Accurate Transfer of Individual Nanoparticles onto Single Photonic Nanostructures

Controlled integration of metallic nanoparticles (NPs) onto photonic nanostructures enables the realization of complex devices for extreme light confinement and enhanced light–matter interaction. For instance, such NPs could be massively integrated on metal plates to build nanoparticle-on-mirror (NPoM) nanocavities or photonic integrated waveguides (WGs) to build WG-driven nanoantennas. However, metallic NPs are usually deposited via drop-casting, which prevents their accurate positioning. Here, we present a methodology for precise transfer and positioning of individual NPs onto different photonic nanostructures. Our method is based on soft lithography printing that employs elastomeric stamp-assisted transfer of individual NPs onto a single nanostructure. It can also parallel imprint many individual NPs with high throughput and accuracy in a single step. Raman spectroscopy confirms enhanced light–matter interactions in the resulting NPoM-based nanophotonic devices. Our method mixes top-down and bottom-up nanofabrication techniques and shows the potential of building complex photonic nanodevices for multiple applications ranging from enhanced sensing and spectroscopy to signal processing