Study of a MEMS-based Shack-Hartmann wavefront sensor with adjustable pupil sampling for astronomical adaptive optics

We introduce a Shack-Hartmann wavefront sensor for adaptive optics that enables dynamic control of the spatial sampling of an incoming wavefront using a segmented mirror microelectrical mechanical systems (MEMS) device. Unlike a conventional lenslet array, subapertures are defined by either segments or groups of segments of a mirror array, with the ability to change spatial pupil sampling arbitrarily by redefining the segment grouping. Control over the spatial sampling of the wavefront allows for the minimization of wavefront reconstruction error for different intensities of guide source and different atmospheric conditions, which in turn maximizes an adaptive optics system's delivered Strehl ratio. Requirements for the MEMS devices needed in this Shack-Hartmann wavefront sensor are also presented

Microelectromechanical system gravimeters as a new tool for gravity imaging

A microelectromechanical system (MEMS) gravimeter has been manufactured with a sensitivity of 40 ppb in an integration time of 1 s. This sensor has been used to measure the Earth tides: the elastic deformation of the globe due to tidal forces. No such measurement has been demonstrated before now with a MEMS gravimeter. Since this measurement, the gravimeter has been miniaturized and tested in the field. Measurements of the free-air and Bouguer effects have been demonstrated by monitoring the change in gravitational acceleration measured while going up and down a lift shaft of 20.7 m, and up and down a local hill of 275 m. These tests demonstrate that the device has the potential to be a useful field-portable instrument. The development of an even smaller device is underway, with a total package size similar to that of a smartphone

Design of ultraprecision machine tools with application to manufacturing of miniature and micro components

Currently the underlying necessities for predictability, producibility and productivity remain big issues in ultraprecision machining of miniature/microproducts. The demand on rapid and economic fabrication of miniature/microproducts with complex shapes has also made new challenges for ultraprecision machine tool design. In this paper the design for an ultraprecision machine tool is introduced by describing its key machine elements and machine tool design procedures. The focus is on the review and assessment of the state-of-the-art ultraprecision machining tools. It also illustrates the application promise of miniature/microproducts. The trends on machine tool development, tooling, workpiece material and machining processes are pointed out

MOEMS deformable mirror testing in cryo for future optical instrumentation

MOEMS Deformable Mirrors (DM) are key components for next generation instruments with innovative adaptive optics systems, in existing telescopes and in the future ELTs. These DMs must perform at room temperature as well as in cryogenic and vacuum environment. Ideally, the MOEMS-DMs must be designed to operate in such environment. We present some major rules for designing / operating DMs in cryo and vacuum. We chose to use interferometry for the full characterization of these devices, including surface quality measurement in static and dynamical modes, at ambient and in vacuum/cryo. Thanks to our previous set-up developments, we placed a compact cryo-vacuum chamber designed for reaching 10-6 mbar and 160K, in front of our custom Michelson interferometer, able to measure performances of the DM at actuator/segment level as well as whole mirror level, with a lateral resolution of 2{\mu}m and a sub-nanometric z-resolution. Using this interferometric bench, we tested the Iris AO PTT111 DM: this unique and robust design uses an array of single crystalline silicon hexagonal mirrors with a pitch of 606{\mu}m, able to move in tip, tilt and piston with strokes from 5 to 7{\mu}m, and tilt angle in the range of +/-5mrad. They exhibit typically an open-loop flat surface figure as good as <20nm rms. A specific mount including electronic and opto-mechanical interfaces has been designed for fitting in the test chamber. Segment deformation, mirror shaping, open-loop operation are tested at room and cryo temperature and results are compared. The device could be operated successfully at 160K. An additional, mainly focus-like, 500 nm deformation is measured at 160K; we were able to recover the best flat in cryo by correcting the focus and local tip-tilts on some segments. Tests on DM with different mirror thicknesses (25{\mu}m and 50{\mu}m) and different coatings (silver and gold) are currently under way.Comment: 11 pages, 12 Figure

Generalized Parity-Time Symmetry Condition for Enhanced Sensor Telemetry

Wireless sensors based on micro-machined tunable resonators are important in a variety of applications, ranging from medical diagnosis to industrial and environmental monitoring.The sensitivity of these devices is, however, often limited by their low quality (Q) factor.Here, we introduce the concept of isospectral party time reciprocal scaling (PTX) symmetry and show that it can be used to build a new family of radiofrequency wireless microsensors exhibiting ultrasensitive responses and ultrahigh resolution, which are well beyond the limitations of conventional passive sensors. We show theoretically, and demonstrate experimentally using microelectromechanical based wireless pressure sensors, that PTXsymmetric electronic systems share the same eigenfrequencies as their parity time (PT)-symmetric counterparts, but crucially have different circuit profiles and eigenmodes. This simplifies the electronic circuit design and enables further enhancements to the extrinsic Q factor of the sensors

Micro-manufacturing : research, technology outcomes and development issues

Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in Micro-manufacturing is also in Non-MEMS-based manufacturing. Research and technological development (RTD) in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid-processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project. Finally, concluding remarks are given, which raise several issues concerning further development in micro-manufacturing

Sagnac loop in ring resonators for tunable optical filters

General filter architecture using co- and counterpropagation signals are studied. A specific configuration based on a Sagnac loop within a ring resonator is analyzed. Novel tuning, apart from conventional tuning, is achieved by changing the coupling ratio of a coupler through the adjustment of the equivalent loop length. Full equations describing the filter behavior in passive and active configurations, and simple closed-form formulas to compute the tuning, tolerance, and full-width at half-maximum are reported. The performance of these devices is discussed for their application as selective or channel-dropping ultra-narrow-band filters. The effect of losses and their dispersion properties are also discussed. These devices can be conveniently implemented, using silicon- or InP-integrated optic technology, for they have high free spectral ranges.Publicad