64 research outputs found
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Studying resist stochastics with the multivariate poisson propagation model
Progress in the ultimate performance of extreme ultraviolet resist has arguably decelerated in recent years suggesting an approach to stochastic limits both in photon counts and material parameters. Here we report on the performance of a variety of leading extreme ultraviolet resist both with and without chemical amplification. The measured performance is compared to stochastic modeling results using the Multivariate Poisson Propagation Model. The results show that the best materials are indeed nearing modeled performance limits
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Comparison of fast 3D simulation and actinic inspection for EUV masks with buries defects
Aerial images for isolated defects and the interactions of defects with features are compared between the Actinic Inspection Tool (AIT) at Lawrence Berkeley National Laboratory (LBNL) and the fast EUV simulation program RADICAL. Comparisons between AIT images from August 2007 and RADICAL simulations are used to extract aberrations. At this time astigmatism was the dominant aberration with a value of 0.55 waves RMS. Significant improvements in the imaging performance of the AIT were made between August 2007 and December 2008. A good match will be shown between the most recent AIT images and RADICAL simulations without aberrations. These comparisons will demonstrate that a large defect, in this case 7nm tall on the surface, is still printable even if it is centered under the absorber line. These comparisons also suggest that the minimum defect size is between 1.5nm and 0.8nm surface height because a 1.5nm defect was printable but a 0.8nm was not. Finally, the image of a buried defect near an absorber line through focus will demonstrate an inversion in the effect of the defect from a protrusion of the dark line into the space to a protrusion of the space into the line
Comparison of fast 3D simulation and actinic inspection for EUV masks with buried defects
ABSTRACT Aerial images for isolated defects and the interactions of defects with features are compared between the Actinic Inspection Tool (AIT) at Lawrence Berkeley National Laboratory (LBNL) and the fast EUV simulation program RADICAL. Comparisons between AIT images from August 2007 and RADICAL simulations are used to extract aberrations. At this time astigmatism was the dominant aberration with a value of 0.55 waves RMS. Significant improvements in the imaging performance of the AIT were made between August 2007 and December 2008. A good match will be shown between the most recent AIT images and RADICAL simulations without aberrations. These comparisons will demonstrate that a large defect, in this case 7nm tall on the surface, is still printable even if it is centered under the absorber line. These comparisons also suggest that the minimum defect size is between 1.5nm and 0.8nm surface height because a 1.5nm defect was printable but a 0.8nm was not. Finally, the image of a buried defect near an absorber line through focus will demonstrate an inversion in the effect of the defect from a protrusion of the dark line into the space to a protrusion of the space into the line
High contrast imaging with ELT/METIS: The wind driven halo, from SPHERE to METIS
International audienceMETIS is one of the three first-light instruments planned for the ELT, mainly dedicated to high contrast imaging in the mid-infrared. On the SPHERE high-contrast instrument currently installed at the VLT, we observe that one of the main contrast limitations is the wind driven halo, due to the limited AO running speed with respect to the atmospheric turbulence temporal evolution. From this observation, we extrapolate this signature to the ELT/METIS instrument, which is equipped with a single conjugated adaptive optics system and with several coronagraphic devices. By making use of an analytic AO simulator, we compare the amount of wind driven halo observed with SPHERE and with METIS, under the same turbulence conditions
The X-ray Properties of Moderate-redshift Galaxy Groups Selected by Association with Gravitational Lenses
We present results from a systematic investigation of the X-ray properties of
a sample of moderate redshift (0.3<z<0.6) galaxy groups. These groups were
selected not by traditional X-ray or optical search methods, but rather by an
association, either physical or along the line of sight, with a strong
gravitational lens. We calculate the properties of seven galaxy groups in the
fields of six lens systems. Diffuse X-ray emission from the intragroup medium
is detected in four of the groups. All of the detected groups have X-ray
luminosities greater than 10^{42} h^{-2} erg/s, and lie on the L_X-sigma_v
relations defined by local groups and clusters. The upper limits for the
non-detections are also consistent with the local L_X-sigma_v relationships.
