Structural and optical properties of Al1-xInxN epilayers on GaN template grown by metalorganic chemical vapor deposition
Abstract
This paper reports that Al1-xInxN epilayers were grown on GaN template by metalorganic chemical vapor deposition with an In content of 7%-20%. X-ray diffraction results indicate that all these Al1-xInxN epilayers have a relatively low density of threading dislocations. Rutherford backscattering/channeling measurements provide the exact compositional information and show that a gradual variation in composition of the Al1-xInxN epilayer happens along the growth direction. The experimental results of optical reflection clearly show the bandgap energies of Al1-xInxN epilayers. A bowing parameter of 6.5 eV is obtained from the compositional dependence of the energy gap. The cathodoluminescence peak energy of the Al1-xInxN epilayer is much lower than its bandgap, indicating a relatively large Stokes shift in the Al1-xInxN sample- 期刊论文
- Metalorganic Chemical Vapor Deposition
- Al1-xinxn
- Gradual Variation In Composition
- Optical Reflectance Spectra
- X-ray-diffraction
- Phase Epitaxy
- Relaxation
- Films
- Heterostructures
- Separation
- Dynamics
- Alloys
- Region
- Layers
- 光电子学
- metal organic chemical vapor deposition
- x-ray crystallography
- relaxation
- photography--films
- finite volume method
- heterostructures
- separation
- dynamics
- alloys
- region
- layers
- metal organic vapor phase epitaxy
- metallorganic vapor phase epitaxy
- mocvd (vapor deposition)
- movpe (vapor deposition)
- omcvd (vapor deposition)
- omvpe (vapor deposition)
- organo-metal vapor phase epitaxy
- organometallic chemical vapor deposition
- organometallic vapor phase epitaxy
- metalorganic vapor phase epitaxy
- metalorganic chemical vapor deposition
- organometallic vapor deposition
- x射线衍射
- x ray diffraction
- x-ray diffraction
- borrmann effect
- debye-scherrer cameras
- laue effect
- patterson diagrams
- pendellosung fringes
- radiocrystallography
- weissenberg cameras
- xrd
- diffraction des rayons x
- roentenbeugung
- roentgenbeugung
- x ray crystallography
- xray diffraction
- x射线晶体学
- x ray diffractometers
- 松弛
- chemical relaxation
- 弛豫[作用]
- photographic film
- films
- motion pictures
- movies
- cinema
- feature films--history and criticism
- moving-pictures
- microfilms
- filmstrips
- film slides
- film strips
- slidefilms
- anodised layers
- anodized layers
- claddings
- cvd coatings
- chemical vapor deposited coatings
- chemical vapour deposited coatings
- cvd thin films
- decorative coatings
- electrophoretic coatings
- fission reactor fuel claddings
- foils
- mocvd coatings
- optical fibre cladding
- optical fiber cladding
- protective coatings, optical fibre
- plasma arc sprayed coatings
- plasma sprayed coatings
- plasma cvd coatings
- plasma chemical vapour deposited coatings
- plasma deposited coatings
- polymer films
- polymer coatings
- vacuum deposited coatings
- vacuum deposited thin films
- vapour deposited coatings
- vapor deposited coatings
- vapor deposited thin films
- vapour deposited thin films
- elektrophoretische ueberzuege
- revetements electrophoretiques
- plasmalichtbogen-spruehueberzuege
- revetements par projection au plasma
- motion pictures (entertainment)
- 有限体积法
- art films
- cinefilms
- moving image materials
- 分离
- electrostatic separation
- pervaporation
- segregation
- 动力学
- dynamical systems
- kinetics
- motion
- mechanics, analytic
- analytical mechanics
- robot dynamics
- 动理学
- 机器人动力学
- cinetiques
- kinetik
- reaction rates
- robot motion
- metallic alloys
- alkali metal alloys
- alkaline earth alloys
- intermetallic compounds
- barium alloys
- caesium alloys
- cesium alloys
- francium alloys
- strontium alloys
- metals (materials)
- lamina
- plies