A Review of Micro-Contact Physics for Microelectromechanical Systems (MEMS) Metal Contact Switches

Innovations in relevant micro-contact areas are highlighted, these include, design, contact resistance modeling, contact materials, performance and reliability. For each area the basic theory and relevant innovations are explored. A brief comparison of actuation methods is provided to show why electrostatic actuation is most commonly used by radio frequency microelectromechanical systems designers. An examination of the important characteristics of the contact interface such as modeling and material choice is discussed. Micro-contact resistance models based on plastic, elastic-plastic and elastic deformations are reviewed. Much of the modeling for metal contact micro-switches centers around contact area and surface roughness. Surface roughness and its effect on contact area is stressed when considering micro-contact resistance modeling. Finite element models and various approaches for describing surface roughness are compared. Different contact materials to include gold, gold alloys, carbon nanotubes, composite gold-carbon nanotubes, ruthenium, ruthenium oxide, as well as tungsten have been shown to enhance contact performance and reliability with distinct trade offs for each. Finally, a review of physical and electrical failure modes witnessed by researchers are detailed and examined

Multi-scale analysis of the roughness effect on lubricated rough contact

Determining friction is as equally essential as determining the film thickness in the lubricated contact, and is an important research subject. Indeed, reduction of friction in the automotive industry is important for both the minimization of fuel consumption as well as the decrease in the emissions of greenhouse gases. However, the progress in friction reduction has been limited by the difficulty in understanding the mechanism of roughness effects on friction. It was observed that micro-surface geometry or roughness was one of the major factors that affected the friction coefficient. In the present study, a new methodology coupling the multi-scale decomposition of the surface and the prediction of the friction coefficient by numerical simulation was developed to understand the influence of the scale of roughness in the friction coefficient. In particular, the real surface decomposed in different roughness scale by multi-scale decomposition, based on ridgelets transform was used as input into the model. This model predicts the effect of scale on mixed elastohydroynamic point contact. The results indicate a good influence of the fine scale of surface roughness on the friction coefficient for full-film lubrication as well as a beginning of improvement for mixed lubrication

Investigation of the Surface Adhesion Phenomena and Mechanism of Gold-Plated Contacts at Superlow Making/Breaking Speed

Surface adhesion phenomena of gold-plated copper contact materials are studied in conditions of nonarc load (5/15/25 V and 0.2/0.5/1 A) and superlow speed (25 and 50 nm/s) realized by a piezoactuator during the making and breaking processes. It is shown that softening and melting of local asperities leads to interface adhesion, which results from the joule heat generated by the contact resistance; it is determined that the change of contact force with time obeys the negative exponential distribution and the time constant is associated with the adhesion force directly. Based on the fitting experimental data, the relationship between the adhesion force F z and the contact resistance R d while breaking can be expressed as F z ∝ R d -1 , which indicates that the main component of contact resistance is the bulk resistance of weld nugget and the constriction resistance is negligible

Friction and wear mechanisms of high performance polyetheretherketone and silicone

This work examines two high performance polymer tribology systems. Polyetheretherketone (PEEK) is a high temperature, low wear thermoplastic that has potential for several modern industries, but the understanding of its wear mechanisms in relation to transfer film is not well understood. An investigation into these mechanisms would benefit the utility of PEEK in several applications. The second polymer system investigated is high performance silicone used in implantable cardiac devices (ICDs). Understanding the wear mechanisms of silicone in-vivo is challenging, and examining the fundamental causes of wear would benefit device design in surgical implantation methods. First, the viability of using finite element analysis as a way to understand fundamental contact behavior is investigated. It was found that for high-level contact models, average roughness is a weak sole descriptor of contact behavior. Next, two PEEK studies in dry sliding were conducted. The first study examined multi-linear and reciprocating sliding in relation to roughness orientation, while proposing hypotheses to explain transfer film behavior. The second PEEK study, examined the development of transfer film and wear with respect to roughness orientation for a variety of sliding distances. From these studies, it was found that frictional heating affects the volume of transfer film, multi-directional sliding and reciprocation play a role in wear and transfer film development, and roughness orientation can greatly impact both wear and transfer film of PEEK. Lastly, a silicone lead in implantable cardiac devices was studied by using three key parameters thought to affect its wear: load, albumin protein, and silica abrasive. It was found that none of these parameters greatly impacted the wear scar metrics, but silica and albumin can lead to wear mechanisms that might impact long-term wear or other wear modes

On the puzzling feature of the silence of precursory electromagnetic emissions

It has been suggested that fracture-induced MHz-kHz electromagnetic (EM) emissions, which emerge from a few days up to a few hours before the main seismic shock occurrence permit a real-time monitoring of the damage process during the last stages of earthquake preparation, as it happens at the laboratory scale. Despite fairly abundant evidence, EM precursors have not been adequately accepted as credible physical phenomena. These negative views are enhanced by the fact that certain 'puzzling features' are repetitively observed in candidate fracture-induced pre-seismic EM emissions. More precisely, EM silence in all frequency bands appears before the main seismic shock occurrence, as well as during the aftershock period. Actually, the view that 'acceptance of 'precursive' EM signals without convincing co-seismic signals should not be expected' seems to be reasonable. In this work we focus on this point. We examine whether the aforementioned features of EM silence are really puzzling ones or, instead, reflect well-documented characteristic features of the fracture process, in terms of: universal structural patterns of the fracture process, recent laboratory experiments, numerical and theoretical studies of fracture dynamics, critical phenomena, percolation theory, and micromechanics of granular materials. Our analysis shows that these features should not be considered puzzling.Comment: arXiv admin note: text overlap with arXiv:cond-mat/0603542 by other author

