Phosphate structure and lithium environments in lithium phosphorus oxynitride amorphous thin films

Lithium ion-conducting glasses attract wide interest for electrochemical applications like efficient energy storage devices. This work presents a structural study on involved bonding units, based on X-ray photoelectron spectroscopy and infrared spectroscopy, of lithium phosphorus oxide and oxynitride amorphous thin films prepared by RF magnetron sputtering. A thorough consideration of the mid- and far-infrared spectral regions demonstrated structural changes at the phosphate units and the lithium ion environments triggered by nitrogen incorporation and post-deposition thermal treatment. It was found that films prepared by sputtering in pure nitrogen atmosphere have about 75 % of their nitrogen atoms in sites doubly coordinated with phosphorus (P–N=P), and the rest in triply coordinated sites. It was shown also that nitrogen incorporation favors the stability of lithium ions, while annealing enhances ionic conductivity of the oxynitride films