Tryskové plazmatické systémy - experiment a model

In the present work we study the ow of working gas through a plasmajet system. In this work we describe the basic principle of hollow cathode discharge and its use for technological applications, mainly for thin layers coating. One of the important parameters during the deposition is the speed of the working gas ow and with it the sputtered target material towards the substrate. Because of the reproducibility and precision of the experiments it is important to know the relation between the working gas ow and external parameters of the experiment, e.g. ow of the gas and the pressure in the chamber. This is the reason why measurements of ions velocity using Langmuire electrostatic probe and pulse regime of plasmajet were done. Measured data are compared with a computer model, which was developed in this work. This model describes the ow of the working gas by solving Navier-Stokes equation for compressible Newtonian uids. The results of this model are compared with results from the paper describing the ow through the hollow cathode. It shows good agreement inside the cathode. The model is giving dierent results when comparing to measured data which are from the area outside the cathode. Part of the model description is a discussion of the temperature dependence of the ow.V predloženej práci skúmame prúdenie pracovného plynu systémom s plazmatickou tryskou. V práci je popísaný základný princíp výboja v dutej katóde a jeho technologické využitie, najmä pre potreby nanášania tenkých vrstiev. Jedným z dôležitých parametrov pri nanášaní je rýchlosť, s akou sa pohybuje pracovný plyn a s ním rozprášený materiál terča smerom k substrátu. Kvôli presnosti a reprodukovateľnosti experimentov je nutné poznať vzťahy medzi prúdením pracovného plynu a vonkajšími parametrami experimentu, ako je napríklad prúd pracovného plynu a tlak v komore. Pre tieto účely boli spravené merania rýchlosti iónov pomocou Langmuirovej elektrostatickej sondy pri pulznom pracovnom režime trysky. Namerané údaje sú porovnané s počítačovým modelom, ktorý bol vyvinutý v rámci tejto práce. Tento model popisuje prúdenie pracovného plynu numerickým riešením Navier-Stokesovej rovnice pre stlačiteľné newtonovské tekutiny. Model je porovnaný s publikovanými výsledkami popisujúcimi prúdenie v dutej katóde, pričom je preukázateľná zhoda výsledkov. Výstup modelu ale dáva rozdielne výsledky v porovnaní s nameranými údajmi, ktoré pochádzajú z oblasti mimo katódu. Súčasťou popisu modelu je diskusia závislosti prúdenia na teplote.Department of Surface and Plasma ScienceKatedra fyziky povrchů a plazmatuFaculty of Mathematics and PhysicsMatematicko-fyzikální fakult

Reactions of molecular ions in low-temperature plasma

Xdzev pracc: Studinm rca,kci molokularmeh iontu v nizkoteplotnim plazmatu Autor: Peter Rubovic Katedra. (ustav): Katodra. fy/iky povrchu a plazmatu Vedonci bakalarske prace: RNDr. Radok Plasil. Ph.D. o-inail vedouciho: Radek.Plasil«i;n iff.cuni.cz Abstrakt: V predlo/enej ])i;ici skunuune reakcie molekularnych ionov v niz- koteplotnej plazme. Je popisany prineip a konslrukcia aparatury FALP (Flo- wing Afterglow with Langmuir Probe}, ])omocon ktorej skumame dohasinajucu plazmu pouzithn Langmnirovej (elektrostatickej) sondy. Zkonstrnovali snic ki- netieky model ehemickych reakeii a jcho ])ocitacovy model. Diskntnjeme vystup tohoto modelu - cn.sovy vyvoj koiicentracii j(xlnotlivyeh ionov a elektronov y>o- 7A\\7. prndovej trnbico. Zucastnili sine sa na i'i]jra,votreby merania pri te])lotiich tekuteho dnsiku. C'ielbm prace je urcit rychlost.ny koefi- eient rekoinbinacie ionu HCO' s elektromni a jeho zavi.slost' na koiicentracii reaktantu ILj a teplote. Z nameranych /avislosti usud/ujeme, ze .sa jedna o di- sociativnn rckombinacin. Klicova slova: FALP, rekombinacia. kinetika reakeii, pocitacovy model Title: Reactions of Molecular Ions in Low-Temperature Plasma Author: Peter Rnbovic Department: Department of Surface and Plasma Science Supervisor: RNDr. Radek PlasiL Ph.D. Supervisor's e-mail..

