71 research outputs found
Influence of bias voltage on composition and tribological properties Ti-Cr-N coatings formed by ion-plasma deposition
Ti-Cr-N coatings were formed on St3 steel by cathodic arc vapor deposition while combining titanium or chromium plasma flows in a residual nitrogen atmosphere. Elemental and phase composition of the coatings were studied using Auger electron spectroscopy (AES) and X-ray diffraction (XRD). Coatings are solid solution on the basis of chromium and titanium mononitrides. It is found that an increase in bias voltage leads to relative rise of titanium concentration and to decrease of chromium
concentration. With the values of bias voltage less than 120 V coatings grow with (200) preferred orientation. It is established that Ti-rich coatings (Ti31Cr20N49 and Ti33Cr17N50)
have low steady-state friction coefficient, while the Cr-rich coatings (Ti17Cr35N48) has high steady-state friction coefficient.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/2077
Radiation effects in nanosized clusters
In this communication we present results of computer simulation of radiationenhanced
processes in nanosized ferromagnetic clusters under the irradiation by elementary
particles and ions. Dynamic defects and possibility of their experimental monitoring
are considered. Radiation resistance of nanostructured materials is characterized by the
size of instability region for knocked-out atom. Heating and thermoelastic effects on
defect structure and materials functionality are discussed.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/2085
Formation of silicon-based nanostructures by compression plasma flows
The use of compression flows (CPF) for the formation of metal and silicide nanostructures for data storage devices, thermoelectric materials and solar cells is presented.
The action of CPF with injected metallic powder results in the formation of coatings composed of spherical clusters with complex structure: each submicron cluster (0,1-0,2 ΞΌm radius) is formed from a number of nanosized ones (10-25 nm radius). The
