Through Silicon Via의 Coupling Noise를 억제하는 반전 전하층을 이용한 Guard Ring 제작 및 분석

학위논문 (박사)-- 서울대학교 대학원 : 전기·컴퓨터공학부, 2015. 8. 이종호.As technology shrinks, the implementation of high-density chip with a two-dimensional (2-D) planar architecture is becoming more difficult due to the limitation of lithography process. To overcome such scale-down limitations, a three-dimensional (3-D) package has been investigated. Among the various 3-D package technologies, a through silicon via (TSV) is a promising technology in which several chips are stacked vertically and electrically. This 3-D package can enhance the memory capacity, and implement a system with different functional chips. Although TSVs offer many advantages when used to achieve a high-density package, they also have several disadvantages, such as coupling noise. A high-frequency signal applied to a TSV induces noise in transistors near the TSV due to electrical coupling. Another issue is that copper (Cu) which is used as a conducting material of the TSV generates trap density caused by large diffusivity of Cu atoms. In this dissertation, we propose a new guard ring which consists of a shallow n+ region, a deep n-well, and an inversion layer formed along the interface between the oxide surrounding the TSV (TSV oxide) and the p-substrate. The proposed guard ring utilizes an inversion charge induced by a positive oxide charge located at the interface of the TSV oxide. We characterize quantitatively a TSV with a guard ring which is used to reduce the coupling noise from the TSV by utilizing an inversion layer as a shield layer. It is shown that a transient current due to the coupling is clearly reduced when the proposed guard ring is used. The proposed method is compared with a conventional guard ring method in terms of the drain current of a victim nMOSFET. The effective depth of the inversion layer with the signal frequency is also characterized. It is demonstrated that the high-frequency response of the guard ring can be modeled as an RC equivalent circuit. The proposed guard ring is effective in shielding the coupling noise and can be fabricated easily by modifying the ion implantation mask layer. A TSV conducting material requires high conductivity for low power consumption and high-speed operation. Cu is widely used as a TSV conducting material, but Cu atoms diffuse to the adjacent silicon substrate and transistors easily and generate traps during a low temperature annealing process. It is very important to suppress Cu diffusion and to devise a proper method to measure how many Cu atoms diffuse due to annealing. However, the characteristics of traps induced by Cu diffusion in a TSV are not easily measured because TSVs are typically located some distance away from the silicon surface, reaching a depth of tens of micrometers. For this reason, the deep part of a TSV cannot be measured. We suggest a measurement method which can be used to evaluate the trap density generated by Cu diffusion through the use of the proposed guard ring and analyze Cu diffusion as a parameter of the thickness of the barrier metal.Contents Abstract 1 Contents 4 Chapter 1 Introduction 6 1.1 BACKGROUND OF TSV 6 1.2 MOTIVATION FOR THE RESEARCH 14 Chapter 2 Structure of the guard ring and the TSV 15 2.1 INTRODUCTION 15 2.2 PROCESS FLOW OF FABRICATING TSV AND GUARD RING 20 2.3 STRUCTURE OF THE TSV AND THE PROPOSED GUARD RING 24 Chapter 3 Characteristics of the proposed guard ring 27 3.1 INTRODUCTION 27 3.2 JUNCTION CHARACTERISTICS OF THE PROPOSED GUARD RING 28 3.3 C-V CHARACTERISTICS OF THE PROPOSED GUARD RING 31 Chapter 4 Effective method to analyze the trap density 40 4.1 INTRODUCTION 40 4.2 CHARACTERISTICS OF CU DIFFUSION WITH BARRIER METAL THICKNESS 42 4.3 EFFECT OF CU DIFFUSION ENHANCED BY ADDITIONAL ANNEALING 53 Chapter 5 Shielding ability of the proposed guard ring 65 5.1 INTRODUCTION 65 5.2 SHIELDING ABILITY OF THE PROPOSED GUARD RING 69 5.3 EFFECTIVENESS OF THE PROPOSED GUARD RING 75 5.4 CHARACTERISTICS OF THE PROPOSED GUARD RING BY RC MODELING 86 Conclusions 91 Bibliography 93 Abstract in Korean 98Docto

