Dielectric resonator in rectangular ??(102) cavity for electron paramagnetic resonance study of thin films

The improved compared to a rectangular TE(102 )cavity geometry of a dielectric resonator (DR) suitable for studying thin films and coatings has been calculated and experimentally verified. It is shown that electron paramagnetic resonance (EPR) signal of SiOx films can be enhanced by using as the DR of two rectangular parallelepipeds fabricated from BaTi4O9 + 8.5% ZnO ceramics (epsilon=36) with dimension of 5.64x5.5 x 5.9 mm(3 )and a gap of up to 0.5 mm between them. Located inside a standard rectangular metal TE(102 )cavity of the X-band EPR spectrometer, the DR increases the filling factor by 5-12 times depending on the size of a sample studied. The experimental use of the DR allows to increase the EPR signal of the 950 nm SiOx thin film by a factor of approximately 4.Funding Agencies|National Academy of Sciences of Ukraine [0118U002317, 0118U002317s]; Swedish Foundation for Strategic Research (SSF) [UKR22-0040]</p