Noise and thermal stability of vibrating micro-gyrometers preamplifiers

The preamplifier is a critical component of gyrometer's electronics. Indeed the resolution of the sensor is limited by its signal to noise ratio, and the gyrometer's thermal stability is limited by its gain drift. In this paper, five different kinds of preamplifiers are presented and compared. Finally, the design of an integrated preamplifier is shown in order to increase the gain stability while reducing its noise and size.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing

Can the Tajmar effect be explained using a modification of inertia?

The Tajmar effect is an unexplained acceleration observed by accelerometers and laser gyroscopes close to rotating supercooled rings. The observed ratio between the gyroscope and ring accelerations was 3+/-1.2x10^-8. Here, a new model for inertia which has been tested quite successfully on the Pioneer and flyby anomalies is applied to this problem. The model assumes that the inertia of the gyroscope is caused by Unruh radiation that appears as the ring and the fixed stars accelerate relative to it, and that this radiation is subject to a Hubble-scale Casimir effect. The model predicts that the sudden acceleration of the nearby ring causes a slight increase in the inertial mass of the gyroscope, and, to conserve momentum in the reference frame of the spinning Earth, the gyroscope rotates clockwise with an acceleration ratio of 1.8+/-0.25x10^-8 in agreement with the observed ratio. However, this model does not explain the parity violation seen in some of the gyroscope data. To test these ideas the Tajmar experiment (setup B) could be exactly reproduced in the southern hemisphere, since the model predicts that the anomalous acceleration should then be anticlockwise.Comment: 9 pages, 1 figure. Accepted by EPL on the 4th December, 200

Resonating Star Gyroscope

Disclosed are resonant vibratory gyroscopes and fabrication methods relating thereto. The angular motion sensor comprises a resonating star gyroscope which comprises a vibratory solid or shell-type structure for rate sensing or measuring angle of rotation. The structure formed as a merged superposition of two square entities, yields in-plane degenerate flexural modes that are used to sense rotation around the axis perpendicular to the substrate. The resonating star gyroscope may be implemented using the primary flexural degenerate modes. Such an implementation has been successfully demonstrated by the authors using trench-refilled polysilicon and epitaxial polysilicon as the structural material. It is also possible to use a solid star-shaped resonator (with or without perforations) for the gyroscope. The authors also suggest the operation of the resonating star gyroscope employing the higher-order flexural modes. In this particular implementation the authors utilized a (100) single crystalline structural material.Georgia Tech Research Corp

Readout Method And Electronic Bandwidth Control For A Silicon In-plane Tuning Fork Gyroscope

Disclosed are methods and a sensor architecture that utilizes the residual quadrature error in a gyroscope to achieve and maintain perfect mode-matching, i.e., ~0 Hz split between the drive and sense mode frequencies, and to electronically control sensor bandwidth. In a reduced-to-practice embodiment, a 6 mW, 3V CMOS ASIC and control algorithm are interfaced to a mode-matched MEMS tuning fork gyroscope to implement an angular rate sensor with bias drift as low as 0.15°/hr and angle random walk of 0.003°/√hr, which is the lowest recorded to date for a silicon MEMS gyroscope. The system bandwidth can be configured between 0.1 Hz and 1 kHz.Georgia Tech Research Coporatio

Development and experimental analysis of a micromachined Resonant Gyrocope

This thesis is concerned with the development and experimental analysis of a resonant gyroscope. Initially, this involved the development of a fabrication process suitable for the construction of metallic microstructures, employing a combination of nickel electroforming and sacrificial layer techniques to realise free-standing and self-supporting mechanical elements. This was undertaken and achieved. Simple beam elements of typically 2.7mm x 1mm x 40µm dimensions have been constructed and subject to analysis using laser doppler interferometry. This analysis tool was used to implement a fill modal analysis in order to experimentally derive dynamic parameters. The characteristic resonance frequencies of these cantilevers have been measured, with 3.14kHz, 23.79kHz, 37.94kHz and 71.22kHz being the typical frequencies of the first four resonant modes. Q-factors of 912, 532, 1490 and 752 have been measured for these modes respectively at 0.01mbar ambient pressure. Additionally the mode shapes of each resonance was derived experimentally and found to be in excellent agreement with finite element predictions. A 4mm nickel ring gyroscope structure has been constructed and analysed using both optical analysis tools and electrical techniques. Using laser doppler interferometry the first four out-of-plane modes of the ring structure were found to be typically 9.893 kHz, 11.349 kHz, 11.418 kHz and 13.904 kHz with respective Q-factors of 1151, 1659, 1573 and 1407 at 0.01 mbar ambient pressure. Although electrical measurements were found to be obscured through cross coupling between drive and detection circuitry, the in-plane operational modes of the gyroscope were sucessfully determined. The Cos2Ө and Sin2Ө operational modes were measured at 36.141 kHz and 36.346 kHz, highlighting a frequency split of 205kHz. Again all experimentally derived modal parameters were in good agreement with finite element predictions. Furthermore, using the analysis model, the angular resolution of the gyroscope has been predicted to be approximately 4.75º/s