Studium reakcí molekulárních iontů v nízkoteplotním plazmatu

Xdzev pracc: Studinm rca,kci molokularmeh iontu v nizkoteplotnim plazmatu Autor: Peter Rubovic Katedra. (ustav): Katodra. fy/iky povrchu a plazmatu Vedonci bakalarske prace: RNDr. Radok Plasil. Ph.D. o-inail vedouciho: Radek.Plasil«i;n iff.cuni.cz Abstrakt: V predlo/enej ])i;ici skunuune reakcie molekularnych ionov v niz- koteplotnej plazme. Je popisany prineip a konslrukcia aparatury FALP (Flo- wing Afterglow with Langmuir Probe}, ])omocon ktorej skumame dohasinajucu plazmu pouzithn Langmnirovej (elektrostatickej) sondy. Zkonstrnovali snic ki- netieky model ehemickych reakeii a jcho ])ocitacovy model. Diskntnjeme vystup tohoto modelu - cn.sovy vyvoj koiicentracii j(xlnotlivyeh ionov a elektronov y>o- 7A\\7. prndovej trnbico. Zucastnili sine sa na i'i]jra,votreby merania pri te])lotiich tekuteho dnsiku. C'ielbm prace je urcit rychlost.ny koefi- eient rekoinbinacie ionu HCO' s elektromni a jeho zavi.slost' na koiicentracii reaktantu ILj a teplote. Z nameranych /avislosti usud/ujeme, ze .sa jedna o di- sociativnn rckombinacin. Klicova slova: FALP, rekombinacia. kinetika reakeii, pocitacovy model Title: Reactions of Molecular Ions in Low-Temperature Plasma Author: Peter Rnbovic Department: Department of Surface and Plasma Science Supervisor: RNDr. Radek PlasiL Ph.D. Supervisor's e-mail...Xdzev pracc: Studinm rca,kci molokularmeh iontu v nizkoteplotnim plazmatu Autor: Peter Rubovic Katedra. (ustav): Katodra. fy/iky povrchu a plazmatu Vedonci bakalarske prace: RNDr. Radok Plasil. Ph.D. o-inail vedouciho: Radek.Plasil«i;n iff.cuni.cz Abstrakt: V predlo/enej ])i;ici skunuune reakcie molekularnych ionov v niz- koteplotnej plazme. Je popisany prineip a konslrukcia aparatury FALP (Flo- wing Afterglow with Langmuir Probe}, ])omocon ktorej skumame dohasinajucu plazmu pouzithn Langmnirovej (elektrostatickej) sondy. Zkonstrnovali snic ki- netieky model ehemickych reakeii a jcho ])ocitacovy model. Diskntnjeme vystup tohoto modelu - cn.sovy vyvoj koiicentracii j(xlnotlivyeh ionov a elektronov y>o- 7A\\7. prndovej trnbico. Zucastnili sine sa na i'i]jra,votreby merania pri te])lotiich tekuteho dnsiku. C'ielbm prace je urcit rychlost.ny koefi- eient rekoinbinacie ionu HCO' s elektromni a jeho zavi.slost' na koiicentracii reaktantu ILj a teplote. Z nameranych /avislosti usud/ujeme, ze .sa jedna o di- sociativnn rckombinacin. Klicova slova: FALP, rekombinacia. kinetika reakeii, pocitacovy model Title: Reactions of Molecular Ions in Low-Temperature Plasma Author: Peter Rnbovic Department: Department of Surface and Plasma Science Supervisor: RNDr. Radek PlasiL Ph.D. Supervisor's e-mail...Department of Surface and Plasma ScienceKatedra fyziky povrchů a plazmatuFaculty of Mathematics and PhysicsMatematicko-fyzikální fakult

