Design and application of a cellular, piezoelectric, artificial muscle actuator for biorobotic systems

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2010.Cataloged from PDF version of thesis.Includes bibliographical references (p. 219-227).One of the foremost challenges in robotics is the development of muscle-like actuators that have the capability to reproduce the smooth motions observed in animals. Biological muscles have a unique cellular structure that departs from traditional electromechanical actuators in several ways. A muscle consists of a vast number of muscle fibers and, more fundamentally, sarcomeres that act as cellular units or building blocks. A muscle's output force and displacement are the aggregate effect of the individual building blocks. Thus, without using gearing or transmissions, muscles can be tailored to a range of loads, satisfying specific force and displacement requirements. These natural actuators are desirable for biorobotic applications, but many of their characteristics have been difficult to reproduce artificially. This thesis develops and applies a new artificial muscle actuator based on piezoelectric technology. The essential approach is to use a subdivided, cellular architecture inspired by natural muscle. The primary contributions of this work stem from three sequential aims. The first aim is to develop the operating principles and design of the actuator cellular units. The basic operating principle of the actuator involves nested flexural amplifiers applied to piezoelectric stacks thereby creating an output length strain commensurate with natural muscle. The second aim is to further improve performance of the actuator design by imparting tunable stiffness and resonance capabilities. This work demonstrates a previously unavailable level of tunability in both stiffness and resonance. The final aim is to showcase the capabilities of the actuator design by developing an underwater biorobotic fish system that utilizes the actuators for resonance-based locomotion. Each aspect of this thesis is supported by rigorous analysis and functional prototypes that augment broadly applicable design concepts.by Thomas William Secord.Ph.D

Strategies for increasing the operating frequency range of vibration energy harvesters: a review

This paper reviews possible strategies to increase the operational frequency range of vibration-based micro-generators. Most vibration-based micro-generators are spring-mass-damper systems which generate maximum power when the resonant frequency of the generator matches the frequency of the ambient vibration. Any difference between these two frequencies can result in a significant decrease in generated power. This is a fundamental limitation of resonant vibration generators which restricts their capability in real applications. Possible solutions include the periodic tuning of the resonant frequency of the generator so that it matches the frequency of the ambient vibration at all times or widening the bandwidth of the generator. Periodic tuning can be achieved using mechanical or electrical methods. Bandwidth widening can be achieved using a generator array, a mechanical stopper, non-linear (e.g. magnetic) springs or bi-stable structures. Tuning methods can be classified into intermittent tuning (power is consumed periodically to tune the device) and continuous tuning (the tuning mechanism is continuously powered). This paper presents a comprehensive review of the principles and operating strategies for increasing the operating frequency range of vibration-based micro-generators presented in the literature to date. The advantages and disadvantages of each strategy are evaluated and conclusions are drawn regarding the relevant merits of each approach

Methods of frequency tuning vibration based micro-generator

A vibration based micro-generator is an energy harvesting device that couples a certain transduction mechanism to the ambient vibration and converts mechanical energy to electrical energy. In order to maximize available power, micro-generators are typically inertial devices that operate at a single resonant frequency. The maximum output power is generated when the resonant frequency of the generator matches the ambient vibration frequency. The output power drops significantly if these two frequencies do not match due to the high Q-factor of the generator. This thesis addresses possible methods to overcome this limit of vibration based micro-generators, in particular, method of tuning the resonant frequency of the generator to match the ambient vibration frequency. This thesis highlights mechanical and electrical methods of resonant frequency tuning of a vibration based micro-generator. The mechanical frequency tuning is realized by applying an axial tensile force to strain the cantilever structure of the generator. A tunable micro-generator with a tuning range from 67.6 Hz to 98Hz and a maximum output power of 156.6?W at a constant low vibration acceleration level of 0.59m·s-2 was designed and tested. The tuning mechanism was found not to affect the damping of the generator. A closed loop frequency tuning system as well as the frequency searching algorithms has been developed to realize automatic frequency tuning using the proposed mechanical tuning method. The model of duty cycle of the system was established and it was proved theoretically that a reasonable duty cycle can be achieved if the generator and tuning system is designed properly.The electrical tuning method is realized by changing the load capacitance of the generator. Models of piezoelectric and electromagnetic generators using electrical tuning methods were derived. The model of the electromagnetic generator has also been experimentally verified. The electrically tunable generator tested has a maximum 3dB bandwidth of 4.2Hz. In conclusion, resonant frequency tuning using mechanical methods presented in the thesis have larger tuning range than that using electrical methods. However, frequency tuning using electrical tuning methods consumes less power than that using mechanical methods for the same amount of tuning range

