Entwicklung piezoresistiver RKM-Cantilever fuer die in situ Charakterisierung von extraterrestrischen Staubpartikeln Abschlussbericht

Abstract

Due to the short term of the project, only the principal technological processes for a scanning force microscope (SFM) cantilever with integrated deflection sensor could be developed. Thus, the prototype of a piezoresistive SFM cantilever, with tip glued onto the very end of the bending beam, was fabricated with the methods of silicon micro-structuring. Such cantilevers were sent to the partners in Austria (IWF, Graz) and The Netherlands (ESTEC, Nordwijk). From different test measurements special requirements concerning resonance frequency, offset bias and sensitivity of the cantilevers appear in outlines. Cantilevers with special desired facilities should be realized within the scope of a following/corresponding project (Reference No. 01 QP 97058). (orig.)SIGLEAvailable from TIB Hannover: DtF QN1(66,30) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany); Deutsche Agentur fuer Raumfahrtangelegenheiten (DARA) GmbH, Bonn (Germany)DEGerman