Fabrication of Miniaturized Variable-focus Lens Using Liquid Filling Technique

This paper describes a simple method for fabricating a variable-focus lens by using PDMS (polydimethylsiloxane) and filling with liquid for the variable-focus lens. The lens diameter of 2-mm was designed in this experiment and expected to reach the focal length in the range of 3 ~ 12 mm. The theoretical value between the liquid volume and the lens contact angle at different focal lengths were simulated and measured. The pumped-in volumes ranged from 200 to 1400 $\mu$l, the contact angles ranged from 14.25 degrees to 49.02 degrees. Changing the deformation of PDMS film using different micro-fluidic volume produces the variable focal length from 4 10 mm in this experiment. The proposed method successfully fabricated a variable-focus lens. Bonding PDMS only once using no expensive instrument such as oxygen plasma was accomplished. The final objective is to insert the variable focus lens into portable optical imagery products.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing

Two-dimensional simulations of ion concentration distribution in microstructural electroforming

A theoretical model is constructed to predict the metal ion concentration distribution during the electroforming of high-aspect-ratio microstructures. Two-dimensional numerical simulations are then performed using COMSOL MultiphysicsTM software to investigate the effect of the processing conditions and the microstructure geometry on the electroforming results. The electroforming outcome is significantly dependent upon the current density and the microstructure aspect ratio, respectively. The simulation results for the electroforming of microstructural posts with an aspect ratio of 10:1 are found to be in good agreement with the analytical solutions

Measurement of microstructure in micro electro mechanical systems using optical interferometric microscope

641-649<span style="mso-fareast-font-family: DFKai-SB" lang="EN-GB">An automatic measurement system for micro electro mechanical element with optical interferometric microscope is presented in the paper. The system introduces a novel method to calculate the central dark fringe (intensity minimum) and central bright fringe (intensity maximum) in the image. The changing of height in asymmetric micro-structure, based on the phase definition of interference fringe can be calculated. Interferometric image information is derived through image processing method, and innovated contour line algorithm is used to build up micro-structure 3D profile. In the experiments, the total processing time for five parts of element could be reduced to less than 5 s and the system error is less than 0.02 μm. </span

Automatic optical inspection system for the image quality of microlens array

635-643An automatic optical inspection system for the image quality and light field of a microlens array is presented in this paper. For the inspection of microlens array, XY-Table is used to the positioning of micro-lens array. With a He-Ne laser beam as a probing light, the measured image will be shown on the screen. A CCD camera captures the image of the screen and sends the data to the computer to analyze the luminosity function and uniformity. The noise disturbance of energy fluctuation of light field can be filtered by dividing the reference light intensity by the measured value. The light field measurement system checks the photometric quantity of each check point in sequence by distributing check points and several quality parameters are made for analysis to evaluate the uniformity of light field. The novel quality parameters are used to identify the quality of light field and provide a further understanding of the performance of microlens array

Automatic inspection system for measurement of lens field curvature by means of computer vision

708-714This paper proposed an automatic inspection system for field curvature in order to replace the present lens measurement device for curvature of field and manual adjusting of screen distance. The system utilizes a screen equipped with automatic driving system and computer vision technique, along with DLP projection and computer software to capture data from image area by scanning, and then obtains the average and threshold values of its pixels. The analysis is based on 8 adjoining points to conduct contractive algorithm between bright spot and dark spot, and automatically measure the figure projected on a screen and provide real-time measuring results. The drawbacks of traditional manual measurement can be completely avoided by this system. When comparing the measured result with that of the optics emulating software, the accuracy and time effect of this automatic inspection measurement for the lens aberration of field curvature are significant

可變焦平凸液態透鏡之模組製作方法

一種可變焦平凸液態透鏡之模組製作方法，製作一可變焦透鏡之基座，該基座包含一透鏡孔、一致動孔及連通其間之一流道；製作一透鏡薄膜，係將液態PDMS均勻塗佈於鍍有金屬層之一基材上，藉以翻製出該透鏡薄膜，繼續，將該透鏡薄膜、一受電壓驅動位移之致動器及一透明板體，以液態PDMS為接合劑封裝接合於基座上，俾令該透鏡孔、致動孔及流道間形成封閉之一密閉空間，該密閉空間中預先封裝填滿有一液體，最後，將上述之基座置於烤箱中烘烤接合，成型一可變焦平凸液態透鏡之模組成品，俾利用電壓驅動該致動器位移促使該透鏡薄膜得以往復形變達到可變焦之功效

Application of laser speckle technology in solar wafer roughness inspection system

523-530An optical inspection system has been developed to study laser speckle technology which analyzes the solar wafer roughness. It can, accurately measure the surface roughness, without contacting with the surface of the solar cells and increase the speed of measurement. The incident laser light on the surface of a solar wafer generates a reflected light, then, the variations in roughness of the speckle pattern can be observed for further analysis and judgement. According to the randomly-distributed bright spots, statistical methods are adopted to analyze the diffraction efficiency of computer-simulated surface relief gratings and calculate the surface roughness of solar wafers. The surface roughness of a solar wafer is determined by a CCD camera and the conveyor while using independently-developed software for rapid and continuous imaging as well as analysis through the image processing toolkit. In the future, this inspection technology can be utilized in industries related to solar wafer manufacturing