PECVD low stress silicon nitride analysis and optimization for the fabrication of CMUT devices

Two technological options to achieve a high deposition rate, low stress plasma-enhanced chemical vapor deposition (PECVD) silicon nitride to be used in capacitive micromachined ultrasonic transducers (CMUT) fabrication are investigated and presented. Both options are developed and implemented on standard production line PECVD equipment in the framework of a CMUT technology transfer from R & D to production. A tradeoff between deposition rate, residual stress and electrical properties is showed. The first option consists in a double layer of silicon nitride with a relatively high deposition rate of ~100 nm min−1 and low compressive residual stress, which is suitable for the fabrication of the thick nitride layer used as a mechanical support of the CMUTs. The second option involves the use of a mixed frequency low-stress silicon nitride with outstanding electrical insulation capability, providing improved mechanical and electrical integrity of the CMUT active layers. The behavior of the nitride is analyzed as a function of deposition parameters and subsequent annealing. The nitride layer characterization is reported in terms of interfaces density influence on residual stress, refractive index, deposition rate, and thickness variation both as deposited and after thermal treatment. A sweet spot for stress stability is identified at an interfaces density of 0.1 nm−1, yielding 87 MPa residual stress after annealing. A complete CMUT device fabrication is reported using the optimized nitrides. The CMUT performance is tested, demonstrating full functionality in ultrasound imaging applications and an overall performance improvement with respect to previous devices fabricated with non-optimized silicon nitride

Deliberative democracy and the politics of redistribution: the case of the Indian Panchayats

By examining evidence from India, where quotas for women in local government were introduced in 1993, this article argues that institutional reform can disturb hegemonic discourses sufficiently to open a window of opportunity where deliberative democratic norms take root and where, in addition to the politics of recognition, the politics of redistribution also operates

Years of life that could be saved from prevention of hepatocellular carcinoma

BACKGROUND: Hepatocellular carcinoma (HCC) causes premature death and loss of life expectancy worldwide. Its primary and secondary prevention can result in a significant number of years of life saved. AIM: To assess how many years of life are lost after HCC diagnosis. METHODS: Data from 5346 patients with first HCC diagnosis were used to estimate lifespan and number of years of life lost after tumour onset, using a semi-parametric extrapolation having as reference an age-, sex- and year-of-onset-matched population derived from national life tables. RESULTS: Between 1986 and 2014, HCC lead to an average of 11.5 years-of-life lost for each patient. The youngest age-quartile group (18-61 years) had the highest number of years-of-life lost, representing approximately 41% of the overall benefit obtainable from prevention. Advancements in HCC management have progressively reduced the number of years-of-life lost from 12.6 years in 1986-1999, to 10.7 in 2000-2006 and 7.4 years in 2007-2014. Currently, an HCC diagnosis when a single tumour <2 cm results in 3.7 years-of-life lost while the diagnosis when a single tumour 65 2 cm or 2/3 nodules still within the Milan criteria, results in 5.0 years-of-life lost, representing the loss of only approximately 5.5% and 7.2%, respectively, of the entire lifespan from birth. CONCLUSIONS: Hepatocellular carcinoma occurrence results in the loss of a considerable number of years-of-life, especially for younger patients. In recent years, the increased possibility of effectively treating this tumour has improved life expectancy, thus reducing years-of-life lost

Impact of safety-related dose reductions or discontinuations on sustained virologic response in HCV-infected patients: Results from the GUARD-C Cohort

BACKGROUND: Despite the introduction of direct-acting antiviral agents for chronic hepatitis C virus (HCV) infection, peginterferon alfa/ribavirin remains relevant in many resource-constrained settings. The non-randomized GUARD-C cohort investigated baseline predictors of safety-related dose reductions or discontinuations (sr-RD) and their impact on sustained virologic response (SVR) in patients receiving peginterferon alfa/ribavirin in routine practice. METHODS: A total of 3181 HCV-mono-infected treatment-naive patients were assigned to 24 or 48 weeks of peginterferon alfa/ribavirin by their physician. Patients were categorized by time-to-first sr-RD (Week 4/12). Detailed analyses of the impact of sr-RD on SVR24 (HCV RNA <50 IU/mL) were conducted in 951 Caucasian, noncirrhotic genotype (G)1 patients assigned to peginterferon alfa-2a/ribavirin for 48 weeks. The probability of SVR24 was identified by a baseline scoring system (range: 0-9 points) on which scores of 5 to 9 and <5 represent high and low probability of SVR24, respectively. RESULTS: SVR24 rates were 46.1% (754/1634), 77.1% (279/362), 68.0% (514/756), and 51.3% (203/396), respectively, in G1, 2, 3, and 4 patients. Overall, 16.9% and 21.8% patients experienced 651 sr-RD for peginterferon alfa and ribavirin, respectively. Among Caucasian noncirrhotic G1 patients: female sex, lower body mass index, pre-existing cardiovascular/pulmonary disease, and low hematological indices were prognostic factors of sr-RD; SVR24 was lower in patients with 651 vs. no sr-RD by Week 4 (37.9% vs. 54.4%; P = 0.0046) and Week 12 (41.7% vs. 55.3%; P = 0.0016); sr-RD by Week 4/12 significantly reduced SVR24 in patients with scores <5 but not 655. CONCLUSIONS: In conclusion, sr-RD to peginterferon alfa-2a/ribavirin significantly impacts on SVR24 rates in treatment-naive G1 noncirrhotic Caucasian patients. Baseline characteristics can help select patients with a high probability of SVR24 and a low probability of sr-RD with peginterferon alfa-2a/ribavirin

Particle dispersion and wall-dependent fluid scales in turbulent bounded flow: implications for local equilibrium models

Theoretical models for particle dispersion in turbulent wall layers are based on closure assumptions for particle-turbulence correlations which strongly depend on the wall-normal coordinate. This paper presents new data for the near-wall dispersion of inertial particles in fully developed turbulent channel flow, obtained using direct numerical simulation (DNS) with a one-way point-particle approach. The link between wall-dependent flow time scales and particle time scales is discussed addressing further the issue of using integral flow time scales to parametrize particle behavior. This is fundamental to validate closure relations in theoretical local-equilibrium models for particle dispersion in wall-bounded flows, where the reduction of the fluid velocity fluctuation in the wall-normal direction is not accompanied by an equivalent reduction of the particle velocity fluctuation

INFLUENCE OF GRAVITY AND LIFT ON PARTICLE VELOCITY STATISTICS AND TRANSFER RATES IN TURBULENT VERTICAL CHANNEL FLOW

The present study reports detailed statistics for velocity and transfer rates of heavy particles dispersed in turbulent boundary layers. Statistics have been extracted from a homogeneous source of data covering a large target parameter space and are used here to analyze the effects of gravity and lift on particle dispersion and deposition in a systematic way. Datasets were obtained performing Direct Numerical Simulation (DNS) of particle-laden turbulent upward/downward flow in a vertical channel. Six values for the particle timescale (the particle Stokes number, St) ranging three orders of magnitude were considered to analyze the deposition process as the controlling mechanism was shifting from turbulent diffusion to inertia-moderated crossing trajectories. For the particle timescales examined, gravity and lift do not influence the qualitative behavior of particles even though velocity profiles and deposition coefficients are modified in a non-monotonic fashion, reaching an optimum for St >= 15. Physical mechanisms for the different behavior are discussed. Raw data and statistics obtained from the present DNS are made available at http://cfd.cineca.it (mirror site: http://158.110.32.35/download/database) and can be used to test simple models and closure equations for multiphase RANS and Large Eddy simulations