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Key low temperature processes for a silicon-based 3D sequential integration
Authors
François Andrieu
Perrine Batude
+10 more
Laurent Brevard
Laurent Brunet
Camila Calvacante
Claire Fenouillet-Beranger
Fréd Gaillard
Xavier Garros
Remy Gassilloud
Valerie Lapras
Tadeu Mota Frutuoso
Mickael Ribotta
Publication date
12 June 2022
Publisher
HAL CCSD
Abstract
International audienc
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HAL-CEA
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oai:HAL:cea-03727300v1
Last time updated on 31/10/2022
