Modern production systems have to allow high performance cutting processes in a flexible production system environment at a high level of accuracy. The final workpiece accuracy is mainly influenced by the thermo-elastic behavior of the machine tool and can be improved by additional measures, compensation strategies and an optimized machine design. These measures are often implemented as stand-alone solutions. According to the Industry 4.0 all information should be connected in a single model of the actual machine state to increase machining accuracy. It is therefore necessary to integrate upcoming smart fluid power systems into the machine network