Model-based Control of the Scanning Tunneling Microscope: Enabling New Modes of Imaging, Spectroscopy, and Lithography

The invention of scanning tunneling microscope (STM) dates back to the work of Binnig and Rohrer in the early 1980s, whose seminal contribution was rewarded by the 1986 Nobel Prize in Physics for the design of the scanning tunneling microscope. Forty years later, the STM remains the best existing tool for studying electronic, chemical, and physical properties of conducting and semiconducting surfaces with atomic precision. It has opened entirely new fields of research, enabling scientists to gain invaluable insight into properties and structure of matter at the atomic scale. Recent breakthroughs in STM-based automated hydrogen depassivation lithography (HDL) on silicon have resulted in the STM being considered a viable tool for fabrication of error-free silicon-based quantum-electronic devices. Despite the STM's unique ability to interrogate and manipulate matter with atomic precision, it remains a challenging tool to use. It turns out that many issues can be traced back to the STM's feedback control system, which has remained essentially unchanged since its invention about 40 years ago. This article explains the role of feedback control system of the STM and reviews some of the recent progress made possible in imaging, spectroscopy, and lithography by making appropriate changes to the STM's feedback control loop. We believe that the full potential of the STM is yet to be realized, and the key to new innovations will be the application of advanced model-based control and estimation techniques to this system

THE DEVELOPMENT OF A NOVEL ELECTRO-MAGNETIC FORCE MICROSCOPE

This thesis describes the development of a new type of Magnetic Force Microscope (MFM) probe based on a unique electromagnetic design. In addition the design, construction and testing of a new MFM system, complete in both hardware and software, is also described. The MFM allowed initial tests on prototypes of the new probe, and is to provide a base for future new probe integration. The microscope uses standard MFM micro-cantilever probes in static modes of imaging. A new computer hosted DSP control system, software, and its various interfaces with the MFM have been integrated into the system. The system has been tested using standard probes with various specimens and satisfactory results have been produced. A novel probe has been designed to replace the standard MFM magnetic coated tip with a field generated about a sub-micron aperture in a conducting film. The field from the new probe is modelled and its imaging capability investigated, with iterative designs analysed in this way. The practical construction and potential problems therein, of the probe are also considered. Test apertures have been manufactured, and an image of the field produced when operating is provided as support to the theoretical designs. Future methods of using the new probe are also discussed, including the examination of the probe as a magnetic write mechanism. This probe, integrated into the MFM, can provide a new method of microscopic magnetic imaging, and in addition opens a new potential method of magnetic storage that will require further research

DEVELOPMENT OF A VERSATILE HIGH SPEED NANOMETER LEVEL SCANNING MULTI-PROBE MICROSCOPE

The motivation for development of a multi-probe scanning microscope, presented in this dissertation, is to provide a versatile measurement tool mainly targeted for biological studies, especially on the mechanical and structural properties of an intracellular system. This instrument provides a real-time, three-dimensional (3D) scanning capability. It is capable of operating on feedback from multiple probes, and has an interface for confocal photo-detection of fluorescence-based and single molecule imaging sensitivity. The instrument platform is called a Scanning Multi-Probe Microscope (SMPM) and enables 45 microm by 45 microm by 10 microm navigation of specimen with simultaneous optical and mechanical probing with each probe location being adjustable for collocation or for probing with known probe separations. The 3D positioning stage where the specimen locates was designed to have nanometer resolution and repeatability at 10 Hz scan speed with either open loop or closed loop operating modes. The fine motion of the stage is comprises three orthogonal flexures driven by piezoelectric actuators via a lever linkage. The flexures design is able to scan in larger range especially in z axis and serial connection of the stages helps to minimize the coupling between x, y and z axes. Closed-loop control was realized by the capacitance gauges attached to a rectangular block mounted to the underside of the fine stage upon which the specimen is mounted. The stage's performance was studied theoretically and verified by experimental test. In a step response test and using a simple proportional and integral (PI) controller, standard deviations of 1.9 nm 1.8 nm and 0.41 nm in the x, y and z axes were observed after settling times of 5 ms and 20 ms for the x and y axes. Scanning and imaging of biological specimen and artifact grating are presented to demonstrate the system operation. For faster, short range scanning, novel ultra-fast fiber scanning system was integrated into the xyz fine stage to achieve a super precision dual scanning system. The initial design enables nanometer positioning resolution and runs at 100 Hz scan speed. Both scanning systems are capable of characterization using dimensional metrology tools. Additionally, because the high-bandwidth, ultra-fast scanning system operates through a novel optical attenuating lever, it is physically separate from the longer range scanner and thereby does not introduce additional positioning noise. The dual scanner provides a fine scanning mechanism at relatively low speed and large imaging area using the xyz stage, and focus on a smaller area of interested in a high speed by the ultra-fast scanner easily. Such functionality is beneficial for researchers to study intracellular dynamic motion which requires high speed imaging. Finally, two high end displacement sensor systems, a knife edge sensor and fiber interferometer, were demonstrated as sensing solutions for potential feedback tools to boost the precision and resolution performance of the SMPM

