Direct Bonding SOI Wafer Based Cantilever Resonator for Trace Gas Sensor Application

A thermal driving and piezoresistive sensing MEMS cantilever resonator has been proposed and developed to construct trace gas detection sensors. The problem of integrating vibration structure, transducers and electric elements is the main concern in the design and fabrication of the resonator. In this paper, the parameters and the configuration of the resonator are discussed, the fabrication process and the test results are presented. Finite Element Analysis (FEA) has been carried out to optimize the configuration of the resonator to obtain high sensitivity and efficiency with a uniform temperature distribution that is propitious to the function of the gas sensing material. The fabrication process is based on direct bonding silicon-on-insulator (SOI) wafer and inductive coupled plasma (ICP) etching technology, which conciliate the semiconductor processes and the micromaching processes, and provide precise control of the resonator parameters. The experimental test results of the fabricated resonator agreed well with the calculation and simulation results and demonstrated that the proposed resonator was qualified to construct trace gas detection sensors

On Control System Design for the Conventional Mode of Operation of Vibrational Gyroscopes

This paper presents a novel control circuitry design for both vibrating axes (drive and sense) of vibrational gyroscopes, and a new sensing method for time-varying rotation rates. The control design is motivated to address the challenges posed by manufacturing imperfection and environment vibrations that are particularly pronounced in microelectromechanical systems (MEMS) gyroscopes. The method of choice is active disturbance rejection control that, unlike most existing control design methods, does not depend on an accurate model of the plant. The task of control design is simplified when the internal dynamics, such as mechanical cross coupling between the drive and sense axes, and external vibrating forces are estimated and cancelled in real time. In both simulation and hardware tests on a vibrational piezoelectric beam gyroscope, the proposed controller proves to be robust against structural uncertainties; it also facilitates accurate sensing of time-varying rotation rates. The results demonstrate a simple, economic, control solution for compensating the manufacturing imperfections and improving sensing performance of the MEMS gyroscopes

On Control System Design for the Conventional Mode of Operation of Vibrational Gyroscopes

This paper presents a novel control circuitry design for both vibrating axes (drive and sense) of vibrational gyroscopes, and a new sensing method for time-varying rotation rates. The control design is motivated to address the challenges posed by manufacturing imperfection and environment vibrations that are particularly pronounced in microelectromechanical systems (MEMS) gyroscopes. The method of choice is active disturbance rejection control that, unlike most existing control design methods, does not depend on an accurate model of the plant. The task of control design is simplified when the internal dynamics, such as mechanical cross coupling between the drive and sense axes, and external vibrating forces are estimated and cancelled in real time. In both simulation and hardware tests on a vibrational piezoelectric beam gyroscope, the proposed controller proves to be robust against structural uncertainties; it also facilitates accurate sensing of time-varying rotation rates. The results demonstrate a simple, economic, control solution for compensating the manufacturing imperfections and improving sensing performance of the MEMS gyroscopes

Negative-Index Refraction in a Lamellar Composite with Alternating Single Negative Layers

Negative-index refraction is achieved in a lamellar composite with epsilon-negative (ENG) and mu-negative (MNG) materials stacked alternatively. Based on the effective medium approximation, simultaneously negative effective permittivity and permeability of such a lamellar composite are obtained theoretically and further proven by full-wave simulations. Consequently, the famous left-handed metamaterial comprising split ring resonators and wires is interpreted as an analogy of such an ENG-MNG lamellar composite. In addition, beyond the effective medium approximation, the propagating field squeezed near the ENG/MNG interface is demonstrated to be left-handed surface waves with backward phase velocity.Comment: 18 pages, 6 figure

A study of the interaction between inverted cucurbit[7]uril and symmetric viologens

The interaction between inverted cucuribit[7]uril (iQ[7]) and a series of symmetric viologen derivatives bearing aliphatic substituents of variable length, namely dicationic dialkyl-4,4′-bipyridinium guests where the alkyl is CH₃(CH₂)n with n = 0 to 6, has been studied in aqueous solution by ¹H NMR spectroscopy, electronic absorption spectroscopy, isothermal titration calorimetry and mass spectrometry. In the case of both n = 5 (HV ²⁺) and 6 (SV²⁺), single crystal X-ray diffraction revealed the composition to be [(iQ[7])₂(HV)₂][CdCl₃Br][H₃O+]₂[H₂O]₁₂.₅ and (iQ[7])₂(C7-SV)₁.₅[CdCl₄]₄(H₃O⁺)₅(H₂O)₈, respectively, with both adopting an external B-type structure (the alkyl chains of the viologen reside within the iQ[7])

Supramolecular assembly of cucurbit[6]uril and N-butyl-4-pyrrolidinopyridine

The nature of the supramolecular host-guest complex involving 4-pyrrolidinopyridine (BuPC4) and cucurbit[6]uril (Q[6]) has been investigated by NMR and UV spectroscopy, MALDI-TOF mass spectrometry, X-ray crystallography and isothermal titration calorimetry (ITC). The results revealed that the alkyl chain of the guest BuPC4 is located inside the cavity of the Q[6] host, whereas the other section of the BuPC4 guest remains outside of the portal

Active Disturbance Rejection Control for MEMS Gyroscopes

A new control method is presented to drive the drive axis of a Micro-Electro-Mechanical Systems (MEMS) gyroscope to resonance and to regulate the output amplitude of the axis to a fixed level. It is based on a unique active disturbance rejection control (ADRC) strategy, which actively estimates and compensates for internal dynamic changes of the drive axis and external disturbances in real time. The stability analysis shows that both the estimation error and the tracking error of the drive axis output are bounded and that the upper bounds of the errors monotonously decrease with the increase of the controller bandwidth. The control system is simulated and tested using a field-programmable-gate-array-based digital implementation on a piezoelectric vibrational gyroscope. Both simulation and experimental results demonstrate that the proposed controller not only drives the drive axis to vibrate along the desired trajectory but also compensates for manufacture imperfections in a robust fashion that makes the performance of the gyroscope insensitive to parameter variations and noises. Such robustness, the fact that the control design does not require an accurate plant model, and the ease of implementation make the proposed solution practical and economic for industrial applications