Smart Sensor Systems for High Temperature Intelligent Engine Applications

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Advanced high temperature static strain sensor development

An examination was made into various techniques to be used to measure static strain in gas turbine liners at temperatures up to 1150 K (1600 F). The methods evaluated included thin film and wire resistive devices, optical fibers, surface acoustic waves, the laser speckle technique with a heterodyne readout, optical surface image and reflective approaches and capacitive devices. A preliminary experimental program to develop a thin film capacitive device was dropped because calculations showed that it would be too sensitive to thermal gradients. In a final evaluation program, the laser speckle technique appeared to work well up to 1150 K when it was used through a relatively stagnant air path. The surface guided acoustic wave approach appeared to be interesting but to require too much development effort for the funds available. Efforts to develop a FeCrAl resistive strain gage system were only partially successful and this part of the effort was finally reduced to a characterization study of the properties of the 25 micron diameter FeCrAl (Kanthal A-1) wire. It was concluded that this particular alloy was not suitable for use as the resistive element in a strain gage above about 1000 K

Microwave Acoustic SAW Resonators for Stable High-temperature Harsh-Environment Static and Dynamic Strain Sensing Applications

High-temperature, harsh-environment static and dynamic strain sensors are needed for industrial process monitoring and control, fault detection, structural health monitoring in power plant environments, steel and refractory material manufacturing, aerospace, and defense applications. Sensor operation in the aforementioned extreme environments require robust devices capable of sustaining the targeted high temperatures, while maintaining a stable sensor response. Current technologies face challenges regarding device or system size, complexity, operational temperature, or stability. Surface acoustic wave (SAW) sensor technology using high temperature capable piezoelectric substrates and thin film technology has favorable properties such as robustness; miniature size; capability of mass production; reduced installation costs; battery-free operation; maintenance-free; and offer the potential for wireless, multi-sensor interrogation. These characteristics are very attractive for static and dynamic strain sensors targeted to operate in high-temperature harsh-environment conditions. The investigation of harsh-environment static and dynamic SAW strain sensors requires addressing the issues of: (i) sensor platform endurance and stability; (ii) development of durable packaging and attachment techniques; (iii) temperature compensation techniques, to mitigate temperature cross-sensing; and (iv) methods of sensor interrogation and calibration at high temperatures. In this work, langasite-based SAW resonator (SAWR) sensors have been investigated. A stable sensor platform was verified for two types of thin-film electrode configurations, namely: co-deposited Pt/Al2O3 (up to 750oC) and multilayered PtNi|PtZr (up to 1000oC). High-temperature sensor attachment solutions for strain sensor applications were developed for temperatures up to 500oC. The developed SAWR sensors were tested and calibrated for both static and dynamic strain up to 400oC. A temperature compensation technique and a novel finite element analysis was used to perform high-temperature static strain calibration. A high-temperature dynamic strain test rig using a constant stress beam was designed, implemented and used to characterize the SAWR strain sensor performance in measuring dynamic strain. Using the in-phase and quadrature strain sensor signal analysis technique proposed and developed in this study, the existence of both amplitude and frequency modulations of the SAWR RF signal by the dynamic strain signal was confirmed, and the two types of modulations separated and quantified

Fiber optic microphone having a pressure sensing reflective membrane and a voltage source for calibration purpose

A fiber optic microphone is provided for measuring fluctuating pressures. An optical fiber probe having at least one transmitting fiber for transmitting light to a pressure-sensing membrane and at least one receiving fiber for receiving light reflected from a stretched membrane is provided. The pressure-sensing membrane may be stretched for high frequency response. Further, a reflecting surface of the pressure-sensing membrane may have dimensions which substantially correspond to dimensions of a cross section of the optical fiber probe. Further, the fiber optic microphone can be made of materials for use in high temperature environments, for example greater than 1000 F. A fiber optic probe is also provided with a back plate for damping membrane motion. The back plate further provides a means for on-line calibration of the microphone

