Inverse Lithography Physics-informed Deep Neural Level Set for Mask Optimization

As the feature size of integrated circuits continues to decrease, optical proximity correction (OPC) has emerged as a crucial resolution enhancement technology for ensuring high printability in the lithography process. Recently, level set-based inverse lithography technology (ILT) has drawn considerable attention as a promising OPC solution, showcasing its powerful pattern fidelity, especially in advanced process. However, massive computational time consumption of ILT limits its applicability to mainly correcting partial layers and hotspot regions. Deep learning (DL) methods have shown great potential in accelerating ILT. However, lack of domain knowledge of inverse lithography limits the ability of DL-based algorithms in process window (PW) enhancement and etc. In this paper, we propose an inverse lithography physics-informed deep neural level set (ILDLS) approach for mask optimization. This approach utilizes level set based-ILT as a layer within the DL framework and iteratively conducts mask prediction and correction to significantly enhance printability and PW in comparison with results from pure DL and ILT. With this approach, computation time is reduced by a few orders of magnitude versus ILT. By gearing up DL with knowledge of inverse lithography physics, ILDLS provides a new and efficient mask optimization solution

Long range dipole-dipole interaction in low-density atomic vapors probed by double-quantum two-dimensional coherent spectroscopy

Optical double-quantum two-dimensional coherent spectroscopy (2DCS) was implemented to probe interatomic dipole-dipole interactions in both potassium and rubidium atomic vapors. The dipole-dipole interaction was detected at densities of $4.81 \times 10^8$ cm$^{-3}$ and $8.40 \times 10^9$ cm$^{-3}$ for potassium and rubidium, respectively, corresponding to a mean interatomic separation of 15.8 $\mu$m or $3.0\times 10^5a_0$ for potassium and 6.1 $\mu$m or $1.2\times 10^5a_0$ for rubidium, where $a_0$ is the Bohr radius. We report the lowest atomic density at which dipole-dipole interactions are detected. The experimental results confirm the long range nature of the dipole-dipole interaction which is critical for understanding many-body physics in atoms/molecules. The long range interaction also has implications in atom-based applications involving many-body interactions. Additionally, we demonstrated that double-quantum 2DCS is sufficiently sensitive to probe dipole-dipole interaction at densities that can be achieved with cold atom in a magneto-optical trap, paving the way for double-quantum 2DCS studies of cold atoms and molecules. The method can also open a new avenue to study long-range interactions in solid states systems such as quantum dots and color centers in diamonds.Comment: 5 pages, 4 figure

Imaging molecular orbitals with laser-induced electron tunneling spectroscopy

Photoelectron spectroscopy in intense laser fields has proven to be a powerful tool for providing detailed insights into molecular structure. The ionizing molecular orbital, however, has not been reconstructed from the photoelectron spectra, mainly due to the fact that its phase information can be hardly extracted. In this work, we propose a method to retrieve the phase information of the ionizing molecular orbital with laser-induced electron tunneling spectroscopy. By analyzing the interference pattern in the photoelectron spectrum, the weighted coefficients and the relative phases of the constituent atomic orbitals for a molecular orbital can be extracted. With this information we reconstruct the highest occupied molecular orbital of N$_2$. Our work provides a reliable and general approach for imaging of molecular orbitals with the photoelectron spectroscopy.Comment: 6 pages, 4 figures, including Supplementary Material