Research On The Extraction Of Optical Surface Morphology And The Effect Of Bonnet Polishing Paths On The Mid-frequency Error

抛光作为光学元件光整加工的最终加工工序，是获得高质量光学元件的关键所在。气囊抛光作为一种具有极大发展潜力的超精密抛光技术，具有材料去除特性稳定、接触面积大、吻合性好、抛光精度与效率高等优点。但是受到抛光气囊尺寸限制，也会产生小磨头抛光工具固有的波纹特征，即中频误差。中频误差的存在严重影响了光学系统的使用性能，因此对其相关技术进行研究已经刻不容缓。本文研究光学元件表面形貌特征的提取技术，在此基础上对常规抛光路径加工后光学元件的中频误差进行评价，围绕中频误差的产生机理，指出抛光路径规划是抑制中频误差的关键。提出合理的抛光路径规划策略，通过仿真研究及大量的抛光实验验证其可行性。论文的研究工作包括以下...Polishing is the key to obtaining high quality optical elements as the final processing step of optical finishing. Bonnet polishing is an ultra-precision machining technology which has great development potential. It has many advantages, such as stable material removal characteristics, large contact area, good anastomosis, high polishing precision, high efficiency and so on. However, limited by th...学位：工学硕士院系专业：物理与机电工程学院_机械制造及其自动化学号：1992012115273

Electrohydrodynamic printing for head with retractable needle

设计了一种新型的基于电液动力学的喷头,该喷头内含一个可伸缩的针尖。由这种喷头组成的喷印系统,在不同的条件下可以产生离散的点和珠状结构两种喷射模式。结果表明:溶液浓度是区分这两种喷射模式的关键因素。当喷射溶液的浓度比较低时,喷印系统喷射出离散的圆点;当较高时,喷射出珠状结构。其珠状结构中珠子的直径随着系统供液速率的增加而变大,随着PEO溶液浓度的提高和针尖频率的增加而减小。改变收集板的移动速度,可以改变喷射沉积物形态,且该系统的喷射频率与可伸缩针尖的运动频率之间有很好的线性相关性。A novel electrohydrodynamic printing system with a retractable needle was designed,by which both ejection modes of dots and bead-on-string structures can be produced.Experimental results show that solution concentration is the key element to define the ejection mode.Dots can be obtained for lower solution concentration,otherwise bead-on-string structures would be produced.the diameter of deposition dots increases with the increasing of supply rate,and decreases with the increasing of PEO solution concentration and the frequency increasing of needle.By changing the speed of collector,different morphologies of depositions can be obtained.In addition,the deposition frequency has a close relationship with the retractable frequency of needle.中央高校基本科研业务费专项资金(2010121039);国家自然科学基金(51035002;50875222

Research on influences of removal rate for optical component in bonnet polishing

基于PrESTOn方程分析了气囊抛光特性,确定去除函数的三个重要特征,即抛光斑尺寸、形状以及去除量,得到影响光学元件气囊抛光材料去除效率的主要参数.通过定点抛光实验,分析气囊充气压强、压缩量、主轴转速对bk7光学元件去除函数和材料去除效率的影响.结果表明:充气压强与压缩量对于气囊抛光去除函数的形状影响较大,去除效率随气囊充气压强增大先升高到2.08MM3/MIn后逐渐降低然后又升高,压缩量与气囊转速的提高增大了材料的去除效率,分别可以达到6.84MM3/MIn和5.04MM3/MIn.Characteristics of bonnet polishing were analyzed based on Preston equation.Characteristics of the remove function were determined by spot size,shape,and amount of removal,which affected optical component bonnet polishing material removal rate.And through the fixed-point polishing experiments on BK7 optical component,the influences on removal function and material removal rate under bonnet pressure,amount of press and spindle speed were analyzed.The results show that the bonnet pressure and amount of press have a great influence on the shape of the bonnet polishing influence function,and the removal rate curve increases with the bonnet pressure presents a trend of increases 2.08mm3/min at high and then decreases and iuncreases again.With the increase of amount of press and spindle speed,the removal rate curves are raised to 6.84 and 5.04mm3/min.国家自然科学基金资助项目(51275433); 国家科技重大专项资助项目(2013ZX04006011-206); 中国工程物理研究院超精密加工技术重点实验室开放基金资助项目(KF13011

The Effect of Polishing Paths on the Mid-frequency Error of Optical Components

为了寻找消除中频误差的有效抛光路径,进行了2组实验.第1组实验采用单步进动z字光栅路径和单步进动螺旋线路径对石英玻璃进行全面均匀的气囊抛光实验,并对加工后得到试件表面的中频误差进行分析.第2组实验先采用单步进动z字光栅路径对石英玻璃进行全面均匀的气囊抛光实验,接着用基于改进普里姆(PrIM)算法的路径对其进行加工,最后对加工得到光学试件表面的中频误差进行分析,从而验证基于改进PrIM算法的抛光路径的优良性.In order to find an effective polishing path to eliminate the mid-frequency errors(MFE)of optical components,the paper carried out two group of experiments.The first set of bonnet uniform polishing experiments on the quartz glasses used single precession of Z-raster path and spiral path.Then the mid-frequency errors obtained after processing surfaces of the optical specimens were analyzed.The second set of bonnet uniform polishing experiments on the quartz glasses were firstly conducted using single precession of Z-raster path,and then the quartz glasses were polished by the path based on improving Prim algorithm.Finally we verify the excellent improvements of the path based on improving Prim algorithm by analyzing the mid-frequency errors obtained after processing surfaces of the optical specimens.国家自然科学基金(51275433); 国家科技重大专项(2013ZX04001000-206

Research on optical surface quality based on the monitoring of acoustic emission signals

基于声发射检测技术,通过研究磨削光学元件产生的声发射信号的频谱特征,研究其与表面粗糙度之间的关系,从而提出一种光学元件表面质量的判断方法,即一定范围内,光学元件表面质量随着声发射信号能量的增大而降低。由此获得一种快速、实时、便捷和安全的光学元件表面加工质量的检测方法,可用于光学元件表面加工质量的在线生产监控。Based on acoustic emission( AE) testing technology,through researching spectrum characteristic of acoustic emission signals from grinding the optics,research it's relation with surface roughness,provides a method judging the surface quality of optics,thus in a certain range,the quality of optical surface decreases with the increase of AE energy.It is concluded that energy analysis of acoustic signals is feasible for detecting the optical surface quality on line which have the merit of being sensitive,real- time,convenient and safe