Uncertainty Quantification for a Class of MEMS-based Vibratory Angular Rate Sensors

Numerical schemes that are suitable for predicting response statistics of mass-spring and ring gyroscopes are developed when this class of vibratory gyroscopes are subjected to certain system parameters as well as environment uncertainties. The emphasis is placed on the steady-state part of the response since it is more critical to the operation of a gyroscope. A peak-picking approach which simulates the demodulation process which is used in practice is employed first before applying the Monte Carlo simulation method to predict the response statistics. A number of simulation trials to predict response statistics have been performed for mass-spring and ring-type gyroscopes in an effort to ascertain the optimal temporal points as well as sample paths for the impending uncertainty quantification study. Based on the optimal temporal and sample paths, uncertainties in input angular rate, mass/frequency mismatch and damping have been quantified

A New Design of Mode-Matched (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs Immune to Fabrication Error

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 28-31 March 2023In this report, we proposed a new design of mode-matched (100) single crystal silicon (SCS) ring gyroscope immune to fabrication errors. The robustness against dimensional and orientation errors was confirmed by finite element analysis simulations and frequency response measurements. The designed ring resonator has a ring of uniform width suspended by eight identical suspension structures and it has eight-fold symmetry. The in-plane elastic asymmetry of the ring is compensated by the carefully designed suspension structures with four rectangular beams with two chamfered corners in each. As a simulation result, we found that the optimum chamfering size for the ring width of 5.1 μm and the diameter of 2 mm and the ring resonator is almost insensitive to fabrication errors. The resonators were fabricated using silicon-on-insulator wafers and the as-fabricated device shows small mismatch about 0.5 - 1.5%, which is caused by the nonuniform fabrication errors. After electrostatic tuning, gyro output was successfully measured

Resonant speed meter for gravitational wave detection

Gravitational-wave detectors have been well developed and operated with high sensitivity. However, they still suffer from mirror displacement noise. In this paper, we propose a resonant speed meter, as a displacement noise-canceled configuration based on a ring-shaped synchronous recycling interferometer. The remarkable feature of this interferometer is that, at certain frequencies, gravitational-wave signals are amplified, while displacement noises are not.Comment: 4 pages, 4 figure

An Off-Axis Rotating Atom Trap

We present a novel configuration of a magneto-optical trap for cold atoms. The trap is very simple in design, employing only a small permanent magnet and an external Helmholtz bias coil. The trap\u27s principal advantage is that the entire volume of the overlapping laser beams can be used for atom guiding and manipulation. An especially interesting effect is the rotation of the trapped atoms in circular motion as the permanent magnet is rotated. Clouds containing on the order of 2*10⁶ atoms are rotated up to 60Hz forming a 5 mm diameter ring. This rotation can potentially be used in studying the behavior of cold atoms in 2-dimensional potential as well as applications for rotational sensors. We also present a classical theoretical model to simulate the experiment

Design and implementation of a control scheme for a MEMS rate integrating gyroscope

PhD ThesisMEMS gyroscopes are found across a large range of applications, from low precision low cost applications through to high budget projects that require almost perfect accuracy. MEMS gyroscopes fall into two categories – ‘rate’ and ‘rate integrating’, with the latter offering superior performance. The key advantage that the rate integrating type possesses is that it directly measures angle, eliminating the need for any integration step. This reduces the potential for errors, particularly at high rates. However, the manufacturing precision required is far tighter than that of the rate gyroscope, and this has thus far limited the development of rate integrating gyroscopes. This thesis proposes a method for reducing the effect of structural imperfections on the performance of a rate integrating gyroscope. By taking a conventional rate gyroscope and adjusting its control scheme to operate in rate integrating mode, the thesis shows that it is possible to artificially eliminate the effect of some structural imperfections on the accuracy of angular measurement through the combined use of electrostatic tuning and capacitive forcing. Further, it demonstrates that it is viable to base the designs for rate integrating gyroscopes on existing rate gyroscope architectures, albeit with some modifications. Initially, the control scheme is derived through the method of multiple scales and its potential efficacy demonstrated through computational modelling using Simulink. The control scheme is then implemented onto an existing rate gyroscope architecture, with a series of tests conducted that benchmark the gyroscope performance in comparison to standard performance measures. Experimental work demonstrates the angle measurement capability of the rate integrating control scheme, with the gyroscope shown to be able to measure angle, although not to the precision necessary for commercial implementation. However, the scheme is shown to be viable with some modifications to the gyroscope architecture, and initial tests on an alternative architecture based on these results are presented.United Technologies and System