Bi-harmonic atomic force microscopy

In tapping mode atomic force microscopy, surface features are measured indirectly via the amplitude of the tapping cantilever. A change in surface profile is detectable only if it results in an amplitude change that is significant enough to be measured by the optics. Previous works have focused on improving sensitivity through the system\u27s Q-factor, either by changing physical cantilever properties or using feedback control, but those approaches undesirably slow down the dynamic response. In this work we take a novel approach to sensitivity amplification by reshaping the tapping trajectory. By shaping the trajectory so that the probe spends a greater portion of each period close to the sample, where nonlinear forces is strongest, and the amplitude sensitivity can be altered. A trajectory using two harmonics is considered and standard feed forward control techniques are employed to generate the desired cantilever drive signal. Simulation and experimental results are included and benchmarked against previous literature using standard methods. The results demonstrate that measurement sensitivity can be improved by a significant amount --Abstract, page iii

Improvement in the Imaging Performance of Atomic Force Microscopy: A Survey

Nanotechnology is the branch of science which deals with the manipulation of matters at an extremely high resolution down to the atomic level. In recent years, atomic force microscopy (AFM) has proven to be extremely versatile as an investigative tool in this field. The imaging performance of AFMs is hindered by: 1) the complex behavior of piezo materials, such as vibrations due to the lightly damped low-frequency resonant modes, inherent hysteresis, and creep nonlinearities; 2) the cross-coupling effect caused by the piezoelectric tube scanner (PTS); 3) the limited bandwidth of the probe; 4) the limitations of the conventional raster scanning method using a triangular reference signal; 5) the limited bandwidth of the proportional-integral controllers used in AFMs; 6) the offset, noise, and limited sensitivity of position sensors and photodetectors; and 7) the limited sampling rate of the AFM's measurement unit. Due to these limitations, an AFM has a high spatial but low temporal resolution, i.e., its imaging is slow, e.g., an image frame of a living cell takes up to 120 s, which means that rapid biological processes that occur in seconds cannot be studied using commercially available AFMs. There is a need to perform fast scans using an AFM with nanoscale accuracy. This paper presents a survey of the literature, presents an overview of a few emerging innovative solutions in AFM imaging, and proposes future research directions.This work was supported in part by the Australian Research Council (ARC) under Grant FL11010002 and Grant DP160101121 and the UNSW Canberra under a Rector's Visiting Fellowshi

Optimal integral force feedback and structured PI tracking control : application for objective lens positioner

Peer reviewedPostprin

Imaging at the Nano-scale: State of the Art and Advanced Techniques

Surface characteristics such as topography and critical dimensions serve as important indicators of product quality and manufacturing process performance especially at the micrometer and the nanometer scales. This paper first reviews different technologies used for obtaining high precision 3-D images of surfaces, along with some selected applications. Atomic force microscopy (AFM) is one of such methods. These images are commonly distorted by convolution effects, which become more prominent when the sample surface contains high aspect ratio features. In addition, data artifacts can result from poor dynamic response of the instrument used. In order to achieve reliable data at high throughput, dynamic interactions between the instrument's components need to be well understood and controlled, and novel image deconvolution schemes need to be developed. Our work aims at mitigating these distortions and achieving reliable data to recover metrology soundness. A summary of our findings will be presented.Singapore-MIT Alliance (SMA

