Strukturierung von Silizium mit Trockenaetzverfahren

Phase Shift Masks (PSMs) allow to extend the optical lithography to the deep submicrometer range. A described technology for dry etching of quartz for the fabrication of PSMs comprises reactive ion etching with CF_4/SF_6+O_2 chemistry and a chromium and/or resist/chromium mask. The chromium layer serves two purposes: (i) it defines the structures with high resolution and low edge roughness, and (ii) it is used as an attenuating layer for rim-type PSM after wet etching or as a phase shifter in combination with the residual resist layer. The high resist selectivity required for dry etching of both chromium and quartz in one step is guaranteed using newly developed CARs, Novolak-based AZ PF514, AZ PN114 and non-Novolak-based CAMP6. MEMs fabrication offer the potential to manufacture microengines, micro-turbines, micro-sensors, micro-actuators, and electronic circuits onto a single silicon chip. Adjusting and mounting of micromechanical parts can be done by using a sacrificial SiN_xO_y-layer. (WEN)SIGLEAvailable from TIB Hannover: F97B205+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman

Grundlagen und Untersuchung eines hochaufloesenden optischen Nahfeldmikroskops am Beispiel der Charakterisierung optischer Eigenschaften duenner Schichten Abschlussbericht

Available from TIB Hannover: F97B1523+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman

Down Stream PE-MOCVD: Physikalisch-Technische Grundlagen der Abscheidung von metallischen und dielektrischen Schichten im Down Stream Plasma

Available from TIB Hannover: F93B457+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman

Entwicklung piezoresistiver RKM-Cantilever fuer die in situ Charakterisierung von extraterrestrischen Staubpartikeln Abschlussbericht

Due to the short term of the project, only the principal technological processes for a scanning force microscope (SFM) cantilever with integrated deflection sensor could be developed. Thus, the prototype of a piezoresistive SFM cantilever, with tip glued onto the very end of the bending beam, was fabricated with the methods of silicon micro-structuring. Such cantilevers were sent to the partners in Austria (IWF, Graz) and The Netherlands (ESTEC, Nordwijk). From different test measurements special requirements concerning resonance frequency, offset bias and sensitivity of the cantilevers appear in outlines. Cantilevers with special desired facilities should be realized within the scope of a following/corresponding project (Reference No. 01 QP 97058). (orig.)SIGLEAvailable from TIB Hannover: DtF QN1(66,30) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany); Deutsche Agentur fuer Raumfahrtangelegenheiten (DARA) GmbH, Bonn (Germany)DEGerman

Untersuchung von neuartigen optischen Sonden fuer die SNOM/SNIM und integrierten Sensoren fuer die RKM Abschlussbericht

Available from TIB Hannover: F01B1388 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung und Forschung, Berlin (Germany)DEGerman

Nahfeldcharakterisierung von Nahfeldsonden Abschlussbericht

SIGLEAvailable from TIB Hannover: F04B340 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung und Forschung, Berlin (Germany)DEGerman

Theory of dressed bosons and nuclear matter distributions

The structure of nuclei with large neutron or proton-neutron excess, i.e., with large isospin components, is investigated in the Boson Dynamic Correlation Model where the valence particle pairs are dressed by their interactions with the microscopic clusters of the core. The mixed-mode states of the model are the eigenstates of a set of nonlinear equations. We solve these equations in terms of the cluster factorizations that are introduced to compute the n-boson matrix elements. Our calculation of the energy levels of "1"8O reveals a strong mixing between the valence and core clusters which leads to a large reduction of the spectroscopic factors as calculated in Shell-Model approximations. The coupling of valence- to core-clusters gives a new insight into the halo formation in neutron-rich nuclei, namely, the halo is also a consequence of the excitation of the core protons. The calculated matter distributions of "6He and "6Li exhibit strong similarities, which indicate that halo formation in nuclei with proton-neutron excess must be postulated. The matter distributions of these two isotopes reproduce well the differential cross sections obtained in the proton elastic scattering experiments performed at GSI in inverse kinematics at an energy of 0.7 GeV/u. (orig.)Available from TIB Hannover: RO 801(02-28) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman

Integration des magnetoresistiven Prinzips in optimierte Mikrosysteme und Applikationsgrundlagen fuer die Strom- und Laengenmessung IMOMAG. T. 2 Magnetoresistive Sensoren 3: Grundlagen, Herstellung, Anwendung. Abschlussbericht

Available from TIB Hannover: F95B2144+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Forschung und Technologie (BMFT), Bonn (Germany)DEGerman