Estudo da influência da temperatura de implantação na fotoluminescência de nanocristais de silício

Neste trabalho estudamos a influência da temperatura de implantação iônica nas propriedades estruturais e de luminescência de nanocristais de Si em matriz de SiO2. Essas nanoestruturas, formadas por meio de implantação de Si em substratos de SiO2 mantidos entre 25 e 800 oC e tratados à temperaturas 1100°C, revelam uma intensa emissão de fotoluminescência (PL) à temperatura ambiente (RT). Os espectros de PL obtidos são compostos por duas bandas superpostas, uma na região do vermelho (l ~780 nm) e outra no infravermelho próximo (l ~ 1050 nm). Essa estrutura de PL é claramente revelada quando os espectros são medidos em regime linear de excitação (20 mW/cm2), onde temos a contribuição integral de toda a distribuição de nanopartículas. Verificamos que a temperatura de implantação, a partir de 400 oC, tem um efeito direto tanto na intensidade, quanto na posição relativa das bandas de PL. Análises de TEM revelam que amostras implantadas a quente apresentam uma distribuição de tamanhos de nanopartículas mais alargada e com diâmetros médios maiores em relação às implantadas a RT. Enquanto a banda localizada na região de l maior segue um comportamento característico de emissão por efeitos de confinamento quântico, a emissão da banda na região de l ~780 nm está associada à recombinação radiativa em estados interfaciais. De modo a investigar sistematicamente nosso sistema, realizamos um estudo do mesmo em função da fluência de implantação, temperatura e tempo de recozimento, cujos resultados mostram que a forma de linha do espectro de PL e sua intensidade são fortemente dependentes destas variáveis. A realização de recozimentos posteriores das amostras em uma mistura padrão contendo hidrogênio intensifica consideravelmente a emissão da PL pela passivação de ligações pendentes em nanocristais que eram opticamente inativos. O aumento relativo da PL se apresentou mais significativo para a região de emissão de nanocristais maiores, tendo uma dependência com a temperatura de implantação e também com a duração do tratamento térmico subseqüente à implantação. Além disso, investigamos também a influência do ambiente de recozimento na restauração da PL após um processo de pós-irradiação das amostras. Os resultados indicam que tratamentos a 900 oC em atmosfera de N2 são mais eficientes na recuperação de ambas as bandas de PL do que em Ar. O processo de recristalização dos nanocristais ocorre em ambos ambientes de recozimento sem um crescimento adicional dos mesmos. A melhoria da PL apresentada pelas amostras tratadas em N2 é devido a um efeito de passivação adicional, além da pura relaxação de tensões como ocorre no caso dos recozimentos em Ar.In this work we have studied the influence of the ion implantation temperature on the structural and luminescence properties of Si nanocrystals embedded in a SiO2 matrix. Such nanostructures, formed by means of Si implantation in SiO2 substrates kept between 25 and 800 oC and post-annealed at temperatures 1100°C, reveal an intense room temperature (RT) photoluminescence (PL) emission. The obtained PL spectra are composed by two superimposed bands; one peaked at the red (l ~780 nm) and another one at the near infrared (l ~1050 nm) region of the spectrum. This PL structure is fully revealed when the spectra are obtained in a linear regime of excitation (20 mW/cm2), where we can observe the total contribution of the whole nanoparticles distribution. We verify that the implantation temperature, in particular from 400 oC implantations, has a direct effect on the intensity as well as on the relative PL bands position. TEM analyses reveal that hot implanted samples, after annealing, present a broader nanoparticle size distribution with larger mean size diameters as compared to those obtained at RT implantation. The PL band located at the long wavelength side of the spectrum follows a behavior attributed to quantum confinement effects. On the other hand, the PL emission band peaked at l ~780 nm is associated to radiative recombination in interfacial states. In order to investigate the present system we have performed a systematic study, where we changed the implantation fluence, annealing time and temperature. It is shown that all these parameters have a strong influence on the PL spectra. Samples post-annealed in a forming gas atmosphere have their PL emission considerably intensified by the hydrogen passivation of optically inactive Si nanocrystals. The relative PL increase was more significant for the larger nanocrystals PL emission region. This effect was strongly dependent with the implantation temperature and also with the annealing time after the implantation. Moreover, we have performed a study about the annealing ambient influence on the PL recovery after an irradiation process of the samples. The results show that post-annealing carried out at 900 oC fully recovered the original PL. However, when the thermal treatment is performed in N2 atmosphere the effect is stronger that in Ar one. The nanocrystals recrystallization process occurs in both annealing environments without an additional size increasing. The PL enhancement presented by samples annealed in N2 is due to an additional passivation effect, further than the pure stress relaxation obtained when samples are annealed in Ar atmosphere

