Diagnostics of Magnetron Sputtering Discharges by Resonant Absorption Spectroscopy

The determination of the absolute number density of species in gaseous discharge is one of the most important plasma diagnostics tasks. This information is especially demanded in the case of low-temperature sputtering discharges since the time- and space-resolved behavior of the sputtered particles in the ground state determines the plasma kinetics and plasma chemistry in this case. Historically, magnetron sputtering is often implied when talking about sputtering discharges due to the popularity and the numerous advantages this technique provides for coating applications. The determination of the absolute density of various atomic and molecular species in magnetron sputtering discharges along with its time and space evolution may be important from several points of view, since it may help to estimate the total flux of particles to a virtual surface in the plasma reactor, to compare the throughputs of two different sputtering systems, to use the absolute particle concentrations as an input data for discharge modeling, etc. This chapter is intended to provide an overview on the advantages and main principles of resonant absorption spectroscopy technique as a reliable tool for in situ diagnostics of the particle density, as well as on the recent progress in characterization of magnetron sputtering discharges using this technique, when the role of reference source is played by another low-temperature discharge. Both continuous and pulsed magnetron sputtering discharges are overviewed. Along with the introduction covering the main principles of magnetron sputtering, the description of the basics of resonant absorption technique, and the selected results related to the particle density determination in direct current and high-power pulsed magnetron sputtering discharges are given, covering both space- and time-resolved density evolutions

The influence of power and frequency on the filamentary behavior of a flowing DBD-application to the splitting of CO2

In this experimental study, a flowing dielectric barrier discharge operating at atmospheric pressure is used for the splitting of CO2 into O2 and CO. The influence of the applied frequency and plasma power on the microdischarge properties is investigated to understand their role on the CO2 conversion. Electrical measurements are carried out to explain the conversion trends and to characterize the microdischarges through their number, their lifetime, their intensity and the induced electrical charge. Their influence on the gas and electrode temperatures is also evidenced through optical emission spectroscopy and infrared imaging. It is shown that, in our configuration, the conversion depends mostly on the charge delivered in the plasma and not on the effective plasma voltage when the applied power is modified. Similarly, at constant total current, a better conversion is observed at low frequencies, where a less filamentary discharge regime with a higher effective plasma voltage than that at a higher frequency is obtained

Optical diagnostics of hot-target magnetron sputtering discharge

editorial reviewe

Role of Plasma Catalysis in the Microwave Plasma‐Assisted Conversion of CO2

Climate change and global warming caused by the increasing emissions of greenhouse gases (such as CO2) recently attract attention of the scientific community. The combination of plasma and catalysis is of great interest for turning plasma chemistry in applications related to pollution and energy issues. In this chapter, our recent research efforts related to optimization of the conversion of CO2 and CO2/H2O mixtures in a pulsed surface‐wave sustained microwave discharge are presented. The effects of different plasma operating conditions and catalyst preparation methods on the CO2 conversion and its energy efficiency are discussed. It is demonstrated that, compared to the plasma‐only case, the CO2 conversion and energy efficiency can be enhanced by a factor of ∼2.1 by selecting the appropriate conditions. The catalyst characterization shows that Ar plasma treatment results in a higher density of oxygen vacancies and a comparatively uniform distribution of NiO on the TiO2 surface, which strongly influence CO2 conversion and energy efficiencies of this process. The dissociative electron attachment of CO2 at the catalyst surface enhanced by the oxygen vacancies and plasma electrons may explain the increase of conversion and energy efficiencies in this case. A mechanism of plasma‐catalytic conversion of CO2 at the catalyst surface in CO2 and CO2/H2O mixtures is proposed

Ion density evolution in a high-power sputtering discharge with bipolar pulsing

peer reviewe

Sputtering process in the presence of plasma self-organization

peer reviewe

Enhancing the Greenhouse Gas Conversion Efficiency in Microwave Discharges by Power Modulation

Scientific interest to the plasma-assisted greenhouse gas conversion continuously increases nowadays, as a part of the global Green Energy activities. Among the plasma sources suitable for conversion of CO2 and other greenhouse gases, the non-equilibrium (low-temperature) discharges where the electron temperature is considerably higher than the gas temperature, represent special interest. The flowing gas discharges sustained by microwave radiation are proven to be especially suitable for molecular gas conversion due to high degree of non-equilibrium they possess. In this Chapter the optimization of CO2 conversion efficiency in microwave discharges working in pulsed regime is considered. The pulsed energy delivery represents new approach for maximization of CO2 conversion solely based on the discharge “fine-tuning”, i. e. without the additional power expenses. In our work several discharge parameters along the gas flow direction in the discharge have been studied using various diagnostic techniques, such as optical actinometry, laser-induced fluorescence, and gas chromatography. The results show that CO2 conversion efficiency can be essentially increased solely based on the plasma pulse frequency tuning. The obtained results are explained by the relation between the plasma pulse parameters and the characteristic time of the relevant energy transfer processes in the discharge

Insight into nitrogen fixation kinetics in a pulsed microwave discharge

peer reviewe