Les couches minces optiques : entre recherche appliquée et révolution industrielle

International audienc

Two channel multilayer mirrors for astrophysics

International audienceA two-channel mirror reflecting both Fe-IX/X (λ = 17.1 nm) and He-II (30.4 nm) resonance lines at near normal incidence has been designed, fabricated and characterized. These two passbands are often chosen in space instruments designed for the observation of the solar corona. The mirror structure used for optimization is a superposition of two periodic multilayers with three components per period. It has been designed by using optimization software with an appropriate merit function. The theoretical reflectivity for both resonance lines can reach 0.25. It is shown that, by using a set of filters, one can select either the Fe-IX/X or the He-II channel. The spectral response of the two-channel mirror has been measured on synchrotron radiation source on a large wavelength range, from 12 nm to 35 nm. Experimental reflectivity reaches 0.32 for the Fe-IX/X line and 0.19 for the He-II line

Study of normal incidence three component multilayer mirrors in the range 20 nm - 40 nm

International audienceWe study theoretically and experimentally the increase of normal incidence reflectivity generated by addition of a third material in the period of a standard periodic multilayer, for wavelengths in the range 20 to 40 nm. The nature and thickness of the three materials has been optimized to provide the best enhancement of reflectivity. Theoretical reflectivity of an optimized B4C/Mo/Si multilayer reaches 42% at 32 nm. B4C/Mo/Si multilayers have been deposited with a magnetron sputtering system and a reflectivity of 34% at 32 nm has been measured on a synchrotron radiation source

Improved spectral purity of EUV multilayer mirrors with optimized SiO2 top layer

International audienc

Recent results in solar imaging using ion beam sputtered multilayers

PosterInternational audienc

Development of Al-based multilayer optics for EUV

International audienceWe report on the development of multilayer optics for the extreme ultra-violet (EUV) range. The optical performance of Al-based multilayer mirrors is discussed with regard to promising reflectivity and selectivity characteristics and the problems of the interfacial roughness for this type of multilayers. We demonstrate a possibility to reduce the average roughness by introducing additional metal layer (W or Mo) rather than depositing a buffer layer at each interface. We have prepared and tested Al/SiC, Al/W/SiC and Al/Mo/SiC multilayers of various periods for the spectral range from 15 to 40 nm, which is the range of increasing interest for high-order harmonic generation, synchrotron radiation and astrophysics. The structure of the three-component systems has been optimized in order to obtain the best reflectivity for each wavelength within the spectral range. We have shown that introduction of refractory metal in Al-based periodic stack can improve the optical performance of multilayer reflecting coatings designed for the EUV applications

Two channel EUV mirror for solar missions: design, performances and stability

PosterInternational audienc