Estudo da influência da temperatura de implantação na fotoluminescência de nanocristais de silício

Neste trabalho estudamos a influência da temperatura de implantação iônica nas propriedades estruturais e de luminescência de nanocristais de Si em matriz de SiO2. Essas nanoestruturas, formadas por meio de implantação de Si em substratos de SiO2 mantidos entre 25 e 800 oC e tratados à temperaturas 1100°C, revelam uma intensa emissão de fotoluminescência (PL) à temperatura ambiente (RT). Os espectros de PL obtidos são compostos por duas bandas superpostas, uma na região do vermelho (l ~780 nm) e outra no infravermelho próximo (l ~ 1050 nm). Essa estrutura de PL é claramente revelada quando os espectros são medidos em regime linear de excitação (20 mW/cm2), onde temos a contribuição integral de toda a distribuição de nanopartículas. Verificamos que a temperatura de implantação, a partir de 400 oC, tem um efeito direto tanto na intensidade, quanto na posição relativa das bandas de PL. Análises de TEM revelam que amostras implantadas a quente apresentam uma distribuição de tamanhos de nanopartículas mais alargada e com diâmetros médios maiores em relação às implantadas a RT. Enquanto a banda localizada na região de l maior segue um comportamento característico de emissão por efeitos de confinamento quântico, a emissão da banda na região de l ~780 nm está associada à recombinação radiativa em estados interfaciais. De modo a investigar sistematicamente nosso sistema, realizamos um estudo do mesmo em função da fluência de implantação, temperatura e tempo de recozimento, cujos resultados mostram que a forma de linha do espectro de PL e sua intensidade são fortemente dependentes destas variáveis. A realização de recozimentos posteriores das amostras em uma mistura padrão contendo hidrogênio intensifica consideravelmente a emissão da PL pela passivação de ligações pendentes em nanocristais que eram opticamente inativos. O aumento relativo da PL se apresentou mais significativo para a região de emissão de nanocristais maiores, tendo uma dependência com a temperatura de implantação e também com a duração do tratamento térmico subseqüente à implantação. Além disso, investigamos também a influência do ambiente de recozimento na restauração da PL após um processo de pós-irradiação das amostras. Os resultados indicam que tratamentos a 900 oC em atmosfera de N2 são mais eficientes na recuperação de ambas as bandas de PL do que em Ar. O processo de recristalização dos nanocristais ocorre em ambos ambientes de recozimento sem um crescimento adicional dos mesmos. A melhoria da PL apresentada pelas amostras tratadas em N2 é devido a um efeito de passivação adicional, além da pura relaxação de tensões como ocorre no caso dos recozimentos em Ar.In this work we have studied the influence of the ion implantation temperature on the structural and luminescence properties of Si nanocrystals embedded in a SiO2 matrix. Such nanostructures, formed by means of Si implantation in SiO2 substrates kept between 25 and 800 oC and post-annealed at temperatures 1100°C, reveal an intense room temperature (RT) photoluminescence (PL) emission. The obtained PL spectra are composed by two superimposed bands; one peaked at the red (l ~780 nm) and another one at the near infrared (l ~1050 nm) region of the spectrum. This PL structure is fully revealed when the spectra are obtained in a linear regime of excitation (20 mW/cm2), where we can observe the total contribution of the whole nanoparticles distribution. We verify that the implantation temperature, in particular from 400 oC implantations, has a direct effect on the intensity as well as on the relative PL bands position. TEM analyses reveal that hot implanted samples, after annealing, present a broader nanoparticle size distribution with larger mean size diameters as compared to those obtained at RT implantation. The PL band located at the long wavelength side of the spectrum follows a behavior attributed to quantum confinement effects. On the other hand, the PL emission band peaked at l ~780 nm is associated to radiative recombination in interfacial states. In order to investigate the present system we have performed a systematic study, where we changed the implantation fluence, annealing time and temperature. It is shown that all these parameters have a strong influence on the PL spectra. Samples post-annealed in a forming gas atmosphere have their PL emission considerably intensified by the hydrogen passivation of optically inactive Si nanocrystals. The relative PL increase was more significant for the larger nanocrystals PL emission region. This effect was strongly dependent with the implantation temperature and also with the annealing time after the implantation. Moreover, we have performed a study about the annealing ambient influence on the PL recovery after an irradiation process of the samples. The results show that post-annealing carried out at 900 oC fully recovered the original PL. However, when the thermal treatment is performed in N2 atmosphere the effect is stronger that in Ar one. The nanocrystals recrystallization process occurs in both annealing environments without an additional size increasing. The PL enhancement presented by samples annealed in N2 is due to an additional passivation effect, further than the pure stress relaxation obtained when samples are annealed in Ar atmosphere