AN INVESTIGATION ITNO THE DESIGN AND CONTROL OF TUNABLE PIEZOELECTRIC RESONATORS

Piezoelectric resonators are used in electronic devices and electrical circuits as a frequency source. The most commonly used material for the piezoelectric resonators is quartz. The quartz resonator has a tunability of between 10 ppm (0.001%) and 100 ppm (0.01%) of the nominal frequency of operation. This work shows that greater tunability can be achieved using resonators made using piezoelectric materials other than quartz and a shunt-tuning technique. The tuning afforded by using lead zirconate titanate as the piezoelectric material in a cantilever type resonator is explored in detail from an analytical and experimental standpoint. It is shown that this tuning can be up to over 10,000 ppm (1%) of the nominal operational frequency in the configuration looked at, which was not optimized to maximize the tuning range. Questions of implementation of the resonator in a commonly used resonator circuit were also answered. The resonator was experimentally shown to be operable in a modified Pierce circuit with a tuning range that was analytically predicted

Frequency Tuning Concepts For Piezoelectric Cantilever Beams And Plates For Energy Harvesting

A great deal of research has repeatedly demonstrated that piezoelectric energy harvestershold the promise of providing an alternative power source that can enhance or replaceconventional batteries and power wireless devices. Also, ambient vibrations have been the focus as a source due to the amount of energy available in them. By using energy harvesting devices to extract energy from their environments, the sensors that they power can be self-reliant and maintenance time and cost can be reduced. In order to harvest the most energy with the device, the beam's fundamental mode must be excited. However, this is not always possible due to manufacturing of the device or fluctuations in the vibration source. By being able to change thefrequencies of the beam, the device can be more effective in harvesting energy. This workutilizes a shunt capacitor-tuning concept on a piezoelectric bimorph energy harvester. Designparameters are investigated and discussed to achieve the most tuning from the device. Static and dynamic beam and plate models are derived to predict natural frequencies and power and arelater used to compare to experimental results. Results are presented for the tunability of a square cantilever bimorph. In addition, the amount of power able to be harvested from each layer of the bimorph is tested. Finally, several other tuning methods are discussed

Piezoelectric Materials in RF Applications

The development of several types of mobile objects requires new devices, such as high‐performance filters, microelectromechanical systems and other components. Piezoelectric materials are crucial to reach the expected performance of mobile objects because they exhibit high quality factors and sharp resonance and some of them are compatible with collective manufacturing technologies. We reviewed the main piezoelectric materials that can be used for radio frequency (RF) applications and herein report data on some devices. The modelling of piezoelectric plates and structures in the context of electronic circuits is presented. Among RF devices, filters are the most critical as the piezoelectric material must operate at RF frequencies. The main filter structures and characterisation methods, in accordance with such operating conditions as high frequencies and high power, are also discussed

Analysis and Fabrication of MEMS Tunable Piezoelectric Resonators

Piezoelectric MEMS resonators are being used with increased frequency for many applications, operating as frequency sources in sensors, actuators, clocks and filters. Compensation for the effects of manufacturing variation and a changeable environment, as well as a desire for frequency-hopping capabilities, have brought forth a need for post-process tuning of the resonant frequency of at these devices, in particular clocks and filters manufactured at the MEMS scale. This work applies a shunt capacitor tuning concept to three different types of piezoelectric MEMS resonators: bending beam devices, surface acoustic wave devices, and film bulk acoustic wave devices, in order to solve this tuning need across a wide range of the frequency spectrum (single Kilohertz to tens of Gigahertz). Questions about how the material and design parameters of these resonators affect the resonant frequencies and tunability of the devices are further discussed for each of the designs. In addition to the theoretical modeling, the fabrication steps necessary for processing the piezoelectric MEMS bending devices, specifically utilizing PZT thin films and an interdigitated design, are developed. Results of many fabrication trials are discussed, and finalized process plans for fabricating quality thin film PZT and PZT interdigitated devices are provided