Recombination of ions in plasma at 50-300 K

A B S T R A C T Title: Recombination of Ions in Plasma at 50 − 300 K Author: Peter Rubovič Supervisor: Prof. RNDr. Juraj Glosík, DrSc. Abstract: Main part of this doctoral thesis lies in a study of recom- bination of atomic and molecular ions in low temperature plasmatic environment with emphasis on effect of third bodies. Stationary After- glow equipped with Cavity Ring Down Spectrometer and Cryogenic Flowing Afterglow with Langmuir Probe II were used to obtain recom- bination rate coefficients. Electron assisted collisional radiative recom- bination of Ar+ ion was studied in the temperature range of 50−100 K and helium assisted collisional radiative recombination was observed too. Both H+ 3 and its isotopologue D+ 3 were studies in flowing after- glow and spectroscopically in stationary afterglow as well. Binary re- combination rate coefficients and ternary recombination rate coeffi- cients for helium assisted ternary recombination were determined in the temperature range of 50 − 250 K. These coefficients were deter- mined also for pure ortho- and para- nuclear spin configurations of H+ 3 in the temperature range of 80 − 200 K. Keywords: dissociative recombination, collisional radiative recombi- nation, H+ 3 , D+ 3 , Ar+ vii

Rekombinace iontů v plazmatu při teplotách 30-300 K

A B S T R A K T Názov práce: Rekombinácia iónov v plazme pri 50 − 300 K Autor: Peter Rubovič Vedúci doktorskej práce: Prof. RNDr. Juraj Glosík, DrSc. Abstrakt: Hlavná čast' tejto doktorskej práce spočíva v štúdiu rekom- binácie atomárnych a moleculárnych iónov v nízkoteplotnom plazma- tickom prostredí s dôrazom na efekt tretích telies. Boli použité metódy stacionárnej dohasínajúcej plazmy s cavity ring down spektrometrom a kryogénnej prúdiacej dohasínajúcej plazmy. Elektrónom asistovaná zrážkovo radiatívne rekombinácia iónov Ar+ bola študovaná v teplot- nom rozsahu 50−100 K, héliom asistovaná zrážkovo radiatívna rekom- binácia bola pozorovaná tiež. Ión H+ 3 a jeho izotopológ D+ 3 boli štu- dované ako v prúdiacej dohasínajúcej plazme, tak aj spektroskopicky v stacionárnej dohasínajúcej plazme. Binárne rekombinačné koeficienty a ternárne rekombinačné koeficienty pre héliom asistovanú ternárnu rekombináciu boli určené v teplotnom rozsahu 50 − 250 K. Tieto koe- ficienty boli stanované aj pre ortho- a para- konfigurácie spinu jadra iónu H+ 3 v teplotnom rosahu 80 − 200 K. Kl'účové slová: disociatívna rekombinácia, zrážkovo radiatívna rekom- binácia, FALP, CRDS, H+ 3 , D+ 3 , Ar+ viiA B S T R A C T Title: Recombination of Ions in Plasma at 50 − 300 K Author: Peter Rubovič Supervisor: Prof. RNDr. Juraj Glosík, DrSc. Abstract: Main part of this doctoral thesis lies in a study of recom- bination of atomic and molecular ions in low temperature plasmatic environment with emphasis on effect of third bodies. Stationary After- glow equipped with Cavity Ring Down Spectrometer and Cryogenic Flowing Afterglow with Langmuir Probe II were used to obtain recom- bination rate coefficients. Electron assisted collisional radiative recom- bination of Ar+ ion was studied in the temperature range of 50−100 K and helium assisted collisional radiative recombination was observed too. Both H+ 3 and its isotopologue D+ 3 were studies in flowing after- glow and spectroscopically in stationary afterglow as well. Binary re- combination rate coefficients and ternary recombination rate coeffi- cients for helium assisted ternary recombination were determined in the temperature range of 50 − 250 K. These coefficients were deter- mined also for pure ortho- and para- nuclear spin configurations of H+ 3 in the temperature range of 80 − 200 K. Keywords: dissociative recombination, collisional radiative recombi- nation, H+ 3 , D+ 3 , Ar+ viiiKatedra fyziky povrchů a plazmatuDepartment of Surface and Plasma ScienceFaculty of Mathematics and PhysicsMatematicko-fyzikální fakult

