25 research outputs found

    Wavelet-Based Artifact Identification and Separation Technique for EEG Signals during Galvanic Vestibular Stimulation

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    We present a new method for removing artifacts in electroencephalography (EEG) records during Galvanic Vestibular Stimulation (GVS). The main challenge in exploiting GVS is to understand how the stimulus acts as an input to brain. We used EEG to monitor the brain and elicit the GVS reflexes. However, GVS current distribution throughout the scalp generates an artifact on EEG signals. We need to eliminate this artifact to be able to analyze the EEG signals during GVS. We propose a novel method to estimate the contribution of the GVS current in the EEG signals at each electrode by combining time-series regression methods with wavelet decomposition methods. We use wavelet transform to project the recorded EEG signal into various frequency bands and then estimate the GVS current distribution in each frequency band. The proposed method was optimized using simulated signals, and its performance was compared to well-accepted artifact removal methods such as ICA-based methods and adaptive filters. The results show that the proposed method has better performance in removing GVS artifacts, compared to the others. Using the proposed method, a higher signal to artifact ratio of −1.625 dB was achieved, which outperformed other methods such as ICA-based methods, regression methods, and adaptive filters

    Noise Analysis and Noise-based Optimization for Resonant MEMS Structures

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    This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The existing literature presents detailed models for the damping at microscale, but usually neglects them in the noise analysis process, assuming instead a white spectrum approximation for the mechano-thermal noise. The present work extends the implications of the complex gas-solid interaction into the field of noise analysis for mechanical sensors, and provides a semi-automatic procedure for behavioral macromodel extraction and sensor optimization with respect to signal-to-noise ratio.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

    MOLDED BIOCOMPATIBLE AND DISPOSABLE PDMS/SU-8 INKJET DISPENSER

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    ABSTRACT This paper reports on the design, fabrication and demonstration of a polydimethylsiloxane (PDMS)/SU-8 inkjet dispenser with the following novel features: (1) the use of low-cost fabrication process and bio-compatible materials, (2) the use of hydrophobic SU-8 micro-nozzles to limit satellite droplet formation, (3) a modular device design that allows for the reuse of the external actuator, (4) the capability of printing hydrogel constructs, (5) a limited cross-contamination risk as the device is disposable, (6) and the potential for integration with other PDMS microfluidic systems. The device successfully dispenses droplets with diameters ranging from 80-130µm at rates of 2-1000 droplets/second. KEYWORDS: Inkjet printing, Polydimethylsiloxane, SU-8, Disposable INTRODUCTION The formation of microfluidic systems out of polydimethylsiloxane (PDMS) is a well-established and widely used technology that easily allows for the integration of different flow control components, such as mixers, pumps, and valves In this paper, we present a biocompatible and disposable inkjet dispenser, with a modular design, made from PDMS and a photo-curable polymer, SU-8. Our design enables easy integration with other PDMS-based microfluidic systems fabricated using soft-lithography

    Inline Monitoring of continous Ultrasonic Welding Processes of Thermoplastic Composites via a custom polyCMUT based Ultrasound Array

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    Ultrasonic welding (UW) of thermoplastic composites (TCs) is an emerging technology in the field of composite joining techniques in the aerospace sector. Through a mechanical oscillator, ultrasound at a frequency of 20kHz is induced into the material via a welding horn, where microscopic friction and damping effects melt the thermoplastic. Under further pressure the weld area cools down, permanently joining both parts together. Like all joining processes in the aerospace industry the resulting joints need to be tested for their quality and structural integrity. The traditional testing method using water-coupled ultrasound includes extra steps. This process could be considerably improved by assessing the quality of the weld directly after or even during the welding process, allowing for immediate rework or discard of the parts in question. Ultrasound is still the best solution for this quality assessment, being inexpensive, well understood, and able to create B-Mode images, allowing a look into the cross-section of the weld. However, there are several major problems: To increase the system complexity as little as possible it is necessary to attach the ultrasound unit next to the welding equipment, and as close to the welding horn and compactor as possible to save space and keep the end- effector manoeuvrable. This brings problems for classic piezoelectric ultrasonic arrays: The low welding frequency and its resonance modes reach into the lower resonance modes of the piezoelectric sensors leading to immense noise, hiding any potential echo from the welding zone. Classic piezoelectric crystals are also very brittle and can suffer damage from sustained exposure to this violent environment. The authors present a novel solution: a custom-made polymer-based capacitive micromachined ultrasonic transducer array (polyCMUT). polyCMUTs are tiny drums with two electrodes. One on the bottom and the other suspended over a cavity sandwiched between two layers of polymers. By applying a DC-bias an electrical field is created and the membrane is set under tension. If then an AC voltage is applied, the strength of the electric field decreases, allowing the membrane to snap back into its original position. If done at the resonance frequency of the membrane, a strong ultrasonic signal is created. To receive this signal the polyCMUT is charged with a DC-bias, allowing it to receive the echo of the transmitted signal by measuring the changing capacitance. Not only is the polymer robust and inexpensive to fabricate, the general architecture of CMUTs also allows a design where the first mode of resonance is the actual mode the CMUT is operating in. By designing for a resonance frequency over 5 MHz all noise from the initial welding process is ignored, leading to a working pulse echo imaging system. The array is then mounted onto a PEEK block attached to the compactor unit of the welding end-effector. This publication is intended to present initial results, the design process of the custom array and the tests leading there

    Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics

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    A test technique for capacitive MEMSaccelerometers and electrostatic micro-actuators based onthe measurement of pull-in voltages is described. Acombination of pull-in voltages and resonance frequencymeasurements can be used for the estimation of processinducedvariations in device dimensions from layout anddeviations in material properties from nominal value,which enables auto-calibration. Preliminary measurementson fabricated devices confirm the validity of the proposedtechnique. Moreover, long-term pull-in measurements haveindicated the suitability of the approach as in-systemdiagnostic tool

    Auto-calibrated capacitive MEMS accelerometer

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    An electronic calibration technique forcapacitive MEMS accelerometers based on themeasurement of pull-in voltages is described. Acombination of pull-in voltages and resonance frequencymeasurements can be used for the estimation of processinducedvariations in device dimensions from layout anddeviations in material properties from nominal value,which enables auto-calibration. Measurements onfabricated devices confirm the validity of the proposedtechnique and electronic calibration is experimentallydemonstrated

    Polymeric piezoelectric accelerometers with high sensitivity, broad bandwidth, and low noise density for organic electronics and wearable microsystems

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    Abstract Piezoelectric accelerometers excel in vibration sensing. In the emerging trend of fully organic electronic microsystems, polymeric piezoelectric accelerometers can be used as vital front-end components to capture dynamic signals, such as vocal vibrations in wearable speaking assistants for those with speaking difficulties. However, high-performance polymeric piezoelectric accelerometers suitable for such applications are rare. Piezoelectric organic compounds such as PVDF have inferior properties to their inorganic counterparts such as PZT. Consequently, most existing polymeric piezoelectric accelerometers have very unbalanced performance metrics. They often sacrifice resonance frequency and bandwidth for a flat-band sensitivity comparable to those of PZT-based accelerometers, leading to increased noise density and limited application potentials. In this study, a new polymeric piezoelectric accelerometer design to overcome the material limitations of PVDF is introduced. This new design aims to simultaneously achieve high sensitivity, broad bandwidth, and low noise. Five samples were manufactured and characterized, demonstrating an average sensitivity of 29.45 pC/g within a ± 10 g input range, a 5% flat band of 160 Hz, and an in-band noise density of 1.4 µg/ Hz\sqrt{{Hz}} Hz . These results surpass those of many PZT-based piezoelectric accelerometers, showing the feasibility of achieving comprehensively high performance in polymeric piezoelectric accelerometers to increase their potential in novel applications such as organic microsystems

    A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

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    In this paper, a simple fabrication process for SU-8 in-plane micro electro-mechanical systems (MEMS) structures, called “border-bulk micromachining”, is introduced. It aims to enhance the potential of SU-8 MEMS structures for applications such as low-cost/disposable microsystems and wearable MEMS. The fabrication process is robust and uses only four processing steps to fabricate SU-8 in-plane MEMS structures, simplifying the fabrication flow in comparison with other reported attempts. The whole fabrication process has been implemented on copper-polyimide composites. A new processing method enables the direct, laser-based micromachining of polyimide in a practical way, bringing in extra processing safety and simplicity. After forming the polymeric in-plane MEMS structures through SU-8 lithography, a copper wet etching masked by the SU-8 structure layers is carried out. After the wet etching, fabricated in-plane MEMS structures are suspended within an open window on the substrate, similar to the final status of in-plane MEMS devices made from industrial silicon micromachining methods (such as SOIMUMPS). The last step of the fabrication flow is a magnetron sputtering of aluminum. The border-bulk micromachining process has been experimentally evaluated through the fabrication and the characterization of simple in-plane electrically actuated MEMS test structures. The characterization results of these simple test structures have verified the following process qualities: controllability, reproducibility, predictability and general robustness.Applied Science, Faculty ofElectrical and Computer Engineering, Department ofReviewedFacult

    A Polymeric Piezoelectric Tactile Sensor Fabricated by 3D Printing and Laser Micromachining for Hardness Differentiation during Palpation

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    Tactile sensors are important bionic microelectromechanical systems that are used to implement an artificial sense of touch for medical electronics. Compared with the natural sense of touch, this artificial sense of touch provides more quantitative information, augmenting the objective aspects of several medical operations, such as palpation-based diagnosis. Tactile sensors can be effectively used for hardness differentiation during the palpation process. Since palpation requires direct physical contact with patients, medical safety concerns are alleviated if the sensors used can be made disposable. In this respect, the low-cost, rapid fabrication of tactile sensors based on polymers is a possible alternative. The present work uses the 3D printing of elastic resins and the laser micromachining of piezoelectric polymeric films to make a low-cost tactile sensor for hardness differentiation through palpation. The fabricated tactile sensor has a sensitivity of 1.52 V/mm to mechanical deformation at the vertical direction, a sensitivity of 11.72 mV/HA in sensing material hardness with a pressing depth of 500 µm for palpation, and a validated capability to detect rigid objects buried in a soft tissue phantom. Its performance is comparable with existing piezoelectric tactile sensors for similar applications. In addition, the tactile sensor has the additional advantage of providing a simpler microfabrication process
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