action of CPF on binary βmetal-siliconβ systems provides formation of branched silicon dendrites (tip radius ~ 200 nm, primary spacing ~ 1,2 ΞΌm); interdendritic space is filled
with nanostructured (50-100 nm) βsilicide-siliconβ and βmonosilicide-disilicideβ composite due to melting of the surface layer, rapid solidification (~ 10-3 m/s) and constitutional overcooling. Mechanisms of formation of nanostructured composites on silicon surface and in thick surface layers is discussed in terms of order parameter evolution and non-equilibrium solidification models.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/2086
In situ stress evolution during growth of transition metal nitride films and nanocomposites
The issue of stress evolution during growth of hard transition metal nitride (TMN) based coatings is of vital importance to understand origin of intrinsic stress development
and to control stress level in order to avoid mechanical failure of coated components and devices. By using in situ and real-time wafer curvature measurements based on a multiple-
beam optical stress sensor (MOSS), basic insights on the atomistic mechanisms at the origin of stress development and stress relaxation can be obtained. In the present
paper, a review of recent advances on stress development during reactive magnetron sputter-deposition of binary TMN films (TiN, ZrN, TaN) as wells as ternary systems (TiZrN, TiTaN) will be presented. The influence of growth energetics on the build-up of
compressive stress will be addressed. A correlation between stress, texture and film morphology is demonstrated. Finally, illustration will be given for quaternary TiZrAlN
nanocomposites.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/2074
Properties of superhard nanostructured coatings Ti-Hf-Si-N
New superhard coatings based on Ti-Hf-Si-N featuring high physical and mechanical properties were fabricated. We employed a vacuum-arc source with HF stimulation and a cathode sintered from Ti-Hf-Si. Nitrides were fabricated using atomic nitrogen (N) or a mixture of Ar/N, which were leaked-in a chamber at various pressures and applied to a substrate potentials. RBS, SIMS, GT-MS, SEM with