3D Structuration Techniques of LTCC for Microsystems Applications

This thesis aimed at developing new 3D structuration techniques for a relatively recent new ceramic technology called LTCC, which stands for Low Temperature, Co-fired Ceramic. It is a material originally developed for the microelectronic packaging industry; its chemical and thermal stabilities make it suitable to military-grade and automotive applications, such as car ignition systems and Wi-Fi antennae (GHz frequencies). In recent years however, the research in ceramic microsystems has seen a growing interest for microfluidics, packaging, MEMS and sensors. Positioned at the crossing of classical thick-film technology on alumina substrate and of high temperature ceramics, this new kind of easily structurable ceramic is filling the technological and dimensional gap between microsystems in Silicon and classical "macro microsystems", in the sense that we can now structure microdevices in the range from 150 mm to 150 mm. In effect, LTCC technology allows printing conductors and other inks from 30 mm to many mm, structuration from 150 mm to 150 mm, and suspended structures with gaps down to 30 mm thanks to sacrificial materials. Sensors and their packaging are now merged in what we can call "functional packaging". The contributions of this thesis lie both in the technological aspects we brought, and in the innovative microfluidic sensors and devices created using our developed methods. These realizations would not have been possible with the standard lamination and firing techniques used so far. Hence, we allow circumventing the problems related to microfluidics circuitry: for instance, the difficulty to control final fired dimensions, the burden to produce cavities or open structures and the associated delaminations of tapes, and the absence of "recipe" for the industrialization of fluidic devices. The achievements of the presented research can be summarized as follows: The control of final dimensions is mastered after having studied the influence of lamination parameters, proving they have a considerable impact. It is now possible to have a set of design rules for a given material, deviating from suppliers' recommendations for the manufacture of slender structures requiring reduced lamination. A new lamination method was set up, permitting the assembly of complex microfluidic circuits that would normally not sustain standard lamination. The method is based on partial pseudo-isostatic sub-laminations, with the help of a constrained rubber, subsequently consolidated together with a final standard uniaxial lamination. The conflict between well bonded tapes and acceptable output geometry is greatly attenuated. We achieved the formulation of a new class of Sacrificial Volume Materials (SVM) to allow the fabrication of open structures on LTCC and on standard alumina substrates; these are indeed screen-printable inks made by mixing together mineral compounds, a glassy phase and experimental organic binders. This is an appreciable improvement over the so-far existing SVMs for LTCC, limited to closed structures such as thin membranes. An innovative industrial-grade potentially low-cost diagnostics multisensor for the pneumatic industry was developed, allowing the measurement of compressed air pressure, flow and temperature. The device is entirely mounted by soldering onto an electro-fluidic platform, de facto making it a true electro-fluidic SMD component in itself. It comprises additionally its own integrated SMD electronics, and thanks to standard hybrid assembly techniques, gets rid of external wires and tubings – this prowess was never achieved before. This opens the way for in situ diagnostics of industrial systems through the use of low-cost integrated sensors that directly output conditioned signals. In addition to the abovementioned developments, we propose an extensive review of existing Sacrificial Volume Materials, and we present numerous applications of LTCC to sensors and microsystems, such as capacitive microforce sensors, a chemical microreactor and microthrusters. In conclusion, LTCC is a technology adapted to the industrial production of microfluidic sensors and devices: the fabrication steps are all industrializable, with an easy transition from prototyping to mass production. Nonetheless, the structuration of channels, cavities and membranes obey complex rules; it is for the moment not yet possible to choose with accuracy the right manufacturing parameters without testing. Consequently, thorough engineering and mastering of the know-how of the whole manufacturing process is still necessary to produce efficient LTCC electro-fluidic circuits, in contrast with older techniques such as classical thick-film technology on alumina substrates or PCBs in FR-4. Notwithstanding its lack of maturity, the still young LTCC technology is promising in both the microelectronics and microfluidics domains. Engineers have a better understanding of the structuration possibilities, of the implications of lamination, and of the most common problems; they have now all the tools in hand to create complex microfluidics circuits

