13 research outputs found

    F-59 Characterization of Gemstones by Multiple Excitation EDXRF

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    ISSN:0885-715

    Modular Construction of Modal Logics

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    We present a modular approach to defining logics for a wide variety of state-based systems. We use coalgebras to model the behaviour of systems, and modal logics to specify behavioural properties of systems. We show that the syntax, semantics and proof systems associated to such logics can all be derived in a modular way. Moreover, we show that the logics thus obtained inherit soundness, completeness and expressiveness properties from their building blocks. We apply these techniques to derive sound, complete and expressive logics for a wide variety of probabilistic systems

    Methodology and practical application of an ArF resist model calibration

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    This paper focuses on a novel methodology for a fast and efficient resist model calibration. One of the most crucial parts when calibrating a resist model is the fitting of experimental data where up to 20 resist model parameters are varied. Although general optimization approaches such as simplex algorithms or genetic algorithms have proven suitable for many applications, they do not exploit specific properties of resist models. Therefore, we have developed a new strategy based on Design of Experiment methods which makes use of these specific characteristics. This algorithm will be outlined and then be demonstrated by applying it to the calibration of a Solid-C resist model for one ArF line/space resist. As characterizing dataset we chose: a) a Focus Exposure Matrix (FEM) for the dense array, b) linearity, c) OPE (optical proximity) curve and e) the MEEF (mask error enhancement factor) for a dense array. It turned out that a simultaneous fit of the complete data set wa s not possible by varying resist parameters only. Considering the optical parameters appeared to be crucial as well. Therefore the influence of the optical settings (illumination, projection, 3D mask effects) on the lithography process will be discussed at this point. Finally we obtained an excellent matching of model predictions and experimental results

    Analytical capabilities of laboratory, benchtop and handheld X-ray fluorescence systems for detection of metals in aqueous samples pre-concentrated with solid-phase extraction disks

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    Abstract: We aimed to achieve improved instrumental sensitivity and detection limits for the analysis of several elements (Cu, Ni, Zn, Pb and Cd) in aqueous samples with energy dispersive X-ray fluorescence spectrometry (EDXRF). The metals were pre-concentrated from aqueous solutions using commercially available organic-based solid-phase extraction (SPE) disks functionalized with iminodiacetate groups. These thin-layer organic materials provide an ideal support for XRF analysis. The elements were collected on the SPE extraction disks using a simple filtration procedure (starting with 1 L of aqueous sample) that allows direct XRF measurements to be performed in the field (in situ). We evaluated the analytical possibilities and drawbacks of using this pre-concentration procedure in combination with the following XRF configurations: a handheld unit, a benchtop EDXRF system and a high-energy polarized-beam EDXRF instrument (HE-P-EDXRF). Using the HE-P-EDXRF system, the detection limits for all metals were more than one order of magnitude lower than those attained using handheld and benchtop EDXRF instrumentation. For the detection of metal concentrations higher than similar to 20 mu g/L, however, handheld or benchtop systems remain a very good option due to their extreme simplicity of operation and low-cost, compact design. We demonstrate the application of these methodologies, using the three equipment systems, to the analysis of trace concentrations of metals in different types of aqueous samples, including tap water and waste water. (C) 2011 Elsevier B.V. All rights reserved
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