Optical and structural properties of Si nanocrystals produced by Si hot implantation

It was already demonstrated that Si hot implantation followed by high-temperature annealing induces the formation of Si nanocrystals Si NCs which when excited in a linear excitation regime present two photoluminescence PL bands at 780 and 1000 nm . We have undertaken the present work in order to investigate three features: First, to determine the origin of each band. With this aim we have changed the implantation fluence and the high-temperature annealing time. Second, to investigate the influence of the postannealing atmosphere on the PL recovering process after bombarding the Si NCs. Third, we have annealed the as-produced Si NCs in a forming gas FG atmosphere in order to observe the PL behavior of each band. The results have shown that the 780 nm PL band has its origin in radiative interfacial states, while the 1000 nm one is due to quantum size effects. From the experiments we have concluded that the PL recovery after the Si NCs irradiation strongly depends on the type of postannealing atmosphere. Finally, it was found that the FG treatment strongly affects the line shape of the PL spectrum

Photoluminescence behavior of Si nanocrystals as a function of the implantation temperature and excitation power density

In this work we present a study of photoluminescence PL on Si nanocrystals NC produced by ion implantation on SiO2 targets at temperatures ranging between room temperature and 800 °C and subsequently annealed in N2 atmosphere. The PL measurements were performed at low excitation power density (20 mW/cm²) in order to avoid nonlinear effects. Broad PL spectra were obtained, presenting a line-shape structure that can be reproduced by two superimposed peaks at around 780 and 950 nm. We have observed that both PL intensity and line-shape change by varying the annealing as well as the implantation temperatures. Implantations performed at 400 °C or higher produce a remarkable effect in the PL line shape, evidenced by a strong redshift, and a striking intensity increase of the peak located at the long-wavelength side of the PL spectrum. In addition we have studied the PL dependence on the excitation power density (from 0.002 to 15 W/cm²) . The samples with broad NC size distribution containing large grains, as revealed by transmission electron microscopy observations presented a PL spectrum whose line shape was strongly dependent on the excitation power density. While high excitation power densities (saturation regime) induce only the short-wavelength part of the PL spectrum, low excitation power densities bring out the appearance of the hidden long-wavelength part of the emission. The present results are explained by current models

Photoluminescence from Si nanocrystals induced by high-temperature implantation in SiO/sub 2/

A systematic study of photoluminescence (PL) behavior of Si nanocrystals in SiO2 obtained by ion implantation in a large range of temperatures (-2200 up to 800°C), and subsequent furnace annealing in N2 ambient was performed. A PL signal in the wavelength range 650–1000 nm was observed. The PL peak wavelength and intensity are dependent on the fluence, implantation and annealing temperatures. It was found that after annealing at 1100°C, both implantations of 1.5x1017 Si/cm² at room temperature or 0.5x1017 Si/cm² at 400°C result in the same PL peak intensity. By varying the implantation temperature we can achieve the same PL efficiency with lower fluences showing that hot implantations play an important role for initial formation of the nanocrystals. The PL intensity evolution as a function of the annealing time was also studied. As the implantation temperature was increased, larger mean size Si nanocrystals were observed by means of dark-field transmission electron microscopy analysis

Photoluminescence from Si nanocrystals induced by high-temperature implantation in SiO/sub 2/

A systematic study of photoluminescence (PL) behavior of Si nanocrystals in SiO2 obtained by ion implantation in a large range of temperatures (-2200 up to 800°C), and subsequent furnace annealing in N2 ambient was performed. A PL signal in the wavelength range 650–1000 nm was observed. The PL peak wavelength and intensity are dependent on the fluence, implantation and annealing temperatures. It was found that after annealing at 1100°C, both implantations of 1.5x1017 Si/cm² at room temperature or 0.5x1017 Si/cm² at 400°C result in the same PL peak intensity. By varying the implantation temperature we can achieve the same PL efficiency with lower fluences showing that hot implantations play an important role for initial formation of the nanocrystals. The PL intensity evolution as a function of the annealing time was also studied. As the implantation temperature was increased, larger mean size Si nanocrystals were observed by means of dark-field transmission electron microscopy analysis