X-ray lithographic alignment and overlay applied to double-gate MOSFET fabrication

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.Includes bibliographical references (leaves 117-118).Double-gate MOSFETs represent a significant solution to transistor scaling problems and promise a dramatic improvement in both performance and power consumption. In this work, a planar lithographic process is presented that is capable of producing double-gate MOSFET (DGFET) gate structures with 50 nm physical gate length and <5 nm alignment between upper and lower gates. Because a self-aligned approach is not taken, the central challenge in fabrication is to define each gate in separate lithographic steps with precision alignment of upper to lower-gate masks. In order to obtain optimum device performance, the position of the lower-gate should be aligned to the upper-gate to better than 10% of the gate length. The gates are defined using X-ray lithography (a close-proximity shadow printing scheme). The associated alignment scheme, Interferometric Broad Band Imaging (IBBI), has been proven to yield nanometer level sensitivity. While the IBBI alignment system offers superior alignment detectivity, it must be complemented by comparably successful mask pattern placement in order to yield structure details within the desired 5 nm tolerances. This work addresses the details of a novel mask design and fabrication scheme as well as its incorporation into the process flow of the DGFET. Additionally, the parasitic effects of strain that result from wafer bonding and thermal effects have been measured and analyzed.by Mitchell W. Meinhold.Ph.D

Aligned T-gate, fabrication using X-ray lithography

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.Includes bibliographical references (leaves 55-56).by Mitchell Meinhold.M.S

Nanostructures, Technology, Research, and Applications

Contains reports on the nanostructures laboratory, eighteen research projects and a list of publications.Joint Services Electronics Program Grant DAAH04-95-1-0038Semiconductor Research Corporation Contract 95-LJ-550National Science Foundation Grant ECS 94-07078U.S. Army Research Office Grant DAAH04-95-1-0564Defense Advanced Research Projects Agency/Naval Air Systems Command Contract N00019-95-K-0131National Aeronautics and Space Administration Contract NAS8-38249National Aeronautics and Space Administration Grant NAGW-2003IBM Corporation Contract 1622U.S. Navy- Office of Naval Research Grant N00014-95-1-1297U.S. Army Research Office Grant DAAH04-94-G-0377U.S. Air Force - Office of Scientific Research Grant F-49-620-92-J-0064U.S. Air Force - Office of Scientific Research Grant F-49-620-95-1-031

Nanostructures, Technology, Research, and Applications

Contains reports on twenty research projects and a list of publications.Joint Services Electronics Program Grant DAAH04-95-1-0038National Science Foundation Grant ECS-94-07078Semiconductor Research CorporationU.S. Army Research Office Grant DAAH04-95-1-0564Defense Advanced Research Projects Agency/Naval Air Systems Command Contract N00019-95-K-0131National Aeronautics and Space Administration Contract NAS8-38249National Aeronautics and Space Administration Grant NAGW-2003IBM Corporation Contract 1622National Science Foundation Graduate FellowshipU.S. Navy - Office of Naval Research Grant N00014-95-1-1297U.S. Army Research Office Contract DAAH04-94-G-0377U.S. Air Force - Office of Scientific Research Grant F49620-92-J-0064U.S. Air Force - Office of Scientific Research Grant F49620-95-1-0311National Science Foundation Contract DMR 94-0034U.S. Air Force - Office of Scientific Research Contract F49620-96-0126Harvard-Smithsonian Astrophysical Observatory Contract SV630304National Aeronautics and Space Administration Grant NAG5-5105Los Alamos National Laboratory Contract E57800017-9

Nanostructures Technology, Research, and Applications

Contains reports on twenty-four research projects and a list of publications.Joint Services Electronics Program Grant DAAHO4-95-1-0038Defense Advanced Research Projects Agency/Semiconductor Research Corporation SA1645-25508PGU.S. Army Research Office Grant DAAHO4-95-1-0564Defense Advanced Research Projects Agency/U.S. Navy - Naval Air Systems Command Contract N00019-95-K-0131Suss Advanced Lithography P. O. 51668National Aeronautics and Space Administration Contract NAS8-38249National Aeronautics and Space Administration Grant NAGW-2003Defense Advanced Research Projects Agency/U.S. Army Research Office Grant DAAHO4-951-05643M CorporationDefense Advanced Research Projects Agency/U.S. Navy - Office of Naval Research Contract N66001-97-1-8909National Science Foundation Graduate FellowshipU.S. Army Research Office Contract DAAHO4-94-G-0377National Science Foundation Contract DMR-940034National Science Foundation Grant DMR 94-00334Defense Advanced Research Projects Agency/U.S. Air Force - Office of Scientific Research Contract F49620-96-1-0126Harvard-Smithsonian Astrophysical Observatory Contract SV630304National Aeronautics and Space Administration Grant NAG5-5105Los Alamos National Laboratory Contract E57800017-9GSouthwest Research Institute Contract 83832MIT Lincoln Laboratory Advanced Concepts ProgramMIT Lincoln Laboratory Contract BX-655