전기요금 누진제도 개편이 주택용 전기사용량에 미치는 영향: 도시요소의 차이를 중심으로

학위논문 (석사) -- 서울대학교 대학원 : 환경대학원 환경계획학과, 2020. 8. Steven Jige Quan.In December 2016, the government and KEPCO (Korea Electric Power Corporation) modified the progressive tariff system for the purpose of reducing electricity bills. The progressive tariff system was changed into a three-block system, with the highest block paying triple the amount of the lowest block. The research related to the progressive tariff system so far can be divided into before and after the modification of the residential progressive tariff system. The studies prior to the modification were scenario analysis. After the modification of the residential electricity tariff system, the studies used household statistics survey data from the National Statistical Office, which is indirect data. There were a few national studies have been conducted on the modified tariff system using real consumption data. The research considered only the characteristics of households, such as the family size, number of children, presence of disabled people, and status of basic livelihood security recipient when analyzing the impact of the modified tariff system on electricity consumption. However, the household electricity consumption was influenced by various factors: urban geometry, building design, systems efficiency, and occupant behavior. Therefore, a better understanding of the building electricity consumption and its change due to new progressive tariff system in urban contexts should control both the social economic variables of occupants and the built environmental variables such as the geometry and building density. Therefore, the aim of this study is to analyze; 1)How the social economic and built environmental characteristics of the neighborhood have had an effect on electricity consumption, 2) How the new progressive tariff system had an effect on electricity consumption, 3) How changes in electricity consumption in neighborhood with different social economic condition after the implementation of new progressive tariff system. In this study, two different datasets were used for analysis of effect of new electricity tariff system, socio-economic factors and built environmental factors on EUI (Energy Use Intensity) due to the limitations of data access. Electricity consumption of multi-family house complex units was from the Building Energy System. This was electricity consumption by parcel, and one parcel had an electricity consumption data. That is, the electricity consumption data of the multi-family house complex unit was the electricity consumption of the entire parcel or complex, and the electricity consumption by household in the parcel or complex is aggregated. On the other hand, household electricity consumption data was from the Household Energy Standing Survey. Although this is individual data for each household, there is no location information, so it is not possible to take into account the influence of the built environment on electricity consumption, such as green space. Therefore, using the two data 'Multi-family house complex' and 'Household', the effect of neighborhood contexts on residential electricity consumption was analyzed and the changes in residential electricity consumption depends on social economic condition after the implementation of new progressive tariff system also analyzed . The dependent variable in complex unit data was EUI (Energy Use Intensity=Total electricity consumption/Total floor area), and in household unit data was EUI (Energy Use Intensity=Household electricity consumption/house area). The independent variable was HDD+CDD (Heating and Cooling Degree Day), 4 variables in built environmental factor and 3 variables in social economic factor. In complex unit data: Building age, FAR (Floor Area Ratio), BCR (Building Coverage Ratio), Green area within 500m radius, Price per area, Occupancy, and Ratio of over 65-year-old. In household unit data: Building age, Orientation, Number of bedroom, Number of living room, Income, Occupancy, and Ration over 65-year-old. To answering the first sub research question panel analysis used. In the result of panel analysis using both complex and household unit data, the coefficients of social economic factors were different. In both results, Occupancy and ratio of elderly people showed positive correlation with EUI, but price per area and income showed different correlation. ITS-Panel analysis, which integrates Interrupted Time Series into Panel analysis, was used to analyze changes in electricity consumption after the implementation of the new tariff system. In the result of ITS-Panel analysis using both complex and household unit data, the coefficient of Trend was different. In the