Ion beam sputter etching

An ion beam etching process which forms extremely high aspect ratio surface microstructures using thin sputter masks is utilized in the fabrication of integrated circuits. A carbon rich sputter mask together with unmasked portions of a substrate is bombarded with inert gas ions while simultaneous carbon deposition occurs. The arrival of the carbon deposit is adjusted to enable the sputter mask to have a near zero or even slightly positive increase in thickness with time while the unmasked portions have a high net sputter etch rate

Undercutting of defects in thin film protective coatings on polymer surfaces exposed to atomic oxygen

Protection for polymeric surfaces is needed to make them durable in the low Earth orbital environment, where oxidation by atomic oxygen is the predominant failure mechanism. Thin film coatings of oxides such as silicon dioxide are viable candidates to provide this protection, but concern has been voiced over the ability of these coatings to protect when defects are present in the coating due to surface anomalies occurring during the deposition process, handling, or micrometeoroid and debris bombardment in low Earth orbit. When a defected coating protecting a polymer substrate is exposed to atomic oxygen, the defect provides a pathway to the underlying polymer allowing oxidation and subsequent undercutting to occur. Defect undercutting was studied for sputter deposited coatings of silicon dioxide on polyimide Kapton. Preliminary results indicate that undercutting may be limited as long as the coating remains intact with the substrate. Therefore, coatings may not need to be defect free to give protection to the underlying surface

Atomic Oxygen Cleaning Shown to Remove Organic Contaminants at Atmospheric Pressure

The NASA Lewis Research Center has developed and filed for a patent on a method to produce atomic oxygen at atmospheric pressure by using a direct current arc in a gas flow mixture of oxygen and helium. A prototype device has been tested for its ability to remove various soot residues from surfaces exposed to fire, and various varnishes such as acrylic and egg white

The effects of atomic oxygen on the thermal emittance of high temperature radiator surfaces

Radiator surfaces on high temperature space power systems such as SP-100 space nuclear power system must maintain a high emittance level in order to reject waste heat effectively. One of the primary materials under consideration for the radiators is carbon-carbon composite. Since carbon is susceptible to attack by atomic oxygen in the low earth orbital environment, it is important to determine the durability of carbon composites in this environment as well as the effect atomic oxygen has on the thermal emittance of the surface if it is to be considered for use as a radiator. Results indicate that the thermal emittance of carbon-carbon composite (as low as 0.42) can be enhanced by exposure to a directed beam of atomic oxygen to levels above 0.85 at 800 K. This emittance enhancement is due to a change in the surface morphology as a result of oxidation. High aspect ratio cones are formed on the surface which allow more efficient trapping of incident radiation. Erosion of the surface due to oxidation is similar to that for carbon, so that at altitudes less than approximately 600 km, thickness loss of the radiator could be significant (as much as 0.1 cm/year). A protective coating or oxidation barrier forming additive may be needed to prevent atomic oxygen attack after the initial high emittance surface is formed. Textured surfaces can be formed in ground based facilities or possibly in space if emittance is not sensitive to the orientation of the atomic oxygen arrival that forms the texture

The effect of atomic oxygen on polysiloxane-polyimide for spacecraft applications in low Earth orbit

Polysiloxane-polyimide films are of interest as a replacement for polyimide Kapton in the Space Station Freedom solar array blanket. The blanket provides the structural support for the solar cells as well as providing transport of heat away from the back of the cells. Polyimide Kapton would be an ideal material to use; however, its high rate of degradation due to attack by atomic oxygen in low Earth orbit, at the altitudes Space Station Freedom will fly, is of such magnitude that if left unprotected, the blanket will undergo structural failure in much less than the desired 15 year operating life. Polysiloxane-polyimide is of interest as a replacement material because it should from its own protective silicon dioxide coating upon exposure to atomic oxygen. Mass, optical, and photomicrographic data obtained in the evaluation of the durability of polysiloxane-polyimide to an atomic oxygen environment are presented

The NASA atomic oxygen effects test program

The NASA Atomic Oxygen Effects Test Program was established to compare the low earth orbital simulation characteristics of existing atomic oxygen test facilities and utilize the collective data from a multitude of simulation facilities to promote understanding of mechanisms and erosion yield dependence upon energy, flux, metastables, charge, and environmental species. Four materials chosen for this evaluation include Kapton HN polyimide, FEP Teflon, polyethylene, and graphite single crystals. The conditions and results of atomic oxygen exposure of these materials is reported by the participating organizations and then assembled to identify degrees of dependency of erosion yields that may not be observable from any single atomic oxygen low earth orbital simulation facility. To date, the program includes 30 test facilities. Characteristics of the participating test facilities and results to date are reported

Thermal emittance enhancement of graphite-copper composites for high temperature space based radiators

Graphite-copper composites are candidate materials for space based radiators. The thermal emittance of this material, however, is a factor of two lower than the desired emittance for these systems of greater than or equal to 0.85. Arc texturing was investigated as a surface modification technique for enhancing the emittance of the composite. Since the outer surface of the composite is copper, and samples of the composite could not be readily obtained for testing, copper was used for optimization testing. Samples were exposed to various frequencies and currents of arcs during texturing. Emittances near the desired goal were achieved at frequencies less than 500 Hz. Arc current did not appear to play a major role under 15 amps. Particulate carbon was observed on the surface, and was easily removed by vibration and handling. In order to determine morphology adherence, ultrasonic cleaning was used to remove the loosely adherent material. This reduced the emittance significantly. Emittance was found to increase with increasing frequency for the cleaned samples up to 500 Hz. The highest emittance achieved on these samples over the temperature range of interest was 0.5 to 0.6, which is approximately a factor of 25 increase over the untextured copper emittance

Retrieval of Mir Solar Array

A Russian solar array panel removed in November 1997 from the non-articulating photovoltaic array on the Mir core module was returned to Earth on STS-89 in January 1998. The panel had been exposed to low Earth orbit (LEO) for 10 years prior to retrieval. The retrieval provided a unique opportunity to study the effects of the LEO environment on a functional solar array. To take advantage of this opportunity, a team composed of members from RSC-Energia (Russia), the Boeing Company, and the following NASA Centers--Johnson Space Center, Kennedy Space Center, Langley Research Center, Marshall Space Flight Center, and Lewis Research Center--was put together to analyze the array. After post-retrieval inspections at the Spacehab Facility at Kennedy in Florida, the array was shipped to Lewis in Cleveland for electrical performance tests, closeup photodocumentation, and removal of selected solar cells and blanket material. With approval from RSC-Energia, five cell pairs and their accompanying blanket and mesh material, and samples of painted handrail materials were selected for removal on the basis of their ability to provide degradation information. Sites were selected that provided different sizes and shapes of micrometeoroid impacts and different levels of surface contamination. These materials were then distributed among the team for round robin testing

Method and apparatus for producing a thermal atomic oxygen beam

Atomic oxygen atoms are routed to a material through a sufficiently tortuous path so that vacuum ultraviolet radiation is obstructed from arriving at the surface of the material. However, the material surface continues to be exposed to the atomic oxygen

Atomic oxygen protective coating with resistance to undercutting at defect sites

Structures composed at least partially of an organic substrate may be protected from oxidation by applying a catalyst onto said substrate for promoting the combination of atomic oxygen to molecular oxygen. The structure may also be protected by applying both a catalyst and an atomic oxygen shielding layer onto the substrate. The structures to be protected include spacecraft surfaces