Properties and characterization of ALD grown dielectric oxides for MIS structures

We report on an extensive structural and electrical characterization of under-gate dielectric oxide insulators Al2O3 and HfO2 grown by Atomic Layer Deposition (ALD). We elaborate the ALD growth window for these oxides, finding that the 40-100 nm thick layers of both oxides exhibit fine surface flatness and required amorphous structure. These layers constitute a base for further metallic gate evaporation to complete the Metal-Insulator-Semiconductor structure. Our best devices survive energizing up to ~3 MV/cm at 77 K with the leakage current staying below the state-of-the-art level of 1 nA. At these conditions the displaced charge corresponds to a change of the sheet carrier density of 3 \times 1013 cm-2, what promises an effective modulation of the micromagnetic properties in diluted ferromagnetic semiconductors.Comment: 8 pages, 5 figures, 14 reference

The Cartan – Monge geometric approach to the characteristic method for nonlinear partial differential equations of the first and higher orders

We develop the Cartan – Monge geometric approach to the characteristic method for nonlinear part ial differential equations of the first and higher orders. The Hamiltonian structure of characteristic vector fields related with nonlinear partial differential equations of the first order is analyzed, the tensor fields of special structure are constructed for defining characteristic vector fields naturally related with nonlinear partial differential equations of higher orders

ZnCoO Films Obtained at Low Temperature by Atomic Layer Deposition Using Organic Zinc and Cobalt Precursors

In this paper we report on ZnCoO thin films grown by atomic layer deposition method in reactor F-120 Satellite. ZnCoO films were grown at low temperature (T s = 160 • C) with a new zinc precursor (dimethylzinc -DMZn) and with cobalt (II) acetyloacetonate (Co(acac)2) as a cobalt precursor and deionized water as an oxygen precursor. In this paper we concentrate on the methods of homogenizing Co distribution in ZnCoO films

On the limit properties of the solution of the Dirichlet problem for the equation (Δ−c2)u(x,y)=0(\Delta-c^2)u(x, y) = 0 in the half-plane

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On boundary value problems for some partial differentia equations of higher order

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On some limit properties of the solution of the Riquier problem for the iterated Helmholtz equation in the half-plane

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Sur certaines méthodes de sommation des séries

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The Green function for the Lauricelli problem and for polyharmonic equation in the half-space

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On a certain generalization of the Orlicz theorem

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