Although the sample size is small and deeper optical and X-ray data are needed,
these results suggest that lens-selected groups are similar to X-ray selected
samples and, thus, are more massive than the typical poor-group environments of
local galaxies.Comment: Accepted for publication in ApJ (July 10, 2008 issue). New smoothing
technique reveals that one system (B2108) has a multiple-peak brightness
distribution. Changed discussion and figures accordingly. Corrected some
values in Table
"Don't try to teach me, I got nothing to learn": Management students' perceptions of business ethics teaching
[EN] Interest is growing towards including business ethics in university curricula, aiming at improving ethical behaviour of future managers. Extant literature has investigated the impact of ethics education on different ethics-related students' cognitive and/or behavioural outcomes, considering variables related to training programmes and students' demographic aspects. Accordingly, we aim at assessing students' understanding of business ethics issues, by focusing on the differences in students' perceptions depending on gender, age, work experience, and ethics courses taken. Testing our hypotheses on a sample of 307 management students at a Polish university, and controlling for social desirability bias, we obtained mixed and partially surprising results. We found significant differences in students' understanding of business ethics depending on their gender and age (female and older students showed more ethical inclinations), but not depending on having taken ethics courses-actually perceptions of such courses worsened after taking them. Besides, work experience was not a significant variable. Moreover, course exposure intensiveness (i.e., number of ethics courses completed), and time passed since completion of the latest course, did not confirm hypothesized effects on most of the dependent (sub)variables. These findings stimulate further questions and challenges for future research (e.g., around course design and methodology, and social/cultural/contextual issues).Tormo-Carbó, G.; Oltra, V.; Klimkiewicz, K.; Seguí-Mas, E. (2019). "Don't try to teach me, I got nothing to learn": Management students' perceptions of business ethics teaching. 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An innovative integral field unit upgrade with 3D-printed micro-lenses for the RHEA at Subaru
In the new era of Extremely Large Telescopes (ELTs) currently under construction, challenging requirements drive spectrograph designs towards techniques that efficiently use a facility's light collection power. Operating in the single-mode (SM) regime, close to the diffraction limit, reduces the footprint of the instrument compared to a conventional high-resolving power spectrograph. The custom built injection fiber system with 3D-printed micro-lenses on top of it for the replicable high-resolution exoplanet and asteroseismology spectrograph at Subaru in combination with extreme adaptive optics of SCExAO, proved its high efficiency in a lab environment, manifesting up to ~77% of the theoretical predicted performance
Single conjugate adaptive optics for METIS
METIS, the Mid-infrared Imager and Spectrograph for the Extremely Large Telescope (ELT), is currently under development and has conducted the Preliminary Design Review in spring of 2019. An integral part of METIS is its Single Conjugate Adaptive Optics (SCAO) system, which will provide the required wavefront correction in conjunction with the adaptive mirrors in the telescope domain. It is optimized for the unique observing capabilities of METIS - especially for high contrast imaging in the mid-infrared. The coronagraphic observing modes impose a number of challenging requirements for adaptive and active beam correction. METIS SCAO is tasked to support all observing modes with AO wavefront correction, but also with differential tip/tilt-, NCPA-, and pupil position control. The SCAO Module is located inside the cryogenic environment of METIS and hosts a pyramid type wavefront sensor, operating in the near-infrared. The wavefront control loop, as well as a number of secondary control tasks, will be realized within the SCAO Control System. This paper outlines on the PDR design of METIS SCAO. © 2019 AO4ELT 2019 - Proceedings 6th Adaptive Optics for Extremely Large Telescopes. All rights reserved
Association of Common Polymorphisms in GLUT9 Gene with Gout but Not with Coronary Artery Disease in a Large Case-Control Study
BACKGROUND: Serum uric acid (UA) levels have recently been shown to be genetically influenced by common polymorphisms in the GLUT9 gene in two genome-wide association analyses of Italian and British populations. Elevated serum UA levels are often found in conjunction with the metabolic syndrome. Hyperuricemia is the major risk factor for gout and has been associated with increased cardiovascular morbidity and mortality. The aim of the present study was to further elucidate the association of polymorphisms in GLUT9 with gout and coronary artery disease (CAD) or myocardial infarction (MI). To test our hypotheses, we performed two large case-control association analyses of individuals from the German MI Family Study. METHODS AND FINDINGS: First, 665 patients with gout and 665 healthy controls, which were carefully matched for age and gender, were genotyped for four single nucleotide polymorphisms (SNPs) within or near the GLUT9 gene. All four SNPs demonstrated highly significant association with gout. SNP rs6855911, located within intron 7 of GLUT9, showed the strongest signal with a protective effect of the minor allele with an allelic odds ratio of 0.62 (95% confidence interval 0.52-0.75; p = 3.2*10(-7)). Importantly, this finding was not influenced by adjustment for components of the metabolic syndrome or intake of diuretics. Secondly, 1,473 cases with severe CAD or MI and 1,241 healthy controls were tested for the same four GLUT9 SNPs. The analyses revealed, however, no significant association with CAD or with MI. Additional screening of genome-wide association data sets showed no signal for CAD or MI within the GLUT9 gene region. CONCLUSION: Thus, our results provide compelling evidence that common genetic variations within the GLUT9 gene strongly influence the risk for gout but are unlikely to have a major effect on CAD or MI in a German population
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