A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy

The accuracy and repeatability of atomic force microscopy (AFM) imaging significantly depend on the accuracy of the piezoactuator. However, nonlinear properties of piezoactuators can distort the image, necessitating sensor-based closed-loop actuators to achieve high accuracy AFM imaging. The advent of high-speed AFM has made the requirements on the position sensors in such a system even more stringent, requiring higher bandwidths and lower sensor mass than traditional sensors can provide. In this paper, we demonstrate a way for high-speed, high-precision closed-loop AFM nanopositioning using a novel, miniaturized micro-electro-mechanical system position sensor in conjunction with a simple PID controller. The sensor was developed to respond to the need for small, lightweight, high-bandwidth, long-range and sub-nm-resolution position measurements in high-speed AFM applications. We demonstrate the use of this sensor for closed-loop operation of conventional as well as high-speed AFM operation to provide distortion-free images. The presented implementation of this closed-loop approach allows for positioning precision down to 2.1 Å, reduces the integral nonlinearity to below 0.2%, and allows for accurate closed loop imaging at line rates up to 300 Hz

A metrological atomic force microscope

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002.Includes bibliographical references (p. 245-248).This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.This thesis describes the design, fabrication, and testing of a metrological atomic force microscope (AFM). This design serves as a prototype for a similar system that will later be integrated with the Sub-Atomic Measuring Machine (SAMM) under development in collaboration with the University of North Carolina at Charlotte. The microscope uses a piezoelectric tube scanner with a quartz tuning fork proximity sensor to image three-dimensional sample topographies. The probe position is measured with a set of capacitance sensors, aligned so as to minimize Abbe offset error, for direct measurement of probe tip displacements. A PC-based digital control system provides closed-loop control of the lateral scanning and axial height regulation actions of the probe assembly. The lateral scanning system, which dictates the probe's motion in directions parallel to the sample plane, has measured -3 dB closed-loop bandwidths of 189 Hz and 191 Hz in the X and Y directions, respectively. Meanwhile, the axial height regulator, which adjusts the length of the tube scanner to control for a constant gap between the probe tip and the sample surface, has demonstrated a -3 dB closed-loop bandwidth of as high as 184 Hz. The metrological AFM is operational and has been used to collect several images of sample surfaces. Images taken of a silicon calibration grating indicate that the microscope can easily resolve 100 nm-scale step changes in height. However, several errors are observed in the image data. Possible reasons for these errors are discussed, and ideas for follow-on work are suggested.by Andrew John Stein.S.M

Development of a XYZ scanner for home-made atomic force microscope based on FPAA control

Atomic force microscopy (AFM) is one of the useful tools in the fields of nanoscale measurement and manipulation. High speed scanning is one of the crucial requirements for live cell imaging and soft matter characterization. The scanning speed is limited by the bandwidth of the AFM’s detection and actuation components. Generally, the bandwidth of a traditional scanner is too low to conduct the live cell imaging. This paper presents a simple and integrated compact home-made AFM for high speed imaging. To improve the bandwidth of the scanner, a parallel kinematics mechanism driven by piezoelectric actuators (PZTs) is proposed for the fast positioning in the X, Y and Z directions. The mechanical design optimization, modeling and analysis, and experimental testing have been conducted to validate the performance of the proposed scanner. A number of experimental results showed that the developed scanner has the capability for broad bandwidth with low coupling errors in the actuation directions. A hybrid control strategy including feedforward and feedback loops has been designed to significantly improve the dynamic tracking performance of the scanner and a field programmable analog array (FPAA) system is utilized to implement the control algorithm for excellent and stable tracking capability. Further, a number of high speed measurements have been conducted to verify the performance of the developed AFM