Recombination of ions in plasma at 50-300 K

A B S T R A C T Title: Recombination of Ions in Plasma at 50 − 300 K Author: Peter Rubovič Supervisor: Prof. RNDr. Juraj Glosík, DrSc. Abstract: Main part of this doctoral thesis lies in a study of recom- bination of atomic and molecular ions in low temperature plasmatic environment with emphasis on effect of third bodies. Stationary After- glow equipped with Cavity Ring Down Spectrometer and Cryogenic Flowing Afterglow with Langmuir Probe II were used to obtain recom- bination rate coefficients. Electron assisted collisional radiative recom- bination of Ar+ ion was studied in the temperature range of 50−100 K and helium assisted collisional radiative recombination was observed too. Both H+ 3 and its isotopologue D+ 3 were studies in flowing after- glow and spectroscopically in stationary afterglow as well. Binary re- combination rate coefficients and ternary recombination rate coeffi- cients for helium assisted ternary recombination were determined in the temperature range of 50 − 250 K. These coefficients were deter- mined also for pure ortho- and para- nuclear spin configurations of H+ 3 in the temperature range of 80 − 200 K. Keywords: dissociative recombination, collisional radiative recombi- nation, H+ 3 , D+ 3 , Ar+ vii

Plasma-jet systems - experiment and model

In the present work we study the ow of working gas through a plasmajet system. In this work we describe the basic principle of hollow cathode discharge and its use for technological applications, mainly for thin layers coating. One of the important parameters during the deposition is the speed of the working gas ow and with it the sputtered target material towards the substrate. Because of the reproducibility and precision of the experiments it is important to know the relation between the working gas ow and external parameters of the experiment, e.g. ow of the gas and the pressure in the chamber. This is the reason why measurements of ions velocity using Langmuire electrostatic probe and pulse regime of plasmajet were done. Measured data are compared with a computer model, which was developed in this work. This model describes the ow of the working gas by solving Navier-Stokes equation for compressible Newtonian uids. The results of this model are compared with results from the paper describing the ow through the hollow cathode. It shows good agreement inside the cathode. The model is giving dierent results when comparing to measured data which are from the area outside the cathode. Part of the model description is a discussion of the temperature dependence of the ow

