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2 research outputs found
Key low temperature processes for a silicon-based 3D sequential integration
Author
Andrieu François
Batude Perrine
+10 more
Brevard Laurent
Brunet Laurent
Calvacante Camila
Fenouillet-Beranger Claire
Gaillard Fréd
Garros Xavier
Gassilloud Remy
Lapras Valerie
Mota Frutuoso Tadeu
Ribotta Mickael
Publication venue
HAL CCSD
Publication date
12/06/2022
Field of study
No full text
International audienc
HAL-CEA
Key low temperature processes for a silicon-based 3D sequential integration
Author
Andrieu François
Batude Perrine
+10 more
Brevard Laurent
Brunet Laurent
Calvacante Camila
Fenouillet-Beranger Claire
Gaillard Fréd
Garros Xavier
Gassilloud Remy
Lapras Valerie
Mota Frutuoso Tadeu
Ribotta Mickael
Publication venue
HAL CCSD
Publication date
12/06/2022
Field of study
No full text
International audienc
HAL-CEA