Calibration of positioning microsystems with subatomic accuracy

Multidimensional positioning, measuring and manipulation with a spatial resolution in the subatomic range are an upcoming demand in the area of nanotechnology. Nanopositioning and measuring machines (NMM) enable to measure and manipulate objects within a large addressable 3D-range of up to a few hundred millimetre in each dimension with a specified spatial resolution of down to 0.1 nm [1]. New approaches are needed to extend the potential of NMM technology to even smaller scales. In previous work [2] a proof-of-concept positioning system has been designed to achieve reproducibility and resolution for precise motion on subatomic scale. In a first approach, a scanning probe microscope will be used to measure a nanosized periodic lattice that serves as a scale for the position according to [3]. Here, we present a microsystem design with an addressable positioning range of ±100 μm that will carry the lattice structure. In order to precisely control the motion, the electrostatic drive and position sensor characteristics of the demonstrator must be calibrated thoroughly by means of an optical measuring system. A focused, range-resolved fibre-optic laser interferometer is comprised as the calibration standard. An uncertainty estimation for the measurement setup is carried out. It is shown that the desired positioning accuracy for the first tip- and grating-based setup can be achieved with the presented microsystems

A laser beam deflection system for heat treatments in large scale additive manufacturing

Large Scale Additive Manufacturing (LSAM) based on plastic raw material is known for high material output and thus, increased productivity. For an improvement of part properties LSAM is combined with a laser process. Depending on the deposition direction, the laser beam needs to be repositioned to reach the space between two adjacent and consecutively printed strands. Therefore, an optomechanical design is required that allows variable orientation of the laser beam. It consists of a combination of an elliptical, tube-like mirror with an additional, rotatable flat mirror in one of its focal axes. The deflected laser beam hits the second focal axis where the extruder nozzle is located. Thus, > 75% of the nozzle circumference is covered during a laser beam treatment. Both mirrors are individually designed custom-made parts. Its functional verification lays the foundation for an improved additive manufacturing process, which aims to homogenize the component structures to improve the mechanical properties of 3D-printed components

Tolerancing of centering of a reflective dual field-of-view optical system based on Alvarez-Principle

A new dual state reflective optical relay system based on the Alvarez principle is proposed, which can be used for remote sensing applications. Using the solution found, two different object fields can be imaged using the same optical system. A Three-Mirror-Anastigmat telescope (TMA) is proposed with an intermediate image plane that incorporates a double reflective freeform subsystem as a relay system. By mechanically moving two freeform mirror substrates, this subsystem allows for a discrete change in the total focal length. A deep understanding of the effects of geometric deviations on the system is a crucial prerequisite for ensuring mechanical feasibility and stable optical imaging performance. For this reason, this article focuses on the method and results of tolerancing the subsystem

Design of an electrostatic balance mechanism to measure optical power of 100 kW

A new instrument is required to accommodate the need for increased portability and accuracy in laser power measurement above 100 W. Reflection and absorption of laser light provide a measurable force from photon momentum exchange that is directly proportional to laser power, which can be measured with an electrostatic balance traceable to the SI. We aim for a relative uncertainty of $10^{-3}$ with coverage factor $k=2$. For this purpose, we have designed a monolithic parallelogram 4-bar linkage incorporating elastic circular notch flexure hinges. The design is optimized to address the main factors driving force measurement uncertainty from the balance mechanism: corner loading errors, balance stiffness, stress in the flexure hinges, sensitivity to vibration, and sensitivity to thermal gradients. Parasitic rotations in the free end of the 4-bar linkage during arcuate motion are constrained by machining tolerances. An analytical model shows this affects the force measurement less than 0.01 percent. Incorporating an inverted pendulum reduces the stiffness of the system without unduly increasing tilt sensitivity. Finite element modeling of the flexures is used to determine the hinge orientation that minimizes stress which is therefore expected to minimize hysteresis. Thermal effects are mitigated using an external enclosure to minimize temperature gradients, although a quantitative analysis of this effect is not carried out. These analyses show the optimized mechanism is expected to contribute less than $10^{-3}$ relative uncertainty in the final laser power measurement.Comment: 11 pages, 9 figures, accepted for publication in IEEE Transactions on Instrumentation and Measuremen

Experimental setup for the investigation of reproducibility of novel tool changing systems in nanofabrication machines

Nanomeasuring machines developed at the Technische Universität Ilmenau enable three-dimensional measurements and manufacturing processes with the lowest uncertainties. Due to the requirements for these processes, a highly reproducible and long-term stable tool changing system is needed. For this purpose, kinematically determined couplings are widely used. The state-of-the-art investigations on those are not sufficient for the highest demands on the reproducibility required for this application. A theoretical determination of the reproducibility based on analytical or numerical methods is possible, however not in the desired nanometer range. Due to this, a measurement setup for the determination of the reproducibility in five degrees of freedom with nanometer uncertainty was developed. First, potential measuring devices are systematically examined and measurement principles were developed out of this. A three-dimensional vector-based uncertainty analysis is performed to prove the feasibility of the measurement principle and provides a basis for further design. As a result, a translatory measurement uncertainty of 10 nm and a rotatory uncertainty of 11 nrad can be reached. Afterwards, the measurement setup is designed, focusing on the metrological frame and the lift-off device. The developed setup exceeds the uncertainties of the measurement setups presented in the state-of-the-art by an order of magnitude, allowing new in-depth investigations of the reproducibility of kinematic couplings