24 research outputs found

    Process Variability in Micro-Embossing

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    A promising technique for the large-scale manufacture of micro-fluidic devices and photonic devices is hot embossing of polymers such as PMMA. Micro-embossing is a deformation process where the workpiece material is heated to permit easier material flow and then forced over a planar patterned tool. While there has been considerable, attention paid to process feasibility very little effort has been put into production issues such as process capability and eventual process control. In this paper, we present initial studies aimed at identifying the origins and magnitude of variability for embossing features at the micron scale in PMMA. Test parts with features ranging from 3.5- 630 µm wide and 0.9 µm deep were formed. Measurements at this scale proved very difficult, and only atomic force microscopy was able to provide resolution sufficient to identify process variations. It was found that standard deviations of widths at the 3-4 µm scale were on the order of 0.5 µm leading to a coefficient of variation as high as 13%. Clearly, the transition from test to manufacturing for this process will require understanding the causes of this variation and devising control methods to minimize its magnitude over all types of parts.Singapore-MIT Alliance (SMA

    Design of a micro-FTS for process characterization of an HMB machine

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    Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2006."June 2006."Includes bibliographical references (p. 279-284).Growth in industrial, commercial, and medical applications for micro-fluidic devices has fueled heightened research and development into micro-fluidic design, materials, and increasingly manufacturing. Polymers (Poly(methyl methacrylate)-PMMA in particular) are the current material of choice given their low cost, wide range of material properties, and biocompatibility. Given most fabrication processes have focused on hard materials for the semiconductor industry, an alternate set of processes such as hot micro-embossing (HME) have received increased attention as manufacturing processes for high-volume polymer-based micro-fluidic production. An understanding of the equipment, process physics, control strategy, and metrology for part fabrication are required when moving from the lab to production level. An initial statistical analysis of PMMA parts fabricated on the first generation HME system showed the need to: (1) design a new HME system; and (2) establish alternative methods for characterizing micro-fluidic parts.(cont.) A second generation HME system was constructed with fellow Manufacturing and Process Control Laboratory (MPCL) graduate students and a FTS (Functional Testing System) was developed to test whether HME parts from the new HME system were capable of flowing fluid and establish output metrics for process control based on fluid pressure and flow rate. The new characterization method was shown to have re-registration error as low as + 1.03% (overall RMS uncertainty of ±1.51%). The experimental data from tests run on the FTS fit a fluid model developed to the expected accuracy of --± 10% for all but the lowest aspect ratio micro-channel. Moreover, the FTS results were consistent with optical scans of a series of parts made with varying HME parameters. The FTS was able to detect differences that a few isolated optical scans could not. The FTS provided a bulk quantity to assess the geometry of the channel rather than at a specified location. These results and the deficiencies in existing metrology techniques warrant further exploration into functional-based testing for micro-fluidic devices to parallel well established testing methods in place in the IC industry. Functional testing does not have the capacity to replace traditional metrology; however, it can add an important output metric-a quantitative measure of the output parts fluid flow.by Kunal H. Thaker.S.M

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    In this project, we attempt to approach the solution to system security by researching into techniques that address system threats by analyzing the behaviors of applications. The major goal of this project will be to come up with behavior based intelligent system that can automate the system security, appropriately and without any significant administrator help. The aim of this project will be preventing false alarms and generate a correct warning based on the behavior intelligence. The focus will be to monitor the system call sequences of the process, and identify malicious activities and threats that take place on the system. The protection system would monitor the system activity; identify malicious activities and threats through the content analysis. One of the main tasks would also be to minimize false positives by researching on various normal activities in the system and distinguish clearly what is an unacceptable behavior. As the part of this project, behavior of some of the popular applications like Internet Explorer, Mozilla Firefox and Outlook Express are captured by creating the learning database by running application in well controlle
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