Channeling in helium ion microscopy: Mapping of crystal orientation

Background: The unique surface sensitivity and the high resolution that can be achieved with helium ion microscopy make it a\ud competitive technique for modern materials characterization. As in other techniques that make use of a charged particle beam, channeling\ud through the crystal structure of the bulk of the material can occur.\ud Results: Here, we demonstrate how this bulk phenomenon affects secondary electron images that predominantly contain surface\ud information. In addition, we will show how it can be used to obtain crystallographic information. We will discuss the origin of\ud channeling contrast in secondary electron images, illustrate this with experiments, and develop a simple geometric model to predict\ud channeling maxima.\ud Conclusion: Channeling plays an important role in helium ion microscopy and has to be taken into account when trying to achieve\ud maximum image quality in backscattered helium images as well as secondary electron images. Secondary electron images can be\ud used to extract crystallographic information from bulk samples as well as from thin surface layers, in a straightforward manner

Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

Background: Helium ion microscopy is a new high-performance alternative to classical scanning electron microscopy. It provides superior resolution and high surface sensitivity by using secondary electrons.\ud \ud Results: We report on a new contrast mechanism that extends the high surface sensitivity that is usually achieved in secondary electron images, to backscattered helium images. We demonstrate how thin organic and inorganic layers as well as self-assembled monolayers can be visualized on heavier element substrates by changes in the backscatter yield. Thin layers of light elements on heavy substrates should have a negligible direct influence on backscatter yields. However, using simple geometric calculations of the opaque crystal fraction, the contrast that is observed in the images can be interpreted in terms of changes in the channeling probability.\ud \ud Conclusion: The suppression of ion channeling into crystalline matter by adsorbed thin films provides a new contrast mechanism for HIM. This dechanneling contrast is particularly well suited for the visualization of ultrathin layers of light elements on heavier substrates. Our results also highlight the importance of proper vacuum conditions for channeling-based experimental methods\u

High resolution ionoluminescence study of defect creation and interaction

Helium ion microscopy has been used to investigate the ionoluminescence of NaCl. A 35 keV, sub-nanometer He+ ion beam was used to generate ionoluminescence. The interaction of ionizing radiation with alkali halides leads to the formation of various crystal defects, in particular so-called color-centers. Their subsequent recombination with charge carriers leads to the emission of visible light. Broad peaks at 2.46 eV and 3.05 eV were measured. We have also investigated the dynamics of defect creation as a function of the beam scanning parameters (current and pixel spacing). The resolution and detection capabilities of ionoluminescence in helium ion microscopy are sensitive to both sample properties and scanning parameters