Theoretical investigation of a miniature microwave driven plasma jet

Microwave and radio frequency driven plasmas jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. As a new plasma source the MMWICP (Miniature Micro Wave ICP) has been proposed, a small scale plasma jet with inductive coupling based on a specially designed resonator that acts as an LC-resonance circuit. This work presents a theoretical model of the new device, based on a series representation of the electromagnetic field in the resonator and the volume integrated (global) model for the loss processes within the plasma. An infinite number of modes can be found ordered by the azimuthal wave number m. These modes essentially determine the electromagnetic behavior of the system and differ from ordinary cavity modes. The mode m=0 can be identified with the inductive mode and is called H-mode, the mode m=1 is the capacitive mode and is called E-mode. Both modes refer to different operating regimes, which are separated by different values of the plasma parameters. In a second step the matching network and its characteristics are taken into account in order to find stable equilibrium points and possible hysteresis effects. As main result, the feasibility of inductive power coupling for the MMWICP resonator is shown

New and versatile minature microwave plasma source

Miniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the incident power the discharge runs in E-mode or in more efficient H-mode. The high resolution radial images of the source reveal different morphologies of different discharge modes. The measurements show an unexpected limitation in dissipated power, accompanied by spontaneous transition from H- to E-mode. The efficiency of the source is high: about 67% of incident power (P0) is deposited in the discharge, which is estimated from OES

Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements

The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of p = 1000 Pa and a gas temperature of Tg = 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of ne ≈ 6.4 × 1018 m−3 as E/H-hybridmode with an capacitive and inductive component

Theoretical investigation of a novel microwave driven ICP plasma jet

Theoretical investigation of a novel microwave driven ICP plasma jet 26 Jun 2019, 16:15 15m Gold Coast III/IV (Double Tree at the Entrance to Universal Orlando) Oral 2.7 Microwave Plasma Interaction 2.7 Microwave Plasma Interaction III Speaker Mr Michael Klute (Ruhr University) Description Microwave and radio frequency driven plasmas-jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. This mode, however, couples considerable power to ions which limits the plasma density and the efficiency and gives rise to negative side effects such as erosion. The inductive coupling, known as H-mode, eliminates these disadvantages and is attractive for large scale plasmas. A novel small scale, microwave driven plasma-jet has been proposed by \textit{Porteanu et al.}[1]. It is operated as an inductive discharge and that has been recently characterized using optical emission spectroscopy (OES) by \textit{Stefanovic et al.}[2]. In this work the proposed plasma-jet is examined theoretically. A global model of the new device is presented based on the volume-integrated balances of particle number and electron density, and a series representation of the electromagnetic field in the resonator. An infinite number of modes can be found ordered by the azimuthal wave number m. The mode m=0 can be identified with the inductive mode and will be called H-mode, the mode m=1 is the capacitive mode and will be called E-mode. By equating the electromagnetic power that is absorbed by the plasma with the loss power, stable operating points and hysteresis effects can be investigated. In a second step the spatially resolved electromagnetic field strength will be considered. All results will be compared to the results of the OES measurements and imagines obtained from CCD-imaging. [1]Porteanu et al.\textit{Plasma Sources Sci.Technol.}\textbf{22}, 035016 (2013) [2] Stefanovic et al.\textit{Plasma Sources Sci.Technol.}\textbf{27}, 12LT01 (2018) [3] Porteanu et al.\textit{Plasma Sources Sci.Technol.} accepted (2019

Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements

The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of p = 1000 Pa and a gas temperature of Tg = 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of ne ≈ 6.4 × 1018 m−3 as E/H-hybridmode with an capacitive and inductive component