Ellipsometric spectroscopy studies of compaction and decompaction of Si-SiO2 systems, Journal of Telecommunications and Information Technology, 2007, nr 3

The influence of the strain on the optical properties of Si-SiO2 system has been investigated by spectroscopic ellipsometry (SE), interferometry and weighing methods. Subtle changes of densification (compaction degree) in silicon dioxide layers on silicon substrates have been determined by weight technique (relying on measurements of the silicon dioxide layer mass and calculations of the volume). Elastic stress in the oxide layers has been measured by Fizeau fringes image analysis method. A comparison is made between the density of the silicon dioxide (r) and the results of calculations made using r = f = (n) relations (where n is the refractive index) given in the literature

Comparison of the barrier height measurements by the Powell method with the ΦMS measurement results, Journal of Telecommunications and Information Technology, 2005, nr 1

n this work, we have compared the barrier height measurements carried out using the Powell method with the photoelectric effective contact potential difference (&phiMS) measurement results. The photoelectric measurements were performed on the samples that were previously applied in the investigation of the influence of stress on the duration of annealing in nitrogen. This paper shows that the results of barrier height measurement using the Powell method differ significantly from the &phi(MS) measurement results

Effects of stress annealing on the electrical and the optical properties of MOS devices, Journal of Telecommunications and Information Technology, 2005, nr 1

In this paper we show the results of a study of the effects of high-temperature stress annealing in nitrogen on the refraction index of SiO2 layers and electrical properties in metal-oxide-semiconductor (MOS) devices. We have experimentally characterized the dependence of the reduced effective contact potential difference (ECPD), the effective oxide charge density (Neff), and the mid-gap interface trap density (Dit) on the annealing conditions. Subsequently, we have correlated such properties with the dependence of the refraction index and oxide stress on the annealing conditions and silicon dioxide thickness. Also, the dependence of mechanical stress in the Si-SiO2 system on the oxidation and annealing conditions has been experimentally determined. We consider the contributions of the thermal-relaxation and nitrogen incorporation processes in determining changes in the SiO2 layer refractive index and the electrical properties with annealing time. This description is consistent with other annealing studies carried out in argon, where only the thermal relaxation process is present

Practical Precision Electrical Impedance Measurement for the 21st Century – EMPIR Project 17RPT04 VersICal

The core objective of EMPIR project 17RPT04 VersICaL is to improve the European measurement infrastructure for electrical impedance, with particular emphasis on the capabilities of developing NMIs and calibration centres. The project will seek to exploit the results of existing research on digital impedance bridges (DIBs) by designing, constructing and validating simple, affordable versions suitable to realise the impedance scale in the range 1 nF to 10 μF and 1 mH to 10 H with relative uncertainties in the range 10-5 to 10-6. The first results of the research project, including the bridge designs and details of a polyphase digitally synthesized multichannel source capable of providing voltage outputs of precise ratio and phase are presented

The novel testing methods of aerosol products for industrial radiography

W pracy zaprezentowano nowe metody wyznaczania objętości produktów aerozolowych w oparciu o radiografię cyfrową z zastosowaniem promieniowania rentgenowskiego. Dla potrzeb nowych metod stworzono system wizyjny CCD-DR (charge coupled device– digital radiography) z lampą rentgenowską. Do celów porównawczych została przetestowana pod względem zawartości objętości duża liczba puszek o określonych pojemnościach. W przyszłości zamierza się wykorzystać algorytm do tomografii komputerowej dla zastosowań radiografii przemysłowej. Umożliwi to przeprowadzenie dokładniejszych pomiarów określania objętości zarówno w testowanych produktach aerozolowych, jak i w innych obiektach.In the paper, new methods related to the determination of the volumetric content of canister filled with aerosol products are presented. The new methods are based on direct digital radiography (DR) with using X-ray radiation. For the needs of new methods, the X-ray CCD-DR imaging system was built and developed. For comparison purposes, with regard to the volumetric content, a lot of metal cans of specific capacities were inspected. In the future, computed tomography (CT) for industrial radiography in our laboratory will be used. It will give us possibility for very accurate measurements to determine volumetric content of examined canisters and other various mechanical elements

Oxidation Process of SiC by RTP Technique

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