Rekombinace iónov v plazme pri 50 - 300 K

A B S T R A C T Title: Recombination of Ions in Plasma at 50 − 300 K Author: Peter Rubovič Supervisor: Prof. RNDr. Juraj Glosík, DrSc. Abstract: Main part of this doctoral thesis lies in a study of recom- bination of atomic and molecular ions in low temperature plasmatic environment with emphasis on effect of third bodies. Stationary After- glow equipped with Cavity Ring Down Spectrometer and Cryogenic Flowing Afterglow with Langmuir Probe II were used to obtain recom- bination rate coefficients. Electron assisted collisional radiative recom- bination of Ar+ ion was studied in the temperature range of 50−100 K and helium assisted collisional radiative recombination was observed too. Both H+ 3 and its isotopologue D+ 3 were studies in flowing after- glow and spectroscopically in stationary afterglow as well. Binary re- combination rate coefficients and ternary recombination rate coeffi- cients for helium assisted ternary recombination were determined in the temperature range of 50 − 250 K. These coefficients were deter- mined also for pure ortho- and para- nuclear spin configurations of H+ 3 in the temperature range of 80 − 200 K. Keywords: dissociative recombination, collisional radiative recombi- nation, H+ 3 , D+ 3 , Ar+ viiiA B S T R A K T Názov práce: Rekombinácia iónov v plazme pri 50 − 300 K Autor: Peter Rubovič Vedúci doktorskej práce: Prof. RNDr. Juraj Glosík, DrSc. Abstrakt: Hlavná čast' tejto doktorskej práce spočíva v štúdiu rekom- binácie atomárnych a moleculárnych iónov v nízkoteplotnom plazma- tickom prostredí s dôrazom na efekt tretích telies. Boli použité metódy stacionárnej dohasínajúcej plazmy s cavity ring down spektrometrom a kryogénnej prúdiacej dohasínajúcej plazmy. Elektrónom asistovaná zrážkovo radiatívne rekombinácia iónov Ar+ bola študovaná v teplot- nom rozsahu 50−100 K, héliom asistovaná zrážkovo radiatívna rekom- binácia bola pozorovaná tiež. Ión H+ 3 a jeho izotopológ D+ 3 boli štu- dované ako v prúdiacej dohasínajúcej plazme, tak aj spektroskopicky v stacionárnej dohasínajúcej plazme. Binárne rekombinačné koeficienty a ternárne rekombinačné koeficienty pre héliom asistovanú ternárnu rekombináciu boli určené v teplotnom rozsahu 50 − 250 K. Tieto koe- ficienty boli stanované aj pre ortho- a para- konfigurácie spinu jadra iónu H+ 3 v teplotnom rosahu 80 − 200 K. Kl'účové slová: disociatívna rekombinácia, zrážkovo radiatívna rekom- binácia, FALP, CRDS, H+ 3 , D+ 3 , Ar+ viiKatedra fyziky povrchů a plazmatuDepartment of Surface and Plasma ScienceFaculty of Mathematics and PhysicsMatematicko-fyzikální fakult

Recombination of ions in plasma at 50-300 K

A B S T R A C T Title: Recombination of Ions in Plasma at 50 − 300 K Author: Peter Rubovič Supervisor: Prof. RNDr. Juraj Glosík, DrSc. Abstract: Main part of this doctoral thesis lies in a study of recom- bination of atomic and molecular ions in low temperature plasmatic environment with emphasis on effect of third bodies. Stationary After- glow equipped with Cavity Ring Down Spectrometer and Cryogenic Flowing Afterglow with Langmuir Probe II were used to obtain recom- bination rate coefficients. Electron assisted collisional radiative recom- bination of Ar+ ion was studied in the temperature range of 50−100 K and helium assisted collisional radiative recombination was observed too. Both H+ 3 and its isotopologue D+ 3 were studies in flowing after- glow and spectroscopically in stationary afterglow as well. Binary re- combination rate coefficients and ternary recombination rate coeffi- cients for helium assisted ternary recombination were determined in the temperature range of 50 − 250 K. These coefficients were deter- mined also for pure ortho- and para- nuclear spin configurations of H+ 3 in the temperature range of 80 − 200 K. Keywords: dissociative recombination, collisional radiative recombi- nation, H+ 3 , D+ 3 , Ar+ vii

Sodium doping and reactivity in pure and mixed ice nanoparticles

Doping of clusters by sodium atoms and subsequent photoionization (NaPI) is used as a fragmentation-free cluster ionization method. Here we investigate different clusters using NaPI and electron ionization (EI) with a reflectron time-of-flight mass spectrometer (RTOF). The mass spectra of the same clusters ionized by NaPI and EI reveal significant differences which point to Na reactivity in the clusters. First, we discuss mixed XM·(H2O)N (X = HNO3, N2O) clusters where reactions between Na and molecules X leads to the “cluster invisibility” for the NaPI method. Second, mixed (NH3)M·(H2O)N clusters are observed by both methods, but they reveal different cluster compositions, and the mass spectra suggest that neither the EI nor the NaPI spectrum corresponds exactly to the neutral cluster distribution. Finally, we discuss the reactions of Na in pure water clusters as a function of the number of Na atoms doped into the clusters. In summary, we present experimental evidence that the NaPI method in the present cases does not reveal the size and composition of the neutral clusters. A detailed understanding of Na reactivity in the clusters is needed for its application as a fragmentation-free cluster ionization method. Besides, we introduce the combination of NaPI and EI as a new tool to investigate the sodium reactivity in clusters and aerosol particles