SYSTEM FOR REDUCING STRESS INDUCED EFFECTS DURINGDETERMINATION OF FLUID OPTICAL CONSTANTS

A system for determination of optical constants of liquids, including provision for reducing stress induced effects while obtaining data

SYSTEM AND METHOD ENABLING SIMULTANEOUS INVESTIGATION OF SAMPLE WITH TWO BEAMS OF ELECTROMAGNETIC RADATION

Disclosed are System and method for characterizing a System consisting of a fluid Sample on a two sided Stage, utilizing data obtained by applying, from both sides thereof, beams of electromagnetic radiation to a fluid coated Surface in a containing cell Volume. The beams can have the same or different wavelength content and/or polarization State, and can be applied at the same or different magnitude angles-of-incidence, and a third typically unpolarized beam can be applied at a normal angle-of-incidence

SYSTEM AND METHOD ENABLING SIMULTANEOUS INVESTIGATION OF SAMPLE WITH TWO BEAMS OF ELECTROMAGNETIC RADIATION

Disclosed are system and method for a characterizing system consisting of a fluid sample on a two-sided stage, utilizing data obtained by applying, from both sides thereof, beams of electromagnetic radiation to a fluid coated surface in a containing cell volume. The beams can have the same or different wavelength content and/or polarization state and can be applied at the same or different magnitude angles-of-incidence, and a third typically unpolarized beam can be applied at a normal angle-of-incidence

Spectroscopic Ellipsometer and Polarimeter Systems

A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber

SPECTROSCOPICELLIPSOMETER AND POLARMETER SYSTEMIS

A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for Supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a Substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/ or rotation of the system of elements

Spectroscopic Ellipsometer and Polarimeter Systems

A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber

Spectroscopic Ellipsometer and Polarimeter Systems

A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber

SYSTEM FOR AND METHOD OF INVESTIGATING THE EXACT SAME POINT ON A SAMPLE SUBSTRATE WITH MULTIPLE WAVELENGTHS

Disclosed are system for and method of analyzing a sample at substantially the exact same small spot point on a sample with a plurality of wavelengths

SPECTROPHOTOMETER, ELLIPSOMETER, POLARMETER AND THE LIKE SYSTEMS

Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use