Method for sequentially processing a multi-level interconnect circuit in a vacuum chamber

An apparatus is disclosed which includes a vacuum system having a vacuum chamber in which wafers are processed on rotating turntables. The vacuum chamber is provided with an RF sputtering system and a dc magnetron sputtering system. A gas inlet introduces various gases to the vacuum chamber and creates various gas plasma during the sputtering steps. The rotating turntables insure that the respective wafers are present under the sputtering guns for an average amount of time such that consistency in sputtering and deposition is achieved. By continuous and sequential processing of the wafers in a common vacuum chamber without removal, the adverse affects of exposure to atmospheric conditions are eliminated providing higher quality circuit contacts and functional device

Method for sequentially processing a multi-level interconnect circuit in a vacuum chamber

The processing of wafer devices to form multilevel interconnects for microelectronic circuits is described. The method is directed to performing the sequential steps of etching the via, removing the photo resist pattern, back sputtering the entire wafer surface and depositing the next layer of interconnect material under common vacuum conditions without exposure to atmospheric conditions. Apparatus for performing the method includes a vacuum system having a vacuum chamber in which wafers are processed on rotating turntables. The vacuum chamber is provided with an RF sputtering system and a DC magnetron sputtering system. A gas inlet is provided in the chamber for the introduction of various gases to the vacuum chamber and the creation of various gas plasma during the sputtering steps

A procedure used for a ground truth study of a land use map of North Alabama generated from LANDSAT data

A land use map of a five county area in North Alabama was generated from LANDSAT data using a supervised classification algorithm. There was good overall agreement between the land use designated and known conditions, but there were also obvious discrepancies. In ground checking the map, two types of errors were encountered - shift and misclassification - and a method was developed to eliminate or greatly reduce the errors. Randomly selected study areas containing 2,525 pixels were analyzed. Overall, 76.3 percent of the pixels were correctly classified. A contingency coefficient of correlation was calculated to be 0.7 which is significant at the alpha = 0.01 level. The land use maps generated by computers from LANDSAT data are useful for overall land use by regional agencies. However, care must be used when making detailed analysis of small areas. The procedure used for conducting the ground truth study together with data from representative study areas is presented

ERTS-1 observations of sea surface circulation and sediment transport, Cook Inlet, Alaska

Cook Inlet is a large tide-dominated estuary in southern Alaska. Highly turbid streams enter the upper inlet, providing an excellent tracer for circulation in the lower inlet. MSS 4 and 5 images both can be used in this area to plot sediment and pollutant trajectories, areas of (probable) commercial fish concentration, and the entire circulation regime

Active biopolymer networks generate scale-free but euclidean clusters

We report analytical and numerical modelling of active elastic networks, motivated by experiments on crosslinked actin networks contracted by myosin motors. Within a broad range of parameters, the motor-driven collapse of active elastic networks leads to a critical state. We show that this state is qualitatively different from that of the random percolation model. Intriguingly, it possesses both euclidean and scale-free structure with Fisher exponent smaller than $2$. Remarkably, an indistinguishable Fisher exponent and the same euclidean structure is obtained at the critical point of the random percolation model after absorbing all enclaves into their surrounding clusters. We propose that in the experiment the enclaves are absorbed due to steric interactions of network elements. We model the network collapse, taking into account the steric interactions. The model shows how the system robustly drives itself towards the critical point of the random percolation model with absorbed enclaves, in agreement with the experiment.Comment: 6 pages, 7 figure

Schr\"{o}dinger cat state of trapped ions in harmonic and anharmonic oscillator traps

We examine the time evolution of a two level ion interacting with a light field in harmonic oscillator trap and in a trap with anharmonicities. The anharmonicities of the trap are quantified in terms of the deformation parameter $\tau$ characterizing the q-analog of the harmonic oscillator trap. Initially the ion is prepared in a Schr\"{o}dinger cat state. The entanglement of the center of mass motional states and the internal degrees of freedom of the ion results in characteristic collapse and revival pattern. We calculate numerically the population inversion I(t), quasi-probabilities $Q(t),$ and partial mutual quantum entropy S(P), for the system as a function of time. Interestingly, small deformations of the trap enhance the contrast between population inversion collapse and revival peaks as compared to the zero deformation case. For \beta =3 and $4,($ determines the average number of trap quanta linked to center of mass motion) the best collapse and revival sequence is obtained for \tau =0.0047 and \tau =0.004 respectively. For large values of \tau decoherence sets in accompanied by loss of amplitude of population inversion and for \tau \sim 0.1 the collapse and revival phenomenon disappear. Each collapse or revival of population inversion is characterized by a peak in S(P) versus t plot. During the transition from collapse to revival and vice-versa we have minimum mutual entropy value that is S(P)=0. Successive revival peaks show a lowering of the local maximum point indicating a dissipative irreversible change in the ionic state. Improved definition of collapse and revival pattern as the anharminicity of the trapping potential increases is also reflected in the Quasi- probability versus t plots.Comment: Revised version, 16 pages,6 figures. Revte

The nuclear shell effects near the r-process path in the relativistic Hartree-Bogoliubov theory

We have investigated the evolution of the shell structure of nuclei in going from the r-process path to the neutron drip line within the framework of the Relativistic Hartree-Bogoliubov (RHB) theory. By introducing the quartic self-coupling of $\omega$ meson in the RHB theory in addition to the non-linear scalar coupling of $\sigma$ meson, we reproduce the available data on the shell effects about the waiting-point nucleus $^{80}$Zn. With this approach, it is shown that the shell effects at N=82 in the inaccessible region of the r-process path become milder as compared to the Lagrangian with the scalar self-coupling only. However, the shell effects remain stronger as compared to the quenching exhibited by the HFB+SkP approach. It is also shown that in reaching out to the extreme point at the neutron drip line, a terminal situation arises where the shell structure at the magic number is washed out significantly.Comment: 18 pages (revtex), 8 ps figures, to appear in Phys. Rev.