Thickness-dependent thermal properties of amorphous insulating thin films measured by photoreflectance microscopy

In this work, we report on the measurement of the thermal conductivity of thin insulating films of SiO2 obtained by thermal oxidation, and Al2O3 grown by atomic layer deposition (ALD), both on Si wafers. We used photoreflectance microscopy to determine the thermal properties of the films as a function of thickness in the 2 nm to 1000 nm range. The effective thermal conductivity of the Al2O3 layer is shown to decrease with thickness down to 70% for the thinnest layers. The data were analyzed upon considering that the change in the effective thermal conductivity corresponds to an intrinsic thermal conductivity associated to an additional interfacial thermal resistance. The intrinsic conductivity and interfacial thermal resistance of SiO2 were found to be equal to 0.95 W/m·K and 5.1 × 10− 9 m2K/W respectively; those of Al2O3 were found to be 1.56 W/m·K and 4.3 × 10− 9 m2K/W

Label-free segmentation of co-cultured cells on a nanotopographical gradient

The function and fate of cells is influenced by many different factors, one of which is surface topography of the support culture substrate. Systematic studies of nanotopography and cell response have typically been limited to single cell types and a small set of topographical variations. Here, we show a radical expansion of experimental throughput using automated detection, measurement, and classification of co-cultured cells on a nanopillar array where feature height changes continuously from planar to 250 nm over 9 mm. Individual cells are identified and characterized by more than 200 descriptors, which are used to construct a set of rules for label-free segmentation into individual cell types. Using this approach we can achieve label-free segmentation with 84% confidence across large image data sets and suggest optimized surface parameters for nanostructuring of implant devices such as vascular stents

Injection moulding of ultra high aspect ratio nanostructures using coated polymer tooling

Replication-based nanofabrication techniques offer rapid, cost effective ways to produce nanostructured devices for a host of applications in engineering, biological research and beyond. In this work we developed a method to replicate ultra high aspect ratio (UHAR) nanopillars by injection molding with failure rates lower than one pillar in a thousand. We provide a review of the literature in which replication of difficult micro- and nanostructures is facilitated through the use of different tooling materials and surface coatings, before describing the non-adhesive surface coatings which we used to translate a previously developed technique from low to high aspect ratios. This development involved a systematic study of nine different surface coatings on polymer tooling initially patterned by nanoimprint lithography. Using this method we were able to produce injection moulded pillar-like nanostructures with aspect ratios of up to 20:1, more than 6 times that reported elsewhere in the literature for this type of feature

Label-Free Segmentation of Co-cultured Cells on a Nanotopographical Gradient

The function and fate of cells is influenced by many different factors, one of which is surface topography of the support culture substrate. Systematic studies of nanotopography and cell response have typically been limited to single cell types and a small set of topographical variations. Here, we show a radical expansion of experimental throughput using automated detection, measurement, and classification of co-cultured cells on a nanopillar array where feature height changes continuously from planar to 250 nm over 9 mm. Individual cells are identified and characterized by more than 200 descriptors, which are used to construct a set of rules for label-free segmentation into individual cell types. Using this approach we can achieve label-free segmentation with 84% confidence across large image data sets and suggest optimized surface parameters for nanostructuring of implant devices such as vascular stents

Flexible inserts for injection molding of complex micro-structured polymer components

Mass production of microfluidic devices commonly relies on injection molding. Injection molding requires a master surface made using micro or nanofabrication. Conventionally, electroplating from a silicon master is used for mold insert production, but this is expensive and cannot be used with masters produced via the Bosch process as interlocking of the scalloping between polymer and metal insert hinders part ejection. Here, an alternative to the electroplating process is developed by adapting a nanoimprint route to produce flexible micro-structured polymer inserts capable of molding using a Bosch process-produced master. An optimized fabrication approach using silicon masters with smooth sidewalls (produced using the mixed process) is used to characterize the limits of the process. Aspect ratios of 1 and below are successfully replicated. Feature spacings down to 20 µm are successfully produced with minimal variation between repeated parts. Masters produced using two different Bosch etches exhibiting both coarse and fine nanometer scalloping are also studied. Parts are successfully ejected with retained nanometer scalloping in all samples although inlay damage occurred after >10 replicas. A proof-of-concept microfluidic device is successfully produced vindicating the use of this approach as an efficient and cost-effective approach for the rapid prototyping of complex micro-structured designs

Injection moulding of ultra high aspect ratio nanostructures using coated polymer tooling

Replication-based nanofabrication techniques offer rapid, cost effective ways to produce nanostructured devices for a host of applications in engineering, biological research and beyond. In this work we developed a method to replicate ultra high aspect ratio (UHAR) nanopillars by injection molding with failure rates lower than one pillar in a thousand. We provide a review of the literature in which replication of difficult micro- and nanostructures is facilitated through the use of different tooling materials and surface coatings, before describing the non-adhesive surface coatings which we used to translate a previously developed technique from low to high aspect ratios. This development involved a systematic study of nine different surface coatings on polymer tooling initially patterned by nanoimprint lithography. Using this method we were able to produce injection moulded pillar-like nanostructures with aspect ratios of up to 20:1, more than 6 times that reported elsewhere in the literature for this type of feature