects for specialists. We believe the book is of great scientific and educational value for many readers. I am profoundly indebted to the support provided by all of those involved in the work. First and foremost I would like to acknowledge and thank the authors who worked hard and generously agreed to share their results and knowledge. Second I would like to express my gratitude to the Intech team that invited me to edit the book and give me their full support and a fruitful experience while working together to combine this book

High-Density Solid-State Memory Devices and Technologies

This Special Issue aims to examine high-density solid-state memory devices and technologies from various standpoints in an attempt to foster their continuous success in the future. Considering that broadening of the range of applications will likely offer different types of solid-state memories their chance in the spotlight, the Special Issue is not focused on a specific storage solution but rather embraces all the most relevant solid-state memory devices and technologies currently on stage. Even the subjects dealt with in this Special Issue are widespread, ranging from process and design issues/innovations to the experimental and theoretical analysis of the operation and from the performance and reliability of memory devices and arrays to the exploitation of solid-state memories to pursue new computing paradigms

Vertical III-V Nanowire Transistors for Low-Power Electronics

Power dissipation has been the major challenge in the downscaling of transistor technology. Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) have struggled to keep a low power consumption while still maintaining a high performance due to the low carrier mobilities of Si but also due to their inherent minimum inverse subthreshold slope (S ≥ 60 mV/dec) which is limited by thermionic emission. This thesis work studied the capabilities and limitations of III-V based vertical nanowire n-type Tunneling Field-Effect Transistor (TFET) and p-type MOSFET (PMOS). InAs/InGaAsSb/GaSb heterojunction was employed in the whole study. The main focus was to understand the influence of the device fabrication processes and the structural factors of the nanowires such as band alignment, composition and doping on the electrical performance of the TFET. Optimizations of the device processes including spacer technology improvement, Equivalent Oxide Thickness (EOT) downscaling, and gate underlap/overlap were explored utilizing structural characterizations. Systematic fine tuning of the band alignment of the tunnel junction resultedin achieving the best performing sub-40 mV/dec TFETs with S = 32 mV/decand ION = 4μA/μm for IOFF = 1 nA/μm at VDS = 0.3 V. The suitability of employing TFET for electronic applications at cryogenic temperatures has been explored utilizing experimental device data. The impact of the choice of heterostructure and dopant incorporation were investigated to identify the optimum operating temperature and voltage in different temperature regimes. A novel gate last process self-aligning the gate and drain contacts to the intrinsic and doped segments, respectively was developed for vertical InGaAsSb-GaAsSb core-shell nanowire transistors leading to the first sub-100 mV/dec PMOS with S = 75 mV/dec, significant ION/ IOFF = 104 and IMIN < 1 nA/μm at VDS = -0.5 V

Polarity-Controllable Silicon Nanowire Transistors with Dual Threshold Voltages

Gate-all-around (GAA) silicon nanowires enable an unprecedented electrostatic control on the semiconductor channel that can push device performance with continuous scaling. In modern electronic circuits, the control of the threshold voltage is essential for improving circuit performance and reducing static power consumption. Here, we propose a silicon Wnanowire transistor with three independent GAA electrodes, demonstrating, within a unique device, a dynamic configurability in terms of both polarity and threshold voltage (V-T). This silicon nanowire transistor is fabricated using a vertically stacked structure with a top-down approach. Unlike conventional threshold voltage modulation techniques, the threshold control of this device is achieved by adapting the control scheme of the potential barriers at the source and drain interfaces and in the channel. Compared to conventional dual-threshold techniques, the proposed device does not tradeoff the leakage reduction at the detriment of the ON-state current, but only through a later turn-ON coming from a higher V-T. This property offers leakage control at a reduction of loss in performance. The measured characteristic demonstrates a threshold voltage difference of similar to 0.5 V between low-V-T and high-V-T configurations, while high-V-T configuration reduces the leakage current by two orders of magnitude as compared to low-V-T configuration

TiN/HfO2/SiO2/Si gate stacks reliability : Contribution of HfO2 and interfacial SiO2 layer

Hafnium Oxide based gate stacks are considered to be the potential candidates to replace SiO2 in complementary metal-oxide-semiconductor (CMOS), as they reduce the gate leakage by over 100 times while keeping the device performance intact. Even though considerable performance improvement has been achieved, reliability of high-κ devices for the next generation of transistors (45nm and beyond) which has an interfacial layer (IL: typically SiO2) between high-κ and the substrate, needs to be investigated. To understand the breakdown mechanism of high-κ/SiO2 gate stack completely, it is important to study this multi-layer structure extensively. For example, (i) the role of SiO2 interfacial layers and bulk high-κ gate dielectrics without any interfacial layer can be investigated separately while maintaining same growth conditions; (ii) the evolution of breakdown process can be studied through stress induced leakage current (SILC); (iii) relationship of various degradation mechanisms such as negative bias temperature instability (NBTI) with that of the dielectric breakdown; and (iv) a fast evaluation process to estimate statistical breakdown distribution. In this dissertation a comparative study was conducted to investigate individual breakdown characteristics of high-κ/IL (ISSG SiO2)/metal gate stacks, in-situ steam generated (ISSG)-SiO2 MOS structures and HfO2-only metal-insulator-metal (MIM) capacitors. Experimental results indicate that after constant voltage stress (CVS) identical degradation for progressive breakdown and SILC were observed in high-κ/IL and SiO2-only MOS devices, but HfO2-only MIM capacitors showed insignificant SILC and progressive breakdown until it went into hard breakdown. Based on the observed SILC behavior and charge-to-breakdown (QBD), it was inferred that interfacial layer initiates progressive breakdown of metal gate/high-κ gate stacks at room temperature. From normalized SILC (ΔJg/Jg0) at accelerated temperature and activation energy of the timeto- breakdown (TBD), it was observed that IL initiates the gate stack breakdown at higher temperatures as well. A quantitative agreement was observed for key parameters of NBTI and time dependent dielectric breakdown (TDDB) such as the activation energies of threshold voltage change and SILC. The quality and thickness variation of the IL causes similar degradation on both NBTI and TDDB indicating that mechanism of these two reliability issues are related due to creation of identical defect types in the IL. CVS was used to investigate the statistical distribution of TBD, defined as soft or first breakdown where small sample size was considered. As TBD followed Weibull distribution, large sample size was not required. Since the failure process in static random access memory (SRAM) is typically predicted by the realistic TDDB model based on gate leakage current (IFAIL) rather than the conventional first breakdown criterion, the relevant failure distributions at IFAIL are non-Weibull including the progressive breakdown (PBD) phase for high-κ/metal gate dielectrics. A new methodology using hybrid two-stage stresses has been developed to study progressive breakdown phase further for high-κ and SiO2. It is demonstrated that VRS can be used effectively for quantitative reliability studies of progressive breakdown phase and final breakdown of high-κ and other dielectric materials; thus it can replace the time-consuming CVS measurements as an efficient methodology and reduce the resources manufacturing cost