analysis of complex unit data, the trend showed a positive correlation with the EUI, but the trend variable in the household unit data was insignificant. That is, after the implementation of new tariff system, the EUI in complex unit data increased, but the EUI in household unit data was independent of the new tariff system. In complex unit data, among the interaction terms, only Orientation x Trend and Ratio over 65-year-old x Trend showed statistically significant correlation. The ratio over 65-year-old variable had a positive correlation with EUI (Energy Use Intensity), and after the implementation of new progressive tariff system, the positive correlation has been strengthened. On the other hand, The Occupancy have a positive correlation with EUI (Energy Use Intensity), but after the implementation of new progressive tariff system, the positive correlation has been reduced. In this study, two datasets with different unit of analysis were used, which means the need for integrated and specific data for the study of residential electricity consumption. Comprehensive data, including household electricity consumption and socio-economic and built environmental characteristics of the household with location information, will allow accurate analysis of various factors on residential electricity consumption and the effects of the new electricity tariff system.2016년 12월 정부와 한국전력은 지속되는 폭염으로 인한 전기요금 부담 경감을 위해 누진제도를 완화했다. 새로운 누진제도는 누진 구간을 3단계로 축소하고 누진율은 3배로 완화했다. 누진제도에 관한 선행연구는 새로운 누진제도의 시행 전과 후로 나뉜다. 시행 이전에는 시나리오 분석 중심의 연구가 진행되었으며, 시행 후에는 가가계통계자료를 이용한 시행 전후의 전기사용량 변화를 비교하는 연구들이 이루어졌지만 실제 사용량은 이용한 연구는 찾아보기 어려웠다. 몇몇의 새로운 누진제 시행 후 전기 사용량의 변화 분석에 대해 실제 사용량 데이터를 이용한 실증 연구가 있었지만 그 연구들은 가계소득과 같은 사회 경제적 특성만 독립변수로 고려했다. 하지만 전기 사용량에는 도시 지형적 요인, 건물 형태, 냉난방 시스템의 효율, 그리고 거주자의 행동 등 다양한 요인이 영향을 미친다. 따라서 완화된 누진제 시행 후 전기 사용량의 변화는 위의 다양한 변수들에 의해 달라질 것이다. 이에 대해 본 논문은 새로운 누진제도의 시행 후 전기 사용량의 변화를 분석하고, 전기 사용량의 변화에 대한 사회경제적 변수와 건축 환경적 변수들의 영향을 분석했다. 또한 새로운 정책의 도입과 사회경제적 요인의 조절효과 분석을 통해 새로운 누진제도에 따른 사회경제적 요인들의 영향 변화를 분석했다. 본 연구에서는 새로운 전기 요금 누진제도, 사회 경제적 요소 및 건축환경적 요소의 EUI (Energy Use Intensity)에 대한 영향을 분석하기 위해 아파트단지 단위와 가구 단위의 두 가지 데이터셋을 사용했다. 아파트 단지 단위의 전기 사용량을 이용해서 FAR, BCR과 같은 밀도와 주변의 녹지 비율이 전기사용량에 미치는 영향을 확인할 수 있었다. 또한 새로운 전기요금제도의 시행 후 전기 에너지 사용량 변화를 확인하고 사회 경제적 요인에 따른 변화도 확인할 수 있었다. 하지만 아파트 단지 단위의 사회 경제적 변수들은 aggregate된 변수로서 개별 가구의 특성이 전기 사용량에 미치는 영향에 대해서 설명하기는 부족했다. 이를 보완하기위해 개별 가구의 특성과 전기 사용량 데이터를 갖는 가구단위 데이터 셋을 추가적으로 분석했다. 본 연구에서는 분석단위가 다른 두 개의 데이터 셋을 이용했는데 이는 주택용 전기에너지 연구를 위한 통합적인 데이터의 필요성을 의미한다. 가구단위의 주택용 전기 사용량과 해당 가구의 사화경제적 특성 및 해당 가구의 위치를 포함한 건축환경의 특성을 모두 포함하는 통합적이고 구체적인 데이터의 제공은 주택용 전기 사용량에 영향을 미치는 다양한 요인들의 분석과 새로운 전기 요금 제도의 효과를 정확히 분석할 수 있게 할 것이다.CHAPTER 1. Introduction 1 1.1. Study background 1 1.2. Purpose of research 2 Chapter 2. Literature review 4 2.1. Social economic factors and electricity consumption 4 2.2. Urban form and building electricity consumption 5 2.3. Progressive tariff 8 1. Terminology 8 2. Electricity tariff system and electricity consumption 9 2.4. Research gap 9 Chapter 3. Research question and conceptual framework 11 3.1. Research question 11 3.2. Conceptual framework 11 3.3. Research hypothesis 13 Chapter 4. Data and methodology 14 4.1. Study area 14 4.2. Unit of analysis 14 4.3. Data collection and processing in complex unit 17 1. Electricity Use Intensity 19 2. Heating Degree Day and cooling Degree Day 19 3. Built environmental factors 20 4. Social economic factors 22 4.4. Data collection and processing in household unit 23 1. Electricity Use Intensity 24 2. Heating Degree Day and cooling Degree Day 24 3. Built environmental factors 24 4. Social economic factors 24 4.5. Statistical model 24 1. Interrupted Time Series analysis 25 2. Panel analysis 27 Chapter 5. Descriptive statistics 29 5.1. Descriptive statistics 29 1. Complex unit 29 2. Household unit 29 5.2. Dataset structure 30 1. Complex unit 30 2. Household unit 31 5.3. Visualization of temporal variation 34 1. EUI in complex unit 34 2. EUI in household unit 35 Chapter 6. Explorative statistical analysis with ITS model 39 6.1. ARMA model 39 6.2. ARMA model analysis 40 6.3. ARMA model analysis for each complex 41 6.4. Findings from the explorative analysis 42 Chapter 7. Statistical analysis with Panel model 43 7.1. Panel analysis in complex unit 43 7.2. Panel analysis in household unit 44 Chapter 8. Comprehensive statistical analysis with ITS-PA model 45 8.1. Integration of ITS into panel analysis 45 8.2. Analysis of ITS-Panel in complex unit 45 8.3. Analysis of ITS-Panel in household unit 48 Chapter 9. Discussion 51 Chapter 10. Conclusion 53 10.1. Summary of the study 53 10.2. Implication for energy policy and urban planning 55 10.3. Limitation 56 Reference 57 Acknowledgement 61 Abstract in Korean 62Maste

