Research on optical surface quality based on the monitoring of acoustic emission signals

Abstract

基于声发射检测技术,通过研究磨削光学元件产生的声发射信号的频谱特征,研究其与表面粗糙度之间的关系,从而提出一种光学元件表面质量的判断方法,即一定范围内,光学元件表面质量随着声发射信号能量的增大而降低。由此获得一种快速、实时、便捷和安全的光学元件表面加工质量的检测方法,可用于光学元件表面加工质量的在线生产监控。Based on acoustic emission( AE) testing technology,through researching spectrum characteristic of acoustic emission signals from grinding the optics,research it's relation with surface roughness,provides a method judging the surface quality of optics,thus in a certain range,the quality of optical surface decreases with the increase of AE energy.It is concluded that energy analysis of acoustic signals is feasible for detecting the optical surface quality on line which have the merit of being sensitive,real- time,convenient and safe

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