EDXS, XRD, and nanoindentation were employed as analyzing methods of chemical and phase composition of thin films. We also tested tribological and corrosion properties. The resulting coating was a two-phase, nanostructured nc-(Ti, Hf)N and Ξ±-Si3N4. Sizes of substitution solid solution nanograins changed from 3.8 to 6.5 nm, and an interface thickness surrounding Ξ±-Si3N4 varied from 1.2 to 1.8 nm. Coatings hardness, which was measured by nanoindentation was from 42.7 GPa to 48.6 GPa, and an elastic modulus was E = (450 to 515) GPa. The films stoichiometry was defined for various deposition conditions. It was found that in samples with superhard coatings of 42.7 to 48.6GPa hardness and lower roughness in comparison with other series of samples, friction coefficient was equal to 0.2, and its value did not change over all depth (thickness) of coatings. A film adhesion to a substrate was essentially high and reached 25MPa.
Π ΡΠ°Π±ΠΎΡΠ΅ ΠΏΠΎΠ»ΡΡΠ΅Π½Ρ Π½ΠΎΠ²ΡΠ΅ ΡΠ²Π΅ΡΡ
ΡΠ²Π΅ΡΠ΄ΡΠ΅ ΠΏΠΎΠΊΡΡΡΠΈΡ Π½Π° ΠΎΡΠ½ΠΎΠ²Π΅ Ti-Hf-Si-N Ρ Π²ΡΡΠΎΠΊΠΈΠΌΠΈ ΡΠΈΠ·ΠΈΠΊΠΎ-ΠΌΠ΅Ρ
Π°Π½ΠΈΡΠ΅ΡΠΊΠΈΠΌΠΈ ΡΠ²ΠΎΠΉΡΡΠ²Π°ΠΌΠΈ. Π ΠΏΡΠΎΡΠ΅ΡΡΠ΅ ΡΠΈΠ½ΡΠ΅Π·Π° ΠΌΠ΅ΡΠΎΠ΄ΠΎΠΌ Π²Π°ΠΊΡΡΠΌΠ½ΠΎ-Π΄ΡΠ³ΠΎΠ²ΠΎΠ³ΠΎ ΠΎΡΠ°ΠΆΠ΄Π΅Π½ΠΈΡ Ρ ΠΏΡΠΈΠΌΠ΅Π½Π΅Π½ΠΈΠ΅ΠΌ ΠΠ§ Π½Π°ΠΏΡΡΠΆΠ΅Π½ΠΈΡ ΡΠ°ΡΠΏΡΠ»ΡΠ»ΡΡ ΡΠ΅Π»ΡΠ½ΠΎΠ»ΠΈΡΠΎΠΉ ΠΊΠ°ΡΠΎΠ΄ Ti-Hf-Si. ΠΠΈΡΡΠΈΠ΄Ρ ΡΠΎΡΠΌΠΈΡΠΎΠ²Π°Π»ΠΈΡΡ Π² ΡΡΠ΅Π΄Π΅ Π°ΡΠΎΠΌΠ°ΡΠ½ΠΎΠ³ΠΎ Π°Π·ΠΎΡΠ° (N) ΠΈΠ»ΠΈ Π² ΡΠΌΠ΅ΡΠΈ Ar/N, ΠΊΠΎΡΠΎΡΡΠ΅ Π½Π°ΠΏΡΡΠΊΠ°Π»ΠΈΡΡ Π² ΠΊΠ°ΠΌΠ΅ΡΡ ΠΏΡΠΈ ΡΠ°Π·Π»ΠΈΡΠ½ΡΡ
Π΄Π°Π²Π»Π΅Π½ΠΈΡΡ
. Π₯ΠΈΠΌΠΈΡΠ΅ΡΠΊΠΈΠΉ ΠΈ ΡΠ°Π·ΠΎΠ²ΡΠΉ ΡΠΎΡΡΠ°Π²Ρ ΡΠΎΠ½ΠΊΠΈΡ
ΠΏΠ»Π΅Π½ΠΎΠΊ Π°Π½Π°Π»ΠΈΠ·ΠΈΡΠΎΠ²Π°Π»ΡΡ ΠΌΠ΅ΡΠΎΠ΄Π°ΠΌΠΈ RBS, SIMS, GT-MS, SEM Ρ EDXS, Π Π‘Π, Π° ΡΠ²Π΅ΡΠ΄ΠΎΡΡΡ ΠΎΠΏΡΠ΅Π΄Π΅Π»ΡΠ»Π°ΡΡ Π½Π°Π½ΠΎΠΈΠ½Π΄Π΅Π½ΡΠΈΡΠΎΠ²Π°Π½ΠΈΠ΅ΠΌ. ΠΡΡΠ»Π΅Π΄ΠΎΠ²Π°Π»ΠΈΡΡ ΡΡΠΈΠ±ΠΎΠ»ΠΎΠ³ΠΈΡΠ΅ΡΠΊΠΈΠ΅ ΠΈ ΠΊΠΎΡΡΠΎΠ·ΠΈΠΎΠ½Π½ΡΠ΅ ΡΠ²ΠΎΠΉΡΡΠ²Π° ΠΏΠΎΠΊΡΡΡΠΈΠΉ. ΠΠΎΠ»ΡΡΠ΅Π½Π½ΡΠ΅ ΠΏΠΎΠΊΡΡΡΠΈΡ ΡΠ²Π»ΡΡΡΡΡ Π΄Π²ΡΡ
ΡΠ°Π·Π½ΡΠΌΠΈ Π½Π°Π½ΠΎΡΡΡΡΠΊΡΡΡΠΈΡΠΎΠ²Π°Π½Π½ΡΠΌΠΈ nΡ-(Ti, Hf)N ΠΈ Ξ±-Si3N4. Π Π°Π·ΠΌΠ΅ΡΡ Π½Π°Π½ΠΎΠ·Π΅ΡΠ΅Π½ ΡΠ²Π΅ΡΠ΄ΠΎΠ³ΠΎ ΡΠ°ΡΡΠ²ΠΎΡΠ° Π²Π°ΡΡΠΈΡΠΎΠ²Π°Π»ΠΈΡΡ ΠΎΡ 3,8 Π΄ΠΎ 6,5 Π½ΠΌ, Π° ΡΠΎΠ»ΡΠΈΠ½Π° ΠΎΠΊΡΡΠΆΠ°ΡΡΠ΅ΠΉ ΠΎΠ±ΠΎΠ»ΠΎΡΠΊΠΈ Ξ±-Si3N4 ΠΌΠ΅Π½ΡΠ»Π°ΡΡ ΠΎΡ 1,2 Π΄ΠΎ 1,8 Π½ΠΌ. Π’Π²Π΅ΡΠ΄ΠΎΡΡΡ ΠΏΠΎΠΊΡΡΡΠΈΠΉ H ΡΠΎΡΡΠ°Π²Π»ΡΠ»Π° 42,7 48,6 ΠΠΠ°, Π° ΠΌΠΎΠ΄ΡΠ»Ρ ΡΠΏΡΡΠ³ΠΎΡΡΠΈ Π ΠΏΡΠΈΠ½ΠΈΠΌΠ°Π» Π·Π½Π°ΡΠ΅Π½ΠΈΡ ΠΎΡ 450 ΠΠΠ° Π΄ΠΎ 515 ΠΠΠ°. ΠΠΏΡΠ΅Π΄Π΅Π»Π΅Π½Π° ΡΡΠ΅Ρ