다중 이해관계자 관점모델을 이용한 자율주행 및 이동로봇에서 관측한 보행자 행동 예측

학위논문 (석사) -- 서울대학교 대학원 : 인문대학 협동과정 인지과학전공, 2021. 2. Songhwai Oh.This thesis proposes a multiple stakeholder perspective model (MSPM) that predicts the future pedestrian trajectory observed from the vehicle's point of view. The motivation of the MSPM is that a human driver exploits the experience of being a pedestrian when he or she encounters a pedestrian crossing over the street. With many studies focusing on vehicle-vehicle systems, the autonomous vehicle system on freeways is nearing completion to some extent. In order for existing technology in an autonomous vehicle to be applied in urban areas from highways, vehicle-pedestrian interaction must also develop at a rapid pace. For the vehicle-pedestrian interaction, the estimation of the pedestrian's intention is a key factor. However, even if this interaction is commonly initiated by both the human (pedestrian) and the agent (driver), current research focuses on developing a neural network trained by the data from the driver's perspective only. In this paper, we suggest a multiple stakeholder perspective model (MSPM) and apply this model for pedestrian intention prediction. The model combines the driver (stakeholder 1) and pedestrian (stakeholder 2) by separating the information based on the perspective. The dataset from the pedestrian's perspective has been collected from the virtual reality experiment, and a network that can reflect the perspectives of both pedestrian and driver is proposed. Our model achieves the best performance in the existing pedestrian intention dataset while reducing the trajectory prediction error by an average of 4.48\% in the short-term (0.5s) and middle-term (1.0s) prediction, and 11.14\% in the long-term prediction (1.5s) compared to the previous state-of-the-art. Also, we collect an indoor pedestrian dataset, which includes various human behavior in indoor environments. With these data and models, we suggest a method when training and testing robots using data collected by different robot platforms.본 학위논문에서는 차량의 관점에서 관찰되는 미래 보행자 궤적을 예측하는 다중 이해관계자 관점 모델(MSPM)을 제안한다. MSPM은 운전자가 보행자를 마주했을때, 자신이 보행자였을때의 경험을 되살린다는 점에서 착안하여 설계되었다. 지금까지 자율주행 관련 연구는 차량-차량 시스템에 초점을 맞춰 진행되었다. 때문에 고속도로에서의 자율주행자동차는 어느 정도 완성에 가까워지고 있지만, 도심으로 들어오려면 차량-보행자 상호작용의 연구가 필요하다. 이번 논문에서는 차량-보행자 상호작용에서 보행자 의도 파악을 핵심 요인으로 보고 연구를 진행하였다. 차량-보행자 상호작용은 서로 다른 2개의 개체(운전자, 보행자) 사이에서 이루어짐에도 불구하고, 지금까지의 연구는 운전자의 관점에서만 데이터에 의해 훈련된 신경망 개발에 초점을 맞추고 있다. 본 논문에서는 다중 이해관계자 관점 모델(MSPM)을 제안하고 보행자 의도 예측에 이 모델을 적용한다. 이를 위해 심리학 연구실에서 가상현실을 통해 측정한, 보행자 관점에서 자동차를 바라보았을때의 데이터를 받아서 분석한 뒤 네트워크에 반영하였다. 제안하는 모델은 기존 보행자 의도파악 데이터셋에서 최고 성능을 달성하는 동시에 오차율을 단기(0.5초)와 중기(1.0초) 예측에서 평균 4.48\%, 장기 예측(1.5초)에서 기존 최고성능 모델 대비 11.14\% 줄일 수 있었다. 또한 이번 논문에서는 실내 환경에서의 모바일 로봇에 필요한 데이터와 모델을 제안한다. 기존 연구에서는 이러한 형태의 데이터가 없었기에, 파이프라인을 구축하고 사람들의 다양한 행동 방식을 포함하여 실내 보행자 데이터 세트를 수집했다. 그리고 이러한 데이터와 모델을 토대로, 모델을 학습시키고 기존 모델보다 더 좋은 성능을 확인했다. 이번 학위논문에서 진행한 연구는 추후 서로 다른 로봇 플랫폼에서 수집된 데이터를 손쉽게 로봇에 적용할 수 있는 모델 연구로 이어질 수 있을 것이다.Abstract . . . . i Contents . . . . iv List of Tables . . . . v List of Figures . . . . viii Chapter 1 Introduction 1 1.1 Conventional approach of pedestrian intention estimation 1 1.2 Limitation of current PIE research 3 1.3 Main Contribution 3 Chapter 2 Human behavior dataset analysis 5 2.1 Pedestrian perspective data 5 2.2 Data extraction and Analysis 6 Chapter 3 Mobile Robot Approach 8 3.1 Motivation 8 3.2 Data Collection Pipeline 9 3.2.1 Hardware setting 10 3.2.2 Test driving 11 3.2.3 Hardware modify 13 3.2.4 Collection scenario 14 3.2.5 Data collection 15 3.2.6 Draw bounding box 16 Chapter 4 Network Architecture 19 4.1 Cognitive Motivation 19 4.2 Multiple stakeholder perspective model (MSPM) 20 4.2.1 Stakeholder 1 (Driver-perspective) network 22 4.2.2 Stakeholder 2 (Pedestrian-perspective) network 24 4.2.3 For mobile robot experiment 27 Chapter 5 Evaluation & Result 28 5.1 Pedestrian intention estimation on automobile dataset 28 5.1.1 Trajectory Prediction 28 5.1.2 Ablation Study 32 5.2 Pedestrian intention estimation in indoor mobile robots dataset 33 5.2.1 A study on how to effectively make predictions in novel indoor situations based on models learned using only previous datasets 33 5.2.2 A study on what prediction result comes out when the newly collected data is also trained 36 Chapter 6 Conclusion 40 국문초록 42 Bibliography 43Maste

