1,546 research outputs found
Thin, high atomic weight refractory film deposition for diffusion barrier, adhesion layer, and seed layer applications
Thin, nearly conformal films are required for semiconductor applications to function as diffusion barriers, adhesion layers and seed layers within trenches and vias. The deposition of high mass refractory films with conventional, noncollimated magnetron sputtering at low pressures shows better-than-expected conformality which is dependent on the degree of directionality of the depositing atoms: the conformality increases as the directionality increases. The primary cause appears to be a strongly angle-dependent reflection coefficient for the depositing metal atoms. As the deposition is made more directional by increasing the cathode-to-sample distance, the depositing atoms are more likely to reflect from the steep sidewalls, leading to better conformality as well as a less columnar film structure. © 1996 American Vacuum Society.S. M. Rossnagel et al., Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 14, 1819 (1996) https://doi.org/10.1116/1.58856
Simple Behavior of Primary Cross Sections for Low Mass Particles in p-pbar Collisions at y=0 and sqrt(s)=1.8 TeV
A set of inclusive cross sections at zero rapidity is presented for p-pbar
interactions at center of mass energy sqrt(s)=1.8 TeV. Six particle cross
sections are corrected for secondary contributions from decays of higher mass
resonances in order to produce a set of primary cross sections. The primary
cross sections per spin state are well described by d(sigma^p)/dy|_(y=0)=
0.721*(pi*lambdabar_(pi)^2)*exp(-m/T), where m is the particle rest mass,
T=hbar*c/r_h, and r_h=0.97 fm. The deuterium production cross section is also
described if r_h is replaced by r_A=r_h*A^(1/3). The same exponential in m and
T describes primary charm fractions in e+e- collisions at least up to the J/Psi
mass. There is no significant evidence for strangeness or charm suppression if
only primary production of light hadrons is considered. There is evidence that
the primary cross section for each particle may have the same value for pp and
pbar-p collisions and that it may have nearly constant values between
sqrt(s)=63 GeV and sqrt(s)=1800 GeV. Fits to the final state transverse momenta
of the particles using a gas model favor a temperature T=132 MeV, a chemical
potential mu=129 MeV, and a transverse flow of the gas with beta_f=0.27.Comment: 20 pages, 18 figure
Combined QCD and electroweak analysis of HERA data
A simultaneous fit of parton distribution functions (PDFs) and electroweak
parameters to HERA data on deep inelastic scattering is presented. The input
data are the neutral current and charged current inclusive cross sections which
were previously used in the QCD analysis leading to the HERAPDF2.0 PDFs. In
addition, the polarisation of the electron beam was taken into account for the
ZEUS data recorded between 2004 and 2007. Results on the vector and
axial-vector couplings of the Z boson to u- and d-type quarks, on the value of
the electroweak mixing angle and the mass of the W boson are presented. The
values obtained for the electroweak parameters are in agreement with Standard
Model predictions.Comment: 32 pages, 10 figures, accepted by Phys. Rev. D. Small corrections
from proofing process and small change to Fig. 12 and Table
Limits on the effective quark radius from inclusive scattering at HERA
The high-precision HERA data allows searches up to TeV scales for Beyond the
Standard Model contributions to electron-quark scattering. Combined
measurements of the inclusive deep inelastic cross sections in neutral and
charged current scattering corresponding to a luminosity of around 1
fb have been used in this analysis. A new approach to the beyond the
Standard Model analysis of the inclusive data is presented; simultaneous
fits of parton distribution functions together with contributions of "new
physics" processes were performed. Results are presented considering a finite
radius of quarks within the quark form-factor model. The resulting 95% C.L.
upper limit on the effective quark radius is cm.Comment: 10 pages, 4 figures, accepted by Phys. Lett.
Search for a narrow baryonic state decaying to and in deep inelastic scattering at HERA
A search for a narrow baryonic state in the and
system has been performed in collisions at HERA with the ZEUS detector
using an integrated luminosity of 358 pb taken in 2003-2007. The search
was performed with deep inelastic scattering events at an centre-of-mass
energy of 318 GeV for exchanged photon virtuality, , between 20 and 100
. Contrary to evidence presented for such a state around 1.52
GeV in a previous ZEUS analysis using a sample of 121 pb taken in
1996-2000, no resonance peak was found in the invariant-mass
distribution in the range 1.45-1.7 GeV. Upper limits on the production cross
section are set.Comment: 16 pages, 4 figures, accepted by Phys. Lett. B. Minor changes from
journal reviewing process, including a small correction to figure
Measurement of the cross-section ratio sigma_{psi(2S)}/sigma_{J/psi(1S)} in deep inelastic exclusive ep scattering at HERA
The exclusive deep inelastic electroproduction of and
at an centre-of-mass energy of 317 GeV has been studied with the ZEUS
detector at HERA in the kinematic range GeV,
GeV and GeV, where is the photon virtuality, is the
photon-proton centre-of-mass energy and is the squared four-momentum
transfer at the proton vertex. The data for GeV were taken in
the HERA I running period and correspond to an integrated luminosity of 114
pb. The data for GeV are from both HERA I and HERA II
periods and correspond to an integrated luminosity of 468 pb. The decay
modes analysed were and for the
and for the . The cross-section ratio
has been measured as a function of
and . The results are compared to predictions of QCD-inspired
models of exclusive vector-meson production.Comment: 24 pages, 8 figure
Measurement of neutral current e+/-p cross sections at high Bjorken x with the ZEUS detector
The neutral current e+/-p cross section has been measured up to values of
Bjorken x of approximately 1 with the ZEUS detector at HERA using an integrated
luminosity of 187 inv. pb of e-p and 142 inv. pb of e+p collisions at sqrt(s) =
318GeV. Differential cross sections in x and Q2, the exchanged boson
virtuality, are presented for Q2 geq 725GeV2. An improved reconstruction method
and greatly increased amount of data allows a finer binning in the high-x
region of the neutral current cross section and leads to a measurement with
much improved precision compared to a similar earlier analysis. The
measurements are compared to Standard Model expectations based on a variety of
recent parton distribution functions.Comment: 39 pages, 9 figure
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Vertex spectrometer of the multiparticle Argo spectrometer system at BNL
Constraints on the χ_(c1) versus χ_(c2) polarizations in proton-proton collisions at √s = 8 TeV
The polarizations of promptly produced χ_(c1) and χ_(c2) mesons are studied using data collected by the CMS experiment at the LHC, in proton-proton collisions at √s=8 TeV. The χ_c states are reconstructed via their radiative decays χ_c → J/ψγ, with the photons being measured through conversions to e⁺e⁻, which allows the two states to be well resolved. The polarizations are measured in the helicity frame, through the analysis of the χ_(c2) to χ_(c1) yield ratio as a function of the polar or azimuthal angle of the positive muon emitted in the J/ψ → μ⁺μ⁻ decay, in three bins of J/ψ transverse momentum. While no differences are seen between the two states in terms of azimuthal decay angle distributions, they are observed to have significantly different polar anisotropies. The measurement favors a scenario where at least one of the two states is strongly polarized along the helicity quantization axis, in agreement with nonrelativistic quantum chromodynamics predictions. This is the first measurement of significantly polarized quarkonia produced at high transverse momentum
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