ΠΈΠΎΠΌΠ΅ΡΡΠΈΡ ΠΏΠ»Π΅Π½ΠΎΠΊ ΠΏΡΠΈ ΡΠ°Π·Π»ΠΈΡΠ½ΡΡ
ΡΡΠ»ΠΎΠ²ΠΈΡΡ
ΠΎΡΠ°ΠΆΠ΄Π΅Π½ΠΈΡ. Π£ΡΡΠ°Π½ΠΎΠ²Π»Π΅Π½ΠΎ, ΡΡΠΎ Π² ΠΎΠ±ΡΠ°Π·ΡΠ°Ρ
ΡΠ²Π΅ΡΡ
ΡΠ²Π΅ΡΠ΄ΡΡ
ΠΏΠΎΠΊΡΡΡΠΈΠΉ Ρ ΡΠ²Π΅ΡΠ΄ΠΎΡΡΡΡ 42,7 48.6 ΠΠΠ° Π½Π°Π±Π»ΡΠ΄Π°Π»Π°ΡΡ Π±ΠΎΠ»Π΅Π΅ Π½ΠΈΠ·ΠΊΠ°Ρ ΡΠ΅ΡΠΎΡ
ΠΎΠ²Π°ΡΠΎΡΡΡ ΠΏΠΎ ΡΡΠ°Π²Π½Π΅Π½ΠΈΡ Ρ Π΄ΡΡΠ³ΠΈΠΌΠΈ ΠΎΠ±ΡΠ°Π·ΡΠ°ΠΌΠΈ, ΠΊΠΎΡΡΡΠΈΡΠΈΠ΅Π½Ρ ΡΡΠ΅Π½ΠΈΡ ΡΠΎΡΡΠ°Π²Π»ΡΠ» 0,2, ΠΈ Π΅Π³ΠΎ Π·Π½Π°ΡΠ΅Π½ΠΈΠ΅ Π½Π΅ ΠΈΠ·ΠΌΠ΅Π½ΡΠ»ΠΎΡΡ ΠΏΠΎ Π²ΡΠ΅ΠΉ Π³Π»ΡΠ±ΠΈΠ½Π΅ (ΡΠΎΠ»ΡΠΈΠ½Π΅) ΠΏΠΎΠΊΡΡΡΠΈΡ. ΠΠ΄Π³Π΅Π·ΠΈΡ ΠΏΠ»Π΅Π½ΠΊΠΈ ΠΊ ΠΏΠΎΠ΄Π»ΠΎΠΆΠΊΠ΅ Π΄ΠΎΡΡΠΈΠ³Π»Π° 25 ΠΠΠ°. Π£ ΡΠΎΠ±ΠΎΡΡ ΠΎΡΡΠΈΠΌΠ°Π½Ρ Π½ΠΎΠ²Ρ Π½Π°Π΄ΡΠ²Π΅ΡΠ΄Ρ ΠΏΠΎΠΊΡΠΈΡΡΡ Π½Π° ΠΎΡΠ½ΠΎΠ²Ρ Ti-Hf-SΡ-N Π· Π²ΠΈΡΠΎΠΊΠΈΠΌΠΈ ΡΡΠ·ΠΈΠΊΠΎ-ΠΌΠ΅Ρ
Π°Π½ΡΡΠ½ΠΈΠΌΠΈ Π²Π»Π°ΡΡΠΈΠ²ΠΎΡΡΡΠΌΠΈ. Π£ ΠΏΡΠΎΡΠ΅ΡΡ ΡΠΈΠ½ΡΠ΅Π·Ρ ΠΌΠ΅ΡΠΎΠ΄ΠΎΠΌ Π²Π°ΠΊΡΡΠΌΠ½ΠΎ-Π΄ΡΠ³ΠΎΠ²ΠΎΠ³ΠΎ ΠΎΡΠ°Π΄ΠΆΠ΅Π½Π½Ρ ΡΠ· Π·Π°ΡΡΠΎΡΡΠ²Π°Π½Π½ΡΠΌ ΠΠ§ Π½Π°ΠΏΡΡΠ³ΠΈ ΡΠΎΠ·ΠΏΠΎΡΠΎΡΡΠ²Π°Π²ΡΡ ΡΡΡΡΠ»ΡΠ½ΠΎΠ»ΠΈΡΠΈΠΉ ΠΊΠ°ΡΠΎΠ΄ TΡ-Hf-SΡ. ΠΡΡΡΠΈΠ΄ΠΈ ΡΠΎΡΠΌΡΠ²Π°Π»ΠΈΡΡ Ρ ΡΠ΅ΡΠ΅Π΄ΠΎΠ²ΠΈΡΡ Π°ΡΠΎΠΌΠ°ΡΠ½ΠΎΠ³ΠΎ Π°Π·ΠΎΡΡ (N) Π°Π±ΠΎ Ρ ΡΡΠΌΡΡΡ Ar/N, ΡΠΊΡ Π½Π°ΠΏΡΡΠΊΠ°Π»ΠΈΡΡ Ρ ΠΊΠ°ΠΌΠ΅ΡΡ ΠΏΡΠΈ ΡΡΠ·Π½ΠΈΡ
ΡΠΈΡΠΊΠ°Ρ
. Π₯ΡΠΌΡΡΠ½ΠΈΠΉ Ρ ΡΠ°Π·ΠΎΠ²ΠΈΠΉ ΡΠΊΠ»Π°Π΄ΠΈ ΡΠΎΠ½ΠΊΠΈΡ
ΠΏΠ»ΡΠ²ΠΎΠΊ Π°Π½Π°Π»ΡΠ·ΡΠ²Π°Π»ΠΈΡΡ ΠΌΠ΅ΡΠΎΠ΄Π°ΠΌΠΈ RBS, SΠMS, GT-MS, SEM Π· EDXS, Π Π‘Π, Π° ΡΠ²Π΅ΡΠ΄ΡΡΡΡ Π²ΠΈΠ·Π½Π°ΡΠ°Π»Π°ΡΡ Π½Π°Π½ΠΎΡΠ½Π΄Π΅Π½ΡΡΠ²Π°Π½Π½ΡΠΌ. ΠΠΎΡΠ»ΡΠ΄ΠΆΡΠ²Π°Π»ΠΈΡΡ ΡΡΠΈΠ±ΠΎΠ»ΠΎΠ³ΡΡΠ½Ρ ΡΠ° ΠΊΠΎΡΠΎΠ·ΡΠΉΠ½Ρ Π²Π»Π°ΡΡΠΈΠ²ΠΎΡΡΡ ΠΏΠΎΠΊΡΠΈΡΡΡΠ². ΠΡΡΠΈΠΌΠ°Π½Ρ ΠΏΠΎΠΊΡΠΈΡΡΡ Ρ Π΄Π²ΠΎΡΠ°Π·Π½ΠΈΠΌΠΈ Π½Π°Π½ΠΎΡΡΡΡΠΊΡΡΡΠΎΠ²Π°Π½ΠΈΠΌΠΈ nΡ-(TΡ, Hf)N Ρ -SΡ3N4. Π ΠΎΠ·ΠΌΡΡΠΈ Π½Π°Π½ΠΎΠ·Π΅ΡΠ΅Π½ ΡΠ²Π΅ΡΠ΄ΠΎΠ³ΠΎ ΡΠΎΠ·ΡΠΈΠ½Ρ Π²Π°ΡΡΡΠ²Π°Π»ΠΈΡΡ Π²ΡΠ΄ 3,8 Π΄ΠΎ 6,5 Π½ΠΌ, Π° ΡΠΎΠ²ΡΠΈΠ½Π° Π½Π°Π²ΠΊΠΎΠ»ΠΈΡΠ½ΡΠΎΡ ΠΎΠ±ΠΎΠ»ΠΎΠ½ΠΊΠΈ -SΡ3N4 Π·ΠΌΡΠ½ΡΠ²Π°Π»Π°ΡΡ Π²ΡΠ΄ 1,2 Π΄ΠΎ 1,8 Π½ΠΌ. Π’Π²Π΅ΡΠ΄ΡΡΡΡ ΠΏΠΎΠΊΡΠΈΡΡΡΠ² H ΡΡΠ°Π½ΠΎΠ²ΠΈΠ»Π° 42,7 48,6 ΠΠΠ°, Π° ΠΌΠΎΠ΄ΡΠ»Ρ ΠΏΡΡΠΆΠ½ΠΎΡΡΡ Π ΠΏΡΠΈΠΉΠΌΠ°Π² Π·Π½Π°ΡΠ΅Π½Π½Ρ Π²ΡΠ΄ 450 ΠΠΠ° Π΄ΠΎ 515 ΠΠΠ°. ΠΠΈΠ·Π½Π°ΡΠ΅Π½ΠΎ ΡΡΠ΅Ρ
ΡΠΎΠΌΠ΅ΡΡΡΡ ΠΏΠ»ΡΠ²ΠΎΠΊ ΠΏΡΠΈ ΡΡΠ·Π½ΠΈΡ
ΡΠΌΠΎΠ²Π°Ρ
ΠΎΡΠ°Π΄ΠΆΠ΅Π½Π½Ρ. ΠΡΡΠ°Π½ΠΎΠ²Π»Π΅Π½ΠΎ, ΡΠΎ Ρ Π·ΡΠ°Π·ΠΊΠ°Ρ