Comparative genomic analysis of homeologous chromosomal blocks containing bacterial leaf pustule resistance gene in soybean

학위논문 (박사)-- 서울대학교 대학원 : 식물생산과학부(작물생명과학전공), 2011.8. 이석하.Docto

전자-전자 산란을 포함한 TEHD(Tail Electron Hydrodynamic) 모델 연구

학위논문(석사)--서울대학교 대학원 :전기공학부,2000.Maste

웹 기반 특허 프로파일 모니터링 시스템 개발

학위논문(석사)--서울대학교 대학원 :산업공학과,2003.Maste

Clinical Investigation of Klinefelter's Syndrome

Klinefelter's syndrome is a form of testicular failure characterized by small testes, azoospermia and male phenotype and is the most common cause of frank hypogonadism. Frequency of the Klinefelter's syndrome in large scale surveys has estimated as 0.2% of all live-born males. Thus it may be approximated that we have nearly 40,000 cases of Klinefelter's syndrome in Korea. Clinical observations were made on a total of 64 cases of Klinefelter's syndrome in OUf Department of Seoul National University Hospital for the past 15 years. The results obtained were as follows: 1. Age distribution of the patients ranged from 12 to 34 with mean of 26 (Table 1). 2. Their chief complaints were small testicles in 29 cases (45%), infertile marriages in 16 cases (25%), small penis in 12 cases (19%), gynecomastia in 6 cases (9%), and other in 1 case (2%) (Table2). 3. The testicular sizes of the patients ranged from Irnl to 6ml with mean of 4ml (Table 3). 4. The penile sizes of the patients ranged from 2.5cm to 7.3cm with mean of 5.7cm in length, and from 2. Scm to 8. Oem with mean of 5. gem in circumference (Table 4). 5. The distribution of pubic hair were normal type in 10 cases (1696), horizontal type in 25 cases (39%), hypotrichosis pubis in 26 cases (4196), and atrichosis pubis in 3 cases (5%) (Table 5). 6. Gynecomastia occurred in 29 cases (45%). 7. Azoospermia was found in all cases. 8. The frequency of ejaculation per week ranged from 0.5 to 5 with mean of 1. 9/week in married cases and 2.1/week in single cases (Table 6). 9. The chromosomal study showed 47, XXY in 63 cases (9896) and 46, XX/47, XXY in 1 case (2%) (Table 8). Sex chromatin was positive in all patients (Table 7). 10. The average levels of plasma testosterone, FSH and LH were 2.43ng/ml (ranges: O. 27~8. Sl ng /rnl), 37. 92IU/L (ranges: 1.12~141. 03 IU/L), and 22.08 IU/L (ranges: O. 99~51. 88 IU/L), respectively(Tables 9 and 10). 11. Histological structures of the testes were hyalinization with fibrosis of the seminiferous tubules and pseudoadenomatous clumping of the Leydig cell. 12. These patients were treated with testosterone