High Temperature Materials Characterization And Sensor Application

This dissertation presents new solutions for turbine engines in need of wireless temperature sensors at temperatures up to 1300oC. Two important goals have been achieved in this dissertation. First, a novel method for precisely characterizing the dielectric properties of high temperature ceramic materials at high temperatures is presented for microwave frequencies. This technique is based on a high-quality (Q)-factor dielectrically-loaded cavity resonator, which allows for accurate characterization of both dielectric constant and loss tangent of the material. The dielectric properties of Silicon Carbonitride (SiCN) and Silicoboron Carbonitride (SiBCN) ceramics, developed at UCF Advanced Materials Processing and Analysis Center (AMPC) are characterized from 25 to 1300oC. It is observed that the dielectric constant and loss tangent of SiCN and SiBCN materials increase monotonously with temperature. This temperature dependency provides the valuable basis for development of wireless passive temperature sensors for high-temperature applications. Second, wireless temperature sensors are designed based on the aforementioned hightemperature ceramic materials. The dielectric constant of high-temperature ceramics increases monotonically with temperature and as a result changes the resonant frequency of the resonator. Therefore, the temperature can be extracted by measuring the change of the resonant frequency of the resonator. In order for the resonator to operate wirelessly, antennas need to be included in the design. Three different types of sensors, corresponding to different antenna configurations, are designed and the prototypes are fabricated and tested. All of the sensors successfully perform at temperatures over 1000oC. These wireless passive sensor designs will significantly benefit turbine engines in need of sensors operating at harsh environment

Carbon-based materials for humidity sensing: a short review

Humidity sensors are widespread in many industrial applications, ranging from environmental and meteorological monitoring, soil water content determination in agriculture, air conditioning systems, food quality monitoring, and medical equipment to many other fields. Thus, an accurate and reliable measurement of water content in dierent environments and materials is of paramount importance. Due to their rich surface chemistry and structure designability, carbon materials have become interesting in humidity sensing. In addition, they can be easily miniaturized and applied in flexible electronics. Therefore, this short review aims at providing a survey of recent research dealing with carbonaceous materials used as capacitive and resistive humidity sensors. This work collects some successful examples of devices based on carbon nanotubes, graphene, carbon black, carbon fibers, carbon soot, and more recently, biochar produced from agricultural wastes. The pros and cons of the dierent sensors are also discussed in the present review

The 1992 NASA Langley Measurement Technology Conference: Measurement Technology for Aerospace Applications in High-Temperature Environments

An intensive 2-day conference to discuss the current status of measurement technology in the areas of temperature/heat flux, stress/strain, pressure, and flowfield diagnostics for high temperature aerospace applications was held at Langley Research Center, Hampton, Virginia, on April 22 and 23, 1993. Complete texts of the papers presented at the Conference are included in these proceedings

Recent progress of fabrication, characterization, and applications of anodic aluminum oxide (AAO) membrane: A review

The progress of membrane technology with the development of membranes with controlled parameters led to porous membranes. These membranes can be formed using different methods and have numerous applications in science and technology. Anodization of aluminum in this aspect is an electro-synthetic process that changes the surface of the metal through oxidation to deliver an anodic oxide layer. This process results in a self-coordinated, exceptional cluster of round and hollow formed pores with controllable pore widths, periodicity, and thickness. After the initial introduction, the paper proceeds with a brief overview of anodizing process. That engages anodic aluminum oxide (AAO) layers to be used as formats in various nanotechnology applications without the necessity for expensive lithographical systems. This review article surveys the current status of the investigation on AAO membranes. A comprehensive analysis is performed on AAO membranes in applications; filtration, sensors, drug delivery, template-assisted growth of various nanostructures. Their multiple usages in nanotechnology have also been discussed to gather nanomaterials and devices or unite them into specific applications, such as nano-electronic gadgets, channel layers, and clinical platforms tissue designing. From this review, the fact that the specified enhancement of properties of AAO can be done by varying geometric parameters of AAO has been highlighted. No review paper focused on a detailed discussion of applications of AAO with prospects and challenges. This review paper represents the formation, properties, applications with objective consideration of the prospects and challenges of AAO applications. The prospects may appeal to researchers to promote the development of unique membranes with functionalization and controlled geometric parameters and check the feasibility of the AAO membranes in nano-devices.Comment: 36 pages, 19 figures, 8 table