Π½Π°Π΄ΡΠ²Π΅ΡΠ΄ΠΈΡ
ΠΏΠΎΠΊΡΠΈΡΡΡΠ² ΡΠ· ΡΠ²Π΅ΡΠ΄ΡΡΡΡ 42,7 48.6 ΠΠΠ° ΡΠΏΠΎΡΡΠ΅ΡΡΠ³Π°Π»Π°ΡΡ Π½ΠΈΠΆΡΠ° ΡΠΎΡΡΡΠΊΡΡΡΡ Ρ ΠΏΠΎΡΡΠ²Π½ΡΠ½Π½Ρ Π· ΡΠ½ΡΠΈΠΌΠΈ Π·ΡΠ°Π·ΠΊΠ°ΠΌΠΈ, ΠΊΠΎΠ΅ΡΡΡΡΡΠ½Ρ ΡΠ΅ΡΡΡ ΡΡΠ°Π½ΠΎΠ²ΠΈΠ² 0,2, Ρ ΠΉΠΎΠ³ΠΎ Π·Π½Π°ΡΠ΅Π½Π½Ρ Π½Π΅ Π·ΠΌΡΠ½ΡΠ²Π°Π»ΠΎΡΡ Π·Π° Π³Π»ΠΈΠ±ΠΈΠ½ΠΎΡ (ΡΠΎΠ²ΡΠΈΠ½ΠΎΡ) ΠΏΠΎΠΊΡΠΈΡΡΡ. ΠΠ΄Π³Π΅Π·ΡΡ ΠΏΠ»ΡΠ²ΠΊΠΈ Π΄ΠΎ ΠΏΡΠ΄ΠΊΠ»Π°Π΄ΠΊΠΈ Π΄ΠΎΡΡΠ³Π»Π° 25 ΠΠΠ°
Nanostructured formations and coatings created on the surface of materials exposed to compression plasma flows
The paper presents the results of investigations on changing silicon and aluminium morphology under the action of compression plasma flows generated by the quasi-stationary plasma accelerator (magnetoplasma compressor type). The feasibility of spraying nanostructured metal films by compression flows was demonstrated. The resulting single-layer coating consists of spherical particles measuring 50 to 200 nm. Such particles bonded to each other cover a surface relief including flat areas and regular structures developing during plasma action. The state and composition of a sample surface were studied by SEM- and EXD-methodsΠΡΠ΅Π΄ΡΡΠ°Π²Π»Π΅Π½ΠΎ ΡΠ΅Π·ΡΠ»ΡΡΠ°ΡΠΈ Π΄ΠΎΡΠ»ΡΠ΄ΠΆΠ΅Π½Ρ Π·ΠΌΡΠ½ΠΈ ΠΌΠΎΡΡΠΎΠ»ΠΎΠ³ΡΡ ΠΏΠΎΠ²Π΅ΡΡ
Π½Ρ ΠΏΠ»Π°ΡΡΠΈΠ½ ΠΊΡΠ΅ΠΌΠ½ΡΡ ΠΉ Π°Π»ΡΠΌΡΠ½ΡΡ ΠΏΡΠΈ Π²ΠΏΠ»ΠΈΠ²Ρ Π½Π° Π½ΠΈΡ
ΠΊΠΎΠΌΠΏΡΠ΅ΡΡΠΉΠ½ΠΈΠΌΠΈ ΠΏΠ»Π°Π·ΠΌΠΎΠ²ΠΈΠΌΠΈ ΠΏΠΎΡΠΎΠΊΠ°ΠΌΠΈ, ΡΠΎ Π³Π΅Π½Π΅ΡΡΡΡΡΡΡ ΠΊΠ²Π°Π·ΡΡΡΠ°ΡΡΠΎΠ½Π°ΡΠ½ΠΈΠΌ ΠΏΠ»Π°Π·ΠΌΠΎΠ²ΠΈΠΌ ΠΏΡΠΈΡΠΊΠΎΡΡΠ²Π°ΡΠ΅ΠΌ ΡΠΈΠΏΡ ΠΌΠ°Π³Π½ΡΡΠΎΠΏΠ»Π°Π·ΠΌΠΎΠ²ΠΈΠΉ ΠΊΠΎΠΌΠΏΡΠ΅ΡΠΎΡ. ΠΡΠΎΠ΄Π΅ΠΌΠΎΠ½ΡΡΡΠΎΠ²Π°Π½ΠΎ ΠΌΠΎΠΆΠ»ΠΈΠ²ΡΡΡΡ Π½Π°Π½Π΅ΡΠ΅Π½Π½Ρ Π½Π° ΠΏΡΠ΄ΠΊΠ»Π°Π΄ΠΊΠΈ Π½Π°Π½ΠΎΡΡΡΡΠΊΡΡΡΠ½ΠΈΡ
ΠΌΠ΅ΡΠ°Π»Π΅Π²ΠΈΡ
ΠΏΠΎΠΊΡΠΈΡΡ Π·Π° Π΄ΠΎΠΏΠΎΠΌΠΎΠ³ΠΎΡ ΠΊΠΎΠΌΠΏΡΠ΅ΡΡΠΉΠ½ΠΈΡ
ΠΏΠΎΡΠΎΠΊΡΠ².ΠΡΠ΅Π΄ΡΡΠ°Π²Π»Π΅Π½Ρ ΡΠ΅Π·ΡΠ»ΡΡΠ°ΡΡ ΠΈΡΡΠ»Π΅Π΄ΠΎΠ²Π°Π½ΠΈΠΉ ΠΈΠ·ΠΌΠ΅Π½Π΅Π½ΠΈΡ ΠΌΠΎΡΡΠΎΠ»ΠΎΠ³ΠΈΠΈ ΠΏΠΎΠ²Π΅ΡΡ
Π½ΠΎΡΡΠΈ ΠΏΠ»Π°ΡΡΠΈΠ½ ΠΊΡΠ΅ΠΌΠ½ΠΈΡ ΠΈ Π°Π»ΡΠΌΠΈΠ½ΠΈΡ ΠΏΡΠΈ Π²ΠΎΠ·Π΄Π΅ΠΉΡΡΠ²ΠΈΠΈ Π½Π° Π½ΠΈΡ
ΠΊΠΎΠΌΠΏΡΠ΅ΡΡΠΈΠΎΠ½Π½ΡΠΌΠΈ ΠΏΠ»Π°Π·ΠΌΠ΅Π½Π½ΡΠΌΠΈ ΠΏΠΎΡΠΎΠΊΠ°ΠΌΠΈ, Π³Π΅Π½Π΅ΡΠΈΡΡΠ΅ΠΌΡΠΌΠΈ ΠΊΠ²Π°Π·ΠΈΡΡΠ°ΡΠΈΠΎΠ½Π°ΡΠ½ΡΠΌ ΠΏΠ»Π°Π·ΠΌΠ΅Π½Π½ΡΠΌ ΡΡΠΊΠΎΡΠΈΡΠ΅Π»Π΅ΠΌ ΡΠΈΠΏΠ° ΠΌΠ°Π³Π½ΠΈΡΠΎΠΏΠ»Π°Π·ΠΌΠ΅Π½Π½ΡΠΉ ΠΊΠΎΠΌΠΏΡΠ΅ΡΡΠΎΡ. ΠΡΠΎΠ΄Π΅ΠΌΠΎΠ½ΡΡΡΠΈΡΠΎΠ²Π°Π½Π° Π²ΠΎΠ·ΠΌΠΎΠΆΠ½ΠΎΡΡΡ Π½Π°Π½Π΅ΡΠ΅Π½ΠΈΡ Π½Π° ΠΏΠΎΠ΄Π»ΠΎΠΆΠΊΠΈ Π½Π°Π½ΠΎΡΡΡΡΠΊΡΡΡΠ½ΡΡ