Improved micro-contact resistance model that considers material deformation, electron transport and thin film characteristics

This paper reports on an improved analytic model forpredicting micro-contact resistance needed for designing microelectro-mechanical systems (MEMS) switches. The originalmodel had two primary considerations: 1) contact materialdeformation (i.e. elastic, plastic, or elastic-plastic) and 2) effectivecontact area radius. The model also assumed that individual aspotswere close together and that their interactions weredependent on each other which led to using the single effective aspotcontact area model. This single effective area model wasused to determine specific electron transport regions (i.e. ballistic,quasi-ballistic, or diffusive) by comparing the effective radius andthe mean free path of an electron. Using this model required thatmicro-switch contact materials be deposited, during devicefabrication, with processes ensuring low surface roughness values(i.e. sputtered films). Sputtered thin film electric contacts,however, do not behave like bulk materials and the effects of thinfilm contacts and spreading resistance must be considered. Theimproved micro-contact resistance model accounts for the twoprimary considerations above, as well as, using thin film,sputtered, electric contact

Characterization of Rough Engineering Surfaces for Use in Thermal Contact Conductance Modeling

Most surface properties used in calculating contact conductance are not intrinsic to the surface, but vary with the sampling frequency of the instrument used to characterize the surface. This paper offers a methodology for characterizing a surface based on intrinsic surface characterization properties (the self-affine fractal dimension and topothesy), intrinsic material properties, and applied load. A surface characterization model is developed to predict the wavelengths on a surface that are significant in predicting thermal contact conductance. The surface characterization model is combined with surface deformation and constriction resistance models to predict contact conductance across nominally flat, metallic surfaces. The long-wavelength cutoff in the surface characterization is set by the dimensions of the contact area. A theoretical correlation for the short-wavelength cutoff as a function of surface and material properties and load is developed, and then improved by a least-squares fit to experimental data. The integrated model developed predicts contact conductance in three modules: defining unique asperity geometries important in deformation modeling; calculating the mode of asperity deformation; and accounting for the actual geometry of asperities in the constriction resistance model. The predicted contact conductance compares well to experimental data over a range of surface roughnesses, pressures, and substrate materials

Analysis of KrF excimer laser beam modification resulting from ablation under closed thick film flowing filtered water

The application of closed thick film liquid to immerse the ablation etching mechanism of an excimer laser poses interesting possibilities concerning debris control, modification of machined feature topography and modification of ablation rate. Further more, these parameters have been shown to be dependant on flow velocity; hence offering further user control of machining characteristics. However the impact of this technique requires investigation. This contribution offers comparison of the calculated ablation pressure and the effect on feature surface characteristics given for laser ablation of bisphenol A polycarbonate using KrF excimer laser radiation in ambient air against laser ablation of the same substrate under closed thick film flowing filtered water immersion. Also, the impact of such immersion equipment on the optical performance of the micromachining centre used is quantified and reviewed. The pressure is calculated to have risen some 53% when using the liquid immersed ablation technique. This increase in pressure is proposed to have promoted the frequency of surface Plasmons and asperities with a surface area less than 16 µm2. The focal length of the optical system was accurately predicted to be increased by 2.958 mm when using the equipment composed of a 5 mm thick ultraviolet grade fused silica window covering a 1.5 mm thick film of filtered water flowing at 1.85 m/s. This equipment was predicted to have increased the optical depth of focus via reduction in the angle of convergence of the two defining image rays, yet the perceived focus, measured by mean feature wall angle as a discrete indication, was found to be 25% smaller when using the closed thick film flowing filtered water immersion technique than when laser ablating in ambient air. A compressed plume interaction is proposed as a contributing factor in this change

Modelling the influence of the process inputs on the removal of surface contaminants from Ti-6Al-4V linear friction welds

The linear friction welding (LFW) process is finding increasing interest from industry for the fabrication of near-net-shape, titanium alloy Ti–6Al–4V, aerospace components. Currently, the removal of surface contaminants, such as oxides and foreign particles, from the weld interface into the flash is not fully understood. To address this problem, two-dimensional (2D) computational models were developed using the finite element analysis (FEA) software DEFORM and validated with experiments. The key findings showed that the welds made with higher applied forces required less burn-off to completely remove the surface contaminants from the interface into the flash; the interface temperature increased as the applied force was decreased or the rubbing velocity increased; and the boundary temperature between the rapid flash formation and negligible material flow was approximately 970 °C. An understanding of these phenomena is of particular interest for the industrialisation of near-net-shape titanium alloy aerospace components.EPSRC, Boeing Company, Welding Institut