Comparison of fast 3D simulation and actinic inspection for EUV masks with buried defects

ABSTRACT Aerial images for isolated defects and the interactions of defects with features are compared between the Actinic Inspection Tool (AIT) at Lawrence Berkeley National Laboratory (LBNL) and the fast EUV simulation program RADICAL. Comparisons between AIT images from August 2007 and RADICAL simulations are used to extract aberrations. At this time astigmatism was the dominant aberration with a value of 0.55 waves RMS. Significant improvements in the imaging performance of the AIT were made between August 2007 and December 2008. A good match will be shown between the most recent AIT images and RADICAL simulations without aberrations. These comparisons will demonstrate that a large defect, in this case 7nm tall on the surface, is still printable even if it is centered under the absorber line. These comparisons also suggest that the minimum defect size is between 1.5nm and 0.8nm surface height because a 1.5nm defect was printable but a 0.8nm was not. Finally, the image of a buried defect near an absorber line through focus will demonstrate an inversion in the effect of the defect from a protrusion of the dark line into the space to a protrusion of the space into the line

On-sky results for the integrated microlens ring tip-tilt sensor

We present the first on-sky results of the microlens ring tip-tilt sensor. This sensor uses a 3D printed microlens ring feeding six multimode fibers to sense misaligned light, allowing centroid reconstruction. A tip-tilt mirror allows the beam to be corrected, increasing the amount of light coupled into a centrally positioned single-mode (science) fiber. The sensor was tested with the iLocater acquisition camera at the Large Binocular Telescope in Tucson, Arizona, in November 2019. The limit on the maximum achieved rms reconstruction accuracy was found to be 0.19/D in both tip and tilt, of which approximately 50% of the power originates at frequencies below 10 Hz. We show the reconstruction accuracy is highly dependent on the estimated Strehl ratio and simulations support the assumption that residual adaptive optics aberrations are the main limit to the reconstruction accuracy. We conclude that this sensor is ideally suited to remove post-adaptive optics noncommon path tip-tilt residuals. We discuss the next steps for concept development, including optimization of the lens and the fiber, tuning of the correction algorithm, and selection of optimal science cases

Superheated steam

Thesis (M.E.)--University of Illinois, 1899.Ms.Includes bibliographical references (leaf 159).Ope

Interaction of Modulated Electron Beams With Open Periodic Structures

160 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1966.U of I OnlyRestricted to the U of I community idenfinitely during batch ingest of legacy ETD

The steam engine shaft governor

Thesis (BS)--University of Illinois, 1898M