350 research outputs found
High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through
The paper presents a technique to pattern materials in deep holes and/or on non-planar substrate surfaces. A rather old technique, namely, electron-beam evaporation of metals through a shadow mask, is used. The realization of high-resolution shadow masks using micromachining techniques is described. Further, a low ohmic electrical wafer foed-through with a small parasitic capacitance to the substrate and a high placing density is presented
Fiber-top atomic force microscope
We present the implementation of an atomic force microscope (AFM) based on fiber-top design. Our results demonstrate that the performances of fiber-top AFMs in contact mode are comparable to those of similar commercially available instruments. Our device thus represents an interesting\ud
alternative to existing AFMs, particularly for applications outside specialized research laboratories, where a compact, user-friendly, and versatile tool might often be preferred
Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges
Recently, we demonstrated controllable 3D self-folding by means of capillary
forces of silicon-nitride micro-objects made of rigid plates connected to each
other by flexible hinges [1]. In this paper, we introduce platinum electrodes
running from the substrate to the plates over these bendable hinges. The
fabrication yield is as high as (77 +/- 2) % for hinges with a length less than
75 {\mu}m. The yield reduces to (18 +/- 2) % when the length increases above
100 {\mu}m. Most of the failures in conductivity are due to degradation of the
platinum/chromium layer stack during the final plasma cleaning step. The
bi-layer hinges survive the capillary folding process, even for extremely small
bending radii of 5 {\mu}m, nor does the bending have any impact on the
conductivity. Stress in the different layers deforms the hinges, which does not
affect the conductivity. Once assembled, the conductive hinges can withstand a
current density of (1.6 +/- 0.4) A/cm . This introduction of
conductive electrodes to elastocapillary self-folded silicon-based
micro-objects extends the range of their possible applications by allowing an
electronic functionality of the folded parts.Comment: Currently on a peer review process. 13 page
Elastocapillary folding using stop-programmable hinges fabricated by 3D micro-machining
We show elasto-capillary folding of silicon nitride objects with accurate
folding angles between flaps of 70.60.1{\deg} and demonstrate the
feasibility of such accurate micro-assembly with a final folding angle of
90{\deg}. The folding angle is defined by stop-programmable hinges that are
fabricated starting from silicon molds employing accurate three-dimensional
corner lithography. This nano-patterning method exploits the conformal
deposition and the subsequent timed isotropic etching of a thin film in a 3D
shaped silicon template. The technique leaves a residue of the thin film in
sharp concave corners which can be used as an inversion mask in subsequent
steps. Hinges designed to stop the folding at 70.6{\deg} were fabricated
batchwise by machining the V-grooves obtained by KOH etching in (110) silicon
wafers; 90{\deg} stop-programmable hinges were obtained starting from silicon
molds obtained by dry etching on (100) wafers. The presented technique is
applicable to any folding angle and opens a new route towards creating
structures with increased complexity, which will ultimately lead to a novel
method for device fabrication.Comment: Submitted to a peer reviewed journa
Anti-Corporate Activism and Collusion: The Contentious Politics of Palm Oil Expansion in Indonesia
Report of the workshop ‘New Law, New Villages? Changing rural Indonesia’
Effective Protection of Fundamental Rights in a pluralist worl
- …