ΠΌΠ΅ΡΠ°Π»Π»ΠΈΡΠ΅ΡΠΊΠΈΡ
ΠΏΠΎΠΊΡΡΡΠΈΠΉ Ρ ΠΏΠΎΠΌΠΎΡΡΡ ΠΊΠΎΠΌΠΏΡΠ΅ΡΡΠΈΠΎΠ½Π½ΡΡ
ΠΏΠΎΡΠΎΠΊΠΎΠ²
Modification of coating-substrate systems under the action of compression plasma flow
The results of studying changes in physical and mechanical properties of coating-substrate systems subjected to the compression plasma flow are presented. The possibility for doping the substrate both with pre-deposited coating components and with plasma-forming substance during liquid-phase mixing and resolidification of near-surface layers melted by the compression plasma flow is shown.ΠΡΠ΅Π΄ΡΡΠ°Π²Π»Π΅Π½ΠΎ ΡΠ΅Π·ΡΠ»ΡΡΠ°ΡΠΈ Π΄ΠΎΡΠ»ΡΠ΄ΠΆΠ΅Π½Ρ Π·ΠΌΡΠ½ΠΈ ΡΡΠ·ΠΈΠΊΠΎ-ΠΌΠ΅Ρ
Π°Π½ΡΡΠ½ΠΈΡ
Π²Π»Π°ΡΡΠΈΠ²ΠΎΡΡΠ΅ΠΉ ΡΠΈΡΡΠ΅ΠΌ ΠΏΠΎΠΊΡΠΈΡΡΡ-ΠΏΡΠ΄ΠΊΠ»Π°Π΄ΠΊΠ° ΠΏΡΠΈ Π²ΠΏΠ»ΠΈΠ²Ρ Π½Π° Π½ΠΈΡ
ΠΊΠΎΠΌΠΏΡΠ΅ΡΡΠΉΠ½ΠΈΠΌ ΠΏΠ»Π°Π·ΠΌΠΎΠ²ΠΈΠΌ ΠΏΠΎΡΠΎΠΊΠΎΠΌ. ΠΡΠΎΠ΄Π΅ΠΌΠΎΠ½ΡΡΡΠΎΠ²Π°Π½ΠΎ ΠΌΠΎΠΆΠ»ΠΈΠ²ΡΡΡΡ Π»Π΅Π³ΡΠ²Π°Π½Π½Ρ ΠΌΠ°ΡΠ΅ΡΡΠ°Π»Ρ ΠΏΡΠ΄ΠΊΠ»Π°Π΄ΠΊΠΈ ΡΠΊ ΠΊΠΎΠΌΠΏΠΎΠ½Π΅Π½ΡΠΎΠΌ ΠΏΠΎΠΏΠ΅ΡΠ΅Π΄Π½ΡΠΎ Π½Π°Π½Π΅ΡΠ΅Π½ΠΎΠ³ΠΎ ΠΏΠΎΠΊΡΠΈΡΡΡ, ΡΠ°ΠΊ Ρ ΡΠΎΠ±ΠΎΡΠΎΡ ΡΠ΅ΡΠΎΠ²ΠΈΠ½ΠΎΡ ΠΏΠ»Π°Π·ΠΌΠΈ, Ρ ΠΏΡΠΎΡΠ΅ΡΡ ΡΡΠ΄ΠΊΠΎΡΠ°Π·Π½ΠΎΠ³ΠΎ ΠΏΠ΅ΡΠ΅ΠΌΡΡΡΠ²Π°Π½Π½Ρ Ρ ΠΏΠ΅ΡΠ΅Π·Π°ΡΠ²Π΅ΡΠ΄ΡΠ½Π½Ρ ΡΠΎΠ·ΠΏΠ»Π°Π²Π»Π΅Π½ΠΈΡ
ΠΏΡΠ΄ Π΄ΡΡΡ ΠΊΠΎΠΌΠΏΡΠ΅ΡΡΠΉΠ½ΠΎΠ³ΠΎ ΠΏΠ»Π°Π·ΠΌΠΎΠ²ΠΎΠ³ΠΎ ΠΏΠΎΡΠΎΠΊΡ ΠΏΡΠΈΠΏΠΎΠ²Π΅ΡΡ
Π½ΡΡ
ΡΠ°ΡΡΠ².ΠΡΠ΅Π΄ΡΡΠ°Π²Π»Π΅Π½Ρ ΡΠ΅Π·ΡΠ»ΡΡΠ°ΡΡ ΠΈΡΡΠ»Π΅Π΄ΠΎΠ²Π°Π½ΠΈΠΉ ΠΈΠ·ΠΌΠ΅Π½Π΅Π½ΠΈΡ ΡΠΈΠ·ΠΈΠΊΠΎ-ΠΌΠ΅Ρ
Π°Π½ΠΈΡΠ΅ΡΠΊΠΈΡ
ΡΠ²ΠΎΠΉΡΡΠ² ΡΠΈΡΡΠ΅ΠΌ ΠΏΠΎΠΊΡΡΡΠΈΠ΅- ΠΏΠΎΠ΄Π»ΠΎΠΆΠΊΠ° ΠΏΡΠΈ Π²ΠΎΠ·Π΄Π΅ΠΉΡΡΠ²ΠΈΠΈ Π½Π° Π½ΠΈΡ
ΠΊΠΎΠΌΠΏΡΠ΅ΡΡΠΈΠΎΠ½Π½ΡΠΌ ΠΏΠ»Π°Π·ΠΌΠ΅Π½Π½ΡΠΌ ΠΏΠΎΡΠΎΠΊΠΎΠΌ. ΠΡΠΎΠ΄Π΅ΠΌΠΎΠ½ΡΡΡΠΈΡΠΎΠ²Π°Π½Π° Π²ΠΎΠ·ΠΌΠΎΠΆΠ½ΠΎΡΡΡ Π»Π΅Π³ΠΈΡΠΎΠ²Π°Π½ΠΈΡ ΠΌΠ°ΡΠ΅ΡΠΈΠ°Π»Π° ΠΏΠΎΠ΄Π»ΠΎΠΆΠΊΠΈ ΠΊΠ°ΠΊ ΠΊΠΎΠΌΠΏΠΎΠ½Π΅Π½ΡΠΎΠΌ ΠΏΡΠ΅Π΄Π²Π°ΡΠΈΡΠ΅Π»ΡΠ½ΠΎ Π½Π°Π½Π΅ΡΠ΅Π½Π½ΠΎΠ³ΠΎ ΠΏΠΎΠΊΡΡΡΠΈΡ, ΡΠ°ΠΊ ΠΈ ΡΠ°Π±ΠΎΡΠΈΠΌ Π²Π΅ΡΠ΅ΡΡΠ²ΠΎΠΌ ΠΏΠ»Π°Π·ΠΌΡ, Π² ΠΏΡΠΎΡΠ΅ΡΡΠ΅ ΠΆΠΈΠ΄ΠΊΠΎΡΠ°Π·Π½ΠΎΠ³ΠΎ ΠΏΠ΅ΡΠ΅ΠΌΠ΅ΡΠΈΠ²Π°Π½ΠΈΡ ΠΈ ΠΏΠ΅ΡΠ΅Π·Π°ΡΠ²Π΅ΡΠ΄Π΅Π²Π°Π½ΠΈΡ ΡΠ°ΡΠΏΠ»Π°Π²Π»Π΅Π½Π½ΡΡ
ΠΏΠΎΠ΄ Π΄Π΅ΠΉΡΡΠ²ΠΈΠ΅ΠΌ ΠΊΠΎΠΌΠΏΡΠ΅ΡΡΠΈΠΎΠ½Π½ΠΎΠ³ΠΎ ΠΏΠ»Π°Π·ΠΌΠ΅Π½Π½ΠΎΠ³ΠΎ ΠΏΠΎΡΠΎΠΊΠ° ΠΏΡΠΈΠΏΠΎΠ²Π΅ΡΡ
Π½ΠΎΡΡΠ½ΡΡ
ΡΠ»ΠΎΠ΅Π²
Structures and properties of Ti alloys after double implantation
Π ΡΠ°Π±ΠΎΡΠ΅ ΠΏΡΠ΅Π΄ΡΡΠ°Π²Π»Π΅Π½Ρ Π½ΠΎΠ²ΡΠ΅ ΡΠ΅Π·ΡΠ»ΡΡΠ°ΡΡ ΠΏΠΎ ΠΈΡΡΠ»Π΅Π΄ΠΎΠ²Π°Π½ΠΈΡ ΡΡΡΡΠΊΡΡΡΡ ΠΈ ΡΠΈΠ·ΠΈΠΊΠΎ-ΠΌΠ΅Ρ
Π°Π½ΠΈΡΠ΅ΡΠΊΠΈΠ΅ ΡΠ²ΠΎΠΉΡΡΠ²Π° ΠΏΡΠΈΠΏΠΎΠ²Π΅ΡΡ
Π½ΠΎΡΡΠ½ΡΡ
ΡΠ»ΠΎΠ΅Π² ΡΠΈΡΠ°Π½ΠΎΠ²ΡΡ
ΡΠΏΠ»Π°Π²ΠΎΠ² ΠΏΠΎΡΠ»Π΅ (W+, Mo+) ΠΈΠΎΠ½Π½ΠΎΠΉ ΠΈΠΌΠΏΠ»Π°Π½ΡΠ°ΡΠΈΠΈ ΠΈ ΠΏΠΎΡΠ»Π΅Π΄ΡΡΡΠ΅Π³ΠΎ ΠΎΡΠΆΠΈΠ³Π° ΠΏΡΠΈ 550 Π‘ Π² ΡΠ΅ΡΠ΅Π½ΠΈΠ΅ 2 Ρ. ΠΡΠΏΠΎΠ»ΡΠ·ΠΎΠ²Π°Π½ΠΈΠ΅ ΠΎΠ±ΡΠ°ΡΠ½ΠΎΠ³ΠΎ ΡΠ°ΡΡΠ΅ΡΠ½ΠΈΡ (RBS) ΠΈΠΎΠ½ΠΎΠ² Π³Π΅Π»ΠΈΡ ΠΈ ΠΏΡΠΎΡΠΎΠ½ΠΎΠ², ΡΠΊΠ°Π½ΠΈΡΡΡΡΠ΅ΠΉ ΡΠ»Π΅ΠΊΡΡΠΎΠ½Π½ΠΎΠΉ ΠΌΠΈΠΊΡΠΎΡΠΊΠΎΠΏΠΈΠΈ (SEM) Ρ ΠΌΠΈΠΊΡΠΎΠ°Π½Π°Π»ΠΈΠ·Π° (ΠΠ¦Π), (WDS), ΠΏΡΠΎΡΠΎΠ½ΠΎΠ² (ΠΈΠΎΠ½ΠΎΠ²), ΠΈΠ½Π΄ΡΡΠΈΡΠΎΠ²Π°Π½Π½ΠΎΠ³ΠΎ ΡΠ΅Π½ΡΠ³Π΅Π½ΠΎΠ²ΡΠΊΠΎΠ³ΠΎ ΠΈΠ·Π»ΡΡΠ΅Π½ΠΈΡ (PIXE), ΡΠ΅Π½ΡΠ³Π΅Π½ΠΎΡΠ°Π·ΠΎΠ²ΠΎΠ³ΠΎ Π°Π½Π°Π»ΠΈΠ·Π° (Π Π‘Π) Ρ Π³Π΅ΠΎΠΌΠ΅ΡΡΠΈΠΈ ΡΠΊΠΎΠ»ΡΠ·ΡΡΠ΅Π³ΠΎ ΠΏΠ°Π΄Π΅Π½ΠΈΡ (0,5 Π³ΡΠ°Π΄.), ΠΈΠ·ΠΌΠ΅ΡΠ΅Π½ΠΈΡ Π½Π°Π½ΠΎΡΠ²Π΅ΡΠ΄ΠΎΡΡΠΈ ΠΈ ΠΌΠΎΠ΄ΡΠ»Ρ ΡΠΏΡΡΠ³ΠΎΡΡΠΈ, ΡΡΠ΅Π½ΠΈΡ ΠΈΠ·Π½ΠΎΡΠ° (ΡΠΈΠ»ΠΈΠ½Π΄Ρ-ΠΏΠ»Π°ΡΡΠΈΠ½Ρ), ΠΈΠ·ΠΌΠ΅ΡΠ΅Π½ΠΈΡ ΠΊΠΎΡΡΠΎΠ·ΠΈΠΎΠ½Π½Π°Ρ ΡΡΠΎΠΉΠΊΠΎΡΡΡ Π² ΡΠΎΠ»Π΅Π²ΠΎΠΌ ΡΠ°ΡΡΠ²ΠΎΡΠ΅, ΠΌΡ ΠΈΡΡΠ»Π΅Π΄ΠΎΠ²Π°Π»ΠΈ VT-6 ΠΎΠ±ΡΠ°Π·ΡΠΎΠ², ΠΈ ΠΎΠΏΡΠ΅Π΄Π΅Π»ΡΠ΅ΡΡΡ ΠΈΡ
ΡΠΎΠΏΡΠΎΡΠΈΠ²Π»Π΅Π½ΠΈΡ ΡΡΡΠ°Π»ΠΎΡΡΠΈ ΠΏΡΠΈ ΡΠΈΠΊΠ»ΠΈΡΠ΅ΡΠΊΠΈΡ
Π½Π°Π³ΡΡΠ·ΠΊΠ°Ρ
.
ΠΡΠ»ΠΎ ΠΎΠ±Π½Π°ΡΡΠΆΠ΅Π½ΠΎ Π΄Π²ΠΎΠΉΠ½ΠΎΠ΅ ΡΠ²Π΅Π»ΠΈΡΠ΅Π½ΠΈΠ΅ ΡΠ²Π΅ΡΠ΄ΠΎΡΡΠΈ, ΡΠ½ΠΈΠΆΠ΅Π½ΠΈΠ΅ ΠΈΠ·Π½ΠΎΡΠ° ΠΈ ΡΠ²Π΅Π»ΠΈΡΠ΅Π½ΠΈΠ΅ ΡΠΎΠΏΡΠΎΡΠΈΠ²Π»Π΅Π½ΠΈΡ ΡΡΡΠ°Π»ΠΎΡΡΠΈ, ΡΡΠΎ Π±ΡΠ»ΠΎ ΡΠ²ΡΠ·Π°Π½ΠΎ Ρ ΡΠΎΡΠΌΠΈΡΠΎΠ²Π°Π½ΠΈΠ΅ΠΌ ΠΌΠ°Π»ΠΎΠ΄ΠΈΡΠΏΠ΅ΡΡΠ½ΠΎΠ³ΠΎ Π½ΠΈΡΡΠΈΠ΄Π°, ΠΊΠ°ΡΠ±ΠΎΠ½ΠΈΡΡΠΈΠ΄Π°, ΠΈ ΠΈΠ½ΡΠ΅ΡΠΌΠ΅ΡΠ°Π»Π»ΠΈΠ΄Π½ΡΡ
ΡΠ°Π·.The paper presents new results on investigation of structure and physical-mechanical properties of near
surface layers of titanium alloys after (W+, Mo+) ion implantation and subsequent thermal annealing under 550 C for 2 h. Using back scattering (RBS) of helium ions and protons, scanning electron microscopy (SEM) with microanalysis (EDS), (WDS), proton (ion) induced X-ray emission (PIXE), X-ray
phase analysis (XRD) with a grazing incidence geometry (0.5 angle), measurements of nanohardness and elastic modulus, friction wear (cylinder-plate), measurements of corrosion resistance in a salt solution, we investigated the VT-6 samples, and determined their fatigue resistance under cyclic loads.
Double increase of hardness, decrease of wear and increased fatigue resistance were found, which was related to the formation of small dispersion (nanodimension) nitride, carbonitride, and intermetalloid phases
Structures and properties of Ti alloys after double implantation
Π ΡΠ°Π±ΠΎΡΠ΅ ΠΏΡΠ΅Π΄ΡΡΠ°Π²Π»Π΅Π½Ρ Π½ΠΎΠ²ΡΠ΅ ΡΠ΅Π·ΡΠ»ΡΡΠ°ΡΡ ΠΏΠΎ ΠΈΡΡΠ»Π΅Π΄ΠΎΠ²Π°Π½ΠΈΡ ΡΡΡΡΠΊΡΡΡΡ ΠΈ ΡΠΈΠ·ΠΈΠΊΠΎ-ΠΌΠ΅Ρ
Π°Π½ΠΈΡΠ΅ΡΠΊΠΈΠ΅ ΡΠ²ΠΎΠΉΡΡΠ²Π° ΠΏΡΠΈΠΏΠΎΠ²Π΅ΡΡ
Π½ΠΎΡΡΠ½ΡΡ
ΡΠ»ΠΎΠ΅Π² ΡΠΈΡΠ°Π½ΠΎΠ²ΡΡ
ΡΠΏΠ»Π°Π²ΠΎΠ² ΠΏΠΎΡΠ»Π΅ (W+, Mo+) ΠΈΠΎΠ½Π½ΠΎΠΉ ΠΈΠΌΠΏΠ»Π°Π½ΡΠ°ΡΠΈΠΈ ΠΈ ΠΏΠΎΡΠ»Π΅Π΄ΡΡΡΠ΅Π³ΠΎ ΠΎΡΠΆΠΈΠ³Π° ΠΏΡΠΈ 550 Π‘ Π² ΡΠ΅ΡΠ΅Π½ΠΈΠ΅ 2 Ρ. ΠΡΠΏΠΎΠ»ΡΠ·ΠΎΠ²Π°Π½ΠΈΠ΅ ΠΎΠ±ΡΠ°ΡΠ½ΠΎΠ³ΠΎ ΡΠ°ΡΡΠ΅ΡΠ½ΠΈΡ (RBS) ΠΈΠΎΠ½ΠΎΠ² Π³Π΅Π»ΠΈΡ ΠΈ ΠΏΡΠΎΡΠΎΠ½ΠΎΠ², ΡΠΊΠ°Π½ΠΈΡΡΡΡΠ΅ΠΉ ΡΠ»Π΅ΠΊΡΡΠΎΠ½Π½ΠΎΠΉ ΠΌΠΈΠΊΡΠΎΡΠΊΠΎΠΏΠΈΠΈ (SEM) Ρ ΠΌΠΈΠΊΡΠΎΠ°Π½Π°Π»ΠΈΠ·Π° (ΠΠ¦Π), (WDS), ΠΏΡΠΎΡΠΎΠ½ΠΎΠ² (ΠΈΠΎΠ½ΠΎΠ²), ΠΈΠ½Π΄ΡΡΠΈΡΠΎΠ²Π°Π½Π½ΠΎΠ³ΠΎ ΡΠ΅Π½ΡΠ³Π΅Π½ΠΎΠ²ΡΠΊΠΎΠ³ΠΎ ΠΈΠ·Π»ΡΡΠ΅Π½ΠΈΡ (PIXE), ΡΠ΅Π½ΡΠ³Π΅Π½ΠΎΡΠ°Π·ΠΎΠ²ΠΎΠ³ΠΎ Π°Π½Π°Π»ΠΈΠ·Π° (Π Π‘Π) Ρ Π³Π΅ΠΎΠΌΠ΅ΡΡΠΈΠΈ ΡΠΊΠΎΠ»ΡΠ·ΡΡΠ΅Π³ΠΎ ΠΏΠ°Π΄Π΅Π½ΠΈΡ (0,5 Π³ΡΠ°Π΄.), ΠΈΠ·ΠΌΠ΅ΡΠ΅Π½ΠΈΡ Π½Π°Π½ΠΎΡΠ²Π΅ΡΠ΄ΠΎΡΡΠΈ ΠΈ ΠΌΠΎΠ΄ΡΠ»Ρ ΡΠΏΡΡΠ³ΠΎΡΡΠΈ, ΡΡΠ΅Π½ΠΈΡ ΠΈΠ·Π½ΠΎΡΠ° (ΡΠΈΠ»ΠΈΠ½Π΄Ρ-ΠΏΠ»Π°ΡΡΠΈΠ½Ρ), ΠΈΠ·ΠΌΠ΅ΡΠ΅Π½ΠΈΡ ΠΊΠΎΡΡΠΎΠ·ΠΈΠΎΠ½Π½Π°Ρ ΡΡΠΎΠΉΠΊΠΎΡΡΡ Π² ΡΠΎΠ»Π΅Π²ΠΎΠΌ ΡΠ°ΡΡΠ²ΠΎΡΠ΅, ΠΌΡ ΠΈΡΡΠ»Π΅Π΄ΠΎΠ²Π°Π»ΠΈ VT-6 ΠΎΠ±ΡΠ°Π·ΡΠΎΠ², ΠΈ ΠΎΠΏΡΠ΅Π΄Π΅Π»ΡΠ΅ΡΡΡ ΠΈΡ
ΡΠΎΠΏΡΠΎΡΠΈΠ²Π»Π΅Π½ΠΈΡ ΡΡΡΠ°Π»ΠΎΡΡΠΈ ΠΏΡΠΈ ΡΠΈΠΊΠ»ΠΈΡΠ΅ΡΠΊΠΈΡ
Π½Π°Π³ΡΡΠ·ΠΊΠ°Ρ
.
ΠΡΠ»ΠΎ ΠΎΠ±Π½Π°ΡΡΠΆΠ΅Π½ΠΎ Π΄Π²ΠΎΠΉΠ½ΠΎΠ΅ ΡΠ²Π΅Π»ΠΈΡΠ΅Π½ΠΈΠ΅ ΡΠ²Π΅ΡΠ΄ΠΎΡΡΠΈ, ΡΠ½ΠΈΠΆΠ΅Π½ΠΈΠ΅ ΠΈΠ·Π½ΠΎΡΠ° ΠΈ ΡΠ²Π΅Π»ΠΈΡΠ΅Π½ΠΈΠ΅ ΡΠΎΠΏΡΠΎΡΠΈΠ²Π»Π΅Π½ΠΈΡ ΡΡΡΠ°Π»ΠΎΡΡΠΈ, ΡΡΠΎ Π±ΡΠ»ΠΎ ΡΠ²ΡΠ·Π°Π½ΠΎ Ρ ΡΠΎΡΠΌΠΈΡΠΎΠ²Π°Π½ΠΈΠ΅ΠΌ ΠΌΠ°Π»ΠΎΠ΄ΠΈΡΠΏΠ΅ΡΡΠ½ΠΎΠ³ΠΎ Π½ΠΈΡΡΠΈΠ΄Π°, ΠΊΠ°ΡΠ±ΠΎΠ½ΠΈΡΡΠΈΠ΄Π°, ΠΈ ΠΈΠ½ΡΠ΅ΡΠΌΠ΅ΡΠ°Π»Π»ΠΈΠ΄Π½ΡΡ
ΡΠ°Π·.The paper presents new results on investigation of structure and physical-mechanical properties of near
surface layers of titanium alloys after (W+, Mo+) ion implantation and subsequent thermal annealing under 550 C for 2 h. Using back scattering (RBS) of helium ions and protons, scanning electron microscopy (SEM) with microanalysis (EDS), (WDS), proton (ion) induced X-ray emission (PIXE), X-ray
phase analysis (XRD) with a grazing incidence geometry (0.5 angle), measurements of nanohardness and elastic modulus, friction wear (cylinder-plate), measurements of corrosion resistance in a salt solution, we investigated the VT-6 samples, and determined their fatigue resistance under cyclic loads.
Double increase of hardness, decrease of wear and increased fatigue resistance were found, which was related to the formation of small dispersion (nanodimension) nitride